Abstract

We present a new interferometer system devised for surface-profile metrology with multiple two-point-diffraction sources that are made from a pair of single-mode optical fibers. The diffraction interferometer system performs an absolute profile measurement by projecting multiple fringe patterns on the object surface and then fitting the measured phase data into a global model of multilateration. Test measurement results demonstrate that the proposed profiling method is suited for rough surfaces with excessive surface irregularities, which are difficult to measure with conventional two-arm interferometers.

© 2003 Optical Society of America

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References

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2002 (1)

2000 (1)

K. Verma and B. Han, J. Electron Packaging 122, 227 (2000).
[CrossRef]

1996 (1)

1990 (1)

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1984 (1)

1980 (1)

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Figures (4)

Fig. 1
Fig. 1

Geometrical arrangement of the two-point-diffraction interferometer system configured for the profile measurement of rough surfaces. S1–S6, independent two-point-diffraction sources.

Fig. 2
Fig. 2

Optical configuration of a two-point-diffraction source made from a pair of single-mode optical fibers coupled to a single coherent source.

Fig. 3
Fig. 3

Result of measurement of the nonpolished backside profile of a silicon wafer for warpage inspection: (a) Three fringe patterns obtained by activation of diffraction sources S1, S3, and S5 of Fig. 1; (b) an exemplary three-dimensional profile measured and reconstructed by the diffraction interferometer system, and (c) the profile deviation of a diameter from the measurement result obtained with a Form Talysurf stylus profiler.

Fig. 4
Fig. 4

Inspection of integrated-circuit package warpage: photograph of a package group mold mounted on a tape ball grid array and sectional profiles measured for warpage inspection.

Equations (6)

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u1x,y,z=A1r1x,y,zexp-jkr1x,y,z+ϕ1,
u1x,y,z=A2r1x,y,zexp-jkr1x,y,z+ϕ1,
Ix,y,z=u1x,y,z+u1x,y,z2=ax,y,z+bx,y,zcosΦx,y,z,
ax,y,z=A12r12+A22r12,    bx,y,z=2A1r1A2r1, Φx,y,z=kr1-r1+Δϕ,    Δϕ=ϕ1-ϕ2.
Λx,y,z=Φx,y,z-Φx0,y0,z0.
Ex,y,z=i=1NΦix,y,z-Φix0,y0,z0-Λix,y,z2,

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