Abstract

A heterodyne interference microscope arrangement for full-field imaging is described. The reference and object beams are formed with highly correlated, time-varying laser speckle patterns. The speckle illumination confers a confocal transfer function to the system, and by temporal averaging, the coherence noise that often degrades coherent full-field microscope images is suppressed. The microscope described is similar to a Linnik-type microscope and allows the use of high-numerical-aperture objective lenses, but the temporal coherence of the illumination permits the use of a low-power achromatic doublet in the reference arm. The use of a doublet simplifies alignment of the microscope and can reduce the cost. Preliminary results are presented that demonstrate full-field surface height precision of 1 nm rms.

© 2004 Optical Society of America

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2003

T. Tkaczyk and R. Jóźwicki, Opt. Eng. 42, 2391 (2003).

S. Ando and A. Kimachi, IEEE Trans. Electron. Devices 50, 2059 (2003).

M. C. Pitter, J. Y. L. Goh, M. G. Somekh, B. R. Hayes-Gill, M. Clark, and S. P. Morgan, Electron. Lett. 39, 1339 (2003).

2002

2000

S. Bourquin, V. Monterosso, P. Seitz, and R. P. Salathé, Opt. Lett. 25, 102 (2000).

M. G. Somekh, C. W. See, and J. Goh, Opt. Commun. 174, 75 (2000).

1990

1983

1966

P. Carre, Metrologia 2, 13 (1966).

Ando, S.

S. Ando and A. Kimachi, IEEE Trans. Electron. Devices 50, 2059 (2003).

Beaurepaire, E.

Boccara, A.-C.

Bourquin, S.

Carre, P.

P. Carre, Metrologia 2, 13 (1966).

Clark, M.

M. C. Pitter, J. Y. L. Goh, M. G. Somekh, B. R. Hayes-Gill, M. Clark, and S. P. Morgan, Electron. Lett. 39, 1339 (2003).

Dubois, A.

Dunn, M.

Goh, J.

M. G. Somekh, C. W. See, and J. Goh, Opt. Commun. 174, 75 (2000).

Goh, J. Y. L.

M. C. Pitter, J. Y. L. Goh, M. G. Somekh, B. R. Hayes-Gill, M. Clark, and S. P. Morgan, Electron. Lett. 39, 1339 (2003).

Hardis, J. E.

Hayes-Gill, B. R.

M. C. Pitter, J. Y. L. Goh, M. G. Somekh, B. R. Hayes-Gill, M. Clark, and S. P. Morgan, Electron. Lett. 39, 1339 (2003).

Józwicki, R.

T. Tkaczyk and R. Jóźwicki, Opt. Eng. 42, 2391 (2003).

Kimachi, A.

S. Ando and A. Kimachi, IEEE Trans. Electron. Devices 50, 2059 (2003).

Massie, N. A.

Migdall, A. L.

Monterosso, V.

Morgan, S. P.

M. C. Pitter, J. Y. L. Goh, M. G. Somekh, B. R. Hayes-Gill, M. Clark, and S. P. Morgan, Electron. Lett. 39, 1339 (2003).

Morris, J.

Muenter, S.

Pitter, M. C.

M. C. Pitter, J. Y. L. Goh, M. G. Somekh, B. R. Hayes-Gill, M. Clark, and S. P. Morgan, Electron. Lett. 39, 1339 (2003).

Roop, B.

Salathé, R. P.

See, C. W.

M. G. Somekh, C. W. See, and J. Goh, Opt. Commun. 174, 75 (2000).

Seitz, P.

Somekh, M. G.

M. C. Pitter, J. Y. L. Goh, M. G. Somekh, B. R. Hayes-Gill, M. Clark, and S. P. Morgan, Electron. Lett. 39, 1339 (2003).

M. G. Somekh, C. W. See, and J. Goh, Opt. Commun. 174, 75 (2000).

Swain, D.

Tkaczyk, T.

T. Tkaczyk and R. Jóźwicki, Opt. Eng. 42, 2391 (2003).

Vabre, L.

Xia, G. J.

Zheng, Y. C.

Appl. Opt.

Electron. Lett.

M. C. Pitter, J. Y. L. Goh, M. G. Somekh, B. R. Hayes-Gill, M. Clark, and S. P. Morgan, Electron. Lett. 39, 1339 (2003).

IEEE Trans. Electron. Devices

S. Ando and A. Kimachi, IEEE Trans. Electron. Devices 50, 2059 (2003).

Metrologia

P. Carre, Metrologia 2, 13 (1966).

Opt. Commun.

M. G. Somekh, C. W. See, and J. Goh, Opt. Commun. 174, 75 (2000).

Opt. Eng.

T. Tkaczyk and R. Jóźwicki, Opt. Eng. 42, 2391 (2003).

Opt. Lett.

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