Abstract

Measurement of the phase difference between the 0th and the 1st transmitted diffraction orders of a symmetrical surface-relief grating recorded on a photoresist film is carried out by replacement of the grating in the same setup with which it was recorded. The measurement does not depend on lateral shifts of the replaced grating relative to the interference pattern, on environmental phase perturbations or on the wave-front quality of the interfering beams. The experimental data agree rather well with theoretical results calculated for sinusoidal profiled gratings.

© 2003 Optical Society of America

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References

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  1. J. N. Mait and D. W. Prather, eds. Selected Papers on Subwavelength Diffractive Optics, Vol. 166 of SPIE Milestone Series (SPIE, Bellingham, Wash., 2001).
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2001 (1)

1999 (1)

1995 (1)

1988 (1)

1983 (1)

1979 (1)

M. Breide, S. Johansson, L.-E. Nilsson, and H. Ahlèn, Opt. Acta 26, 11, 1427 (1979).

Ahlèn, H.

M. Breide, S. Johansson, L.-E. Nilsson, and H. Ahlèn, Opt. Acta 26, 11, 1427 (1979).

Assunção, B. M.

Breide, M.

M. Breide, S. Johansson, L.-E. Nilsson, and H. Ahlèn, Opt. Acta 26, 11, 1427 (1979).

Case, S. K.

Cescato, L.

Chandezon, J.

da Costa, I. F.

de Lima, C. R. A.

Destouches, N.

Enger, R. C.

Frejlich, J.

Giovannini, H.

Granet, G.

Johansson, S.

M. Breide, S. Johansson, L.-E. Nilsson, and H. Ahlèn, Opt. Acta 26, 11, 1427 (1979).

Lequime, M.

Li, L.

Mendes, G. F.

Nevière, M.

M. Nevière and E. Popov, Light Propagation in Periodic Media: Differential Theory and Design (Marcel Dekker, New York, in press).

Nilsson, L.-E.

M. Breide, S. Johansson, L.-E. Nilsson, and H. Ahlèn, Opt. Acta 26, 11, 1427 (1979).

Plumey, J.-P.

Popov, E.

M. Nevière and E. Popov, Light Propagation in Periodic Media: Differential Theory and Design (Marcel Dekker, New York, in press).

Appl. Opt. (5)

Opt. Acta (1)

M. Breide, S. Johansson, L.-E. Nilsson, and H. Ahlèn, Opt. Acta 26, 11, 1427 (1979).

Other (2)

J. N. Mait and D. W. Prather, eds. Selected Papers on Subwavelength Diffractive Optics, Vol. 166 of SPIE Milestone Series (SPIE, Bellingham, Wash., 2001).

M. Nevière and E. Popov, Light Propagation in Periodic Media: Differential Theory and Design (Marcel Dekker, New York, in press).

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Figures (4)

Fig. 1
Fig. 1

Scheme of the incident and diffracted waves. EA and EB are the amplitudes of the incident waves, h is the grating depth, and Λ is the period.

Fig. 2
Fig. 2

Photographs of the Moiré-like pattern formed in each direction of the detected beams. The left-hand image corresponds to the worst angular adjustment; the right, to the best.

Fig. 3
Fig. 3

Scanning electron microscope photographs of the cross section of three samples with different depths and profiles: A, 12; B, 11; and C, 1. The ellipses formed in the phase difference measurements are shown in the inset of each photograph.

Fig. 4
Fig. 4

Experimental φ1-φ0 measurements for 13 samples with different depths and profiles. The numbers of the samples are indicated beside the squares.

Equations (6)

Equations on this page are rendered with MathJax. Learn more.

I=I1+I2+2I1I2cosKx+ψ,
ΦA=ψ+φB-1-φA0.
ΦB=ψ+φB0-φA+1.
IA=IA0+IB-1+2IA0IB-1×cosωt+ψ0+φ1-φ0,
IB=IB0+IA+1+2IB0IA+1×cosωt+ψ0-φ1+φ0.
Δ=±2φ1-φ0,

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