Abstract

Good-quality polycrystalline BaTiO3 thin films are deposited on MgO substrates by pulsed laser deposition. The deposition parameters are optimized to achieve optical-quality films with an attenuation coefficient of 4 dB/cm at the 633-nm wavelength. Thin-film electro-optic Mach–Zehnder modulators are fabricated with standard lithography and ion-beam etching. The waveguides patterned by lithography are the ridge type, and they ensure single-mode propagation in the wavelength range of 633–1550 nm. An electro-optic coefficient of 22 pm/V is estimated for the polycrystalline BaTiO3 films.

© 2003 Optical Society of America

Full Article  |  PDF Article
OSA Recommended Articles
Crack-free BaTiO3 films on Si with SiO2, MgO, or Al2O3 buffer layers

Thomas Lipinsky, Juergen Schubert, and Christoph Buchal
J. Opt. Soc. Am. B 22(4) 913-916 (2005)

BaTiO3 thin-film waveguide modulator with a low voltage–length product at near-infrared wavelengths of 0.98 and 1.55 µm

Pingsheng Tang, A. L. Meier, D. J. Towner, and B. W. Wessels
Opt. Lett. 30(3) 254-256 (2005)

Fabrication and characterization of epitaxial Ba0.7Sr0.3TiO3 thin films for optical waveguide applications

Dan-Yang Wang, Helen Lai Wa Chan, and Chung Loong Choy
Appl. Opt. 45(9) 1972-1978 (2006)

References

You do not have subscription access to this journal. Citation lists with outbound citation links are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription

Cited By

You do not have subscription access to this journal. Cited by links are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription

Figures (6)

You do not have subscription access to this journal. Figure files are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription

Metrics

You do not have subscription access to this journal. Article level metrics are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription