Abstract

Cr/Sc multilayer mirrors, synthesized by ion-assisted magnetron sputter deposition, are proved to have a high near-normal reflectivity of R=14.5% at a grazing angle of 87.5° measured at the wavelength λ=3.11 nm, which is an improvement of more than 31% compared with previously published results. Elastic recoil detection analyses show that the mirrors contained as much as 15 at. % of N and traces of C and O. Soft x-ray reflectivity simulations reveal interface widths of σ=0.34 nm and an exceptionally small layer thickness drift of 1.6×10-5 nm/multilayer period throughout the stack. Simulations show that a reflectivity of R=25.6% is attainable if impurities and layer thickness drift can be eliminated. The abrupt interfaces are achieved with ion assistance with a low ion energy of 24 eV and high ion-to-metal flux ratios of 7.1 and 23.1 during Cr and Sc sputter deposition, respectively. In addition, a near-normal incidence reflectivity of 5.5% for the C VI emission line λ=3.374 nm from a laser plasma source was verified.

© 2003 Optical Society of America

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