multilayer mirrors, synthesized by ion-assisted magnetron sputter deposition, are proved to have a high near-normal reflectivity of at a grazing angle of 87.5° measured at the wavelength , which is an improvement of more than 31% compared with previously published results. Elastic recoil detection analyses show that the mirrors contained as much as 15 at. % of N and traces of C and O. Soft x-ray reflectivity simulations reveal interface widths of and an exceptionally small layer thickness drift of period throughout the stack. Simulations show that a reflectivity of is attainable if impurities and layer thickness drift can be eliminated. The abrupt interfaces are achieved with ion assistance with a low ion energy of 24 eV and high ion-to-metal flux ratios of 7.1 and 23.1 during Cr and Sc sputter deposition, respectively. In addition, a near-normal incidence reflectivity of 5.5% for the C VI emission line from a laser plasma source was verified.
© 2003 Optical Society of AmericaFull Article | PDF Article
J. H. Underwood, E. M. Gullikson, and Khanh Nguyen
Appl. Opt. 32(34) 6985-6990 (1993)
Franz Schäfers, Hans-Christoph Mertins, Frank Schmolla, Ingo Packe, Nikolay N. Salashchenko, and Eugeny A. Shamov
Appl. Opt. 37(4) 719-728 (1998)
Hans-Christoph Mertins, Franz Schäfers, Hans Grimmer, Daniel Clemens, Peter Böni, and Michael Horisberger
Appl. Opt. 37(10) 1873-1882 (1998)