Abstract

We present a compact and robust phase-shifting lateral shearing interferometer that produces shearing fringes in orthogonal directions without any mechanical rotation or precise alignment. It consists of two pairs of wedge plates, a beam splitter, and a single CCD camera. Both phase-shifting and tilt for lateral shearing are achieved with two pairs of wedge plates, which can reduce systematic errors caused by external vibration and atmospheric disturbance.

© 2003 Optical Society of America

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References

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  1. M. V. R. K. Murty, Appl. Opt. 3, 531 (1964).
    [CrossRef]
  2. P. Hariharan, Appl. Opt. 14, 1056 (1975).
    [CrossRef] [PubMed]
  3. V. Ronchi, Appl. Opt. 3, 437 (1964).
    [CrossRef]
  4. M. P. Rimmer and J. C. Wyant, Appl. Opt. 14, 142 (1975).
    [CrossRef] [PubMed]
  5. H. Schreiber and J. Schwider, Appl. Opt. 36, 22 (1997).
  6. A. K. Saxena, Appl. Opt. 18, 16 (1979).
    [CrossRef]
  7. J. W. Hardy and A. J. MacGovern, Proc. SPIE 816, 180 (1987).
    [CrossRef]
  8. J. B. Saunders, Appl. Opt. 6, 1581 (1967).
    [CrossRef] [PubMed]
  9. W. J. Cho and S. W. Kim, Opt. Eng. 36, 3 (1997).
    [CrossRef]
  10. M. V. Mantravadi, in Optical Shop Testing, 2nd ed., D. Malacara, ed. (Wiley, New York, 1992), Chap. 4.
  11. G. Paez, M. Strojnik, and G. G. Torales, Appl. Opt. 39, 28 (2000).
    [CrossRef]
  12. M. V. R. K. Murty, Appl. Opt. 9, 5 (1970).
    [CrossRef]
  13. T. Siebert and B. Schmitz, Proc. SPIE 3637, 225 (1999).
    [CrossRef]
  14. G. W. R. Leibbrandt, G. Harbers, and P. J. Kunst, Appl. Opt. 35, 6151 (1996).
    [CrossRef] [PubMed]
  15. D. W. Griffin, Opt. Lett. 26, 140 (2001).
    [CrossRef]
  16. W. Shen, M.-W. Chang, and D.-S. Wan, Opt. Eng. 36, 905 (1997).
    [CrossRef]

2001 (1)

2000 (1)

G. Paez, M. Strojnik, and G. G. Torales, Appl. Opt. 39, 28 (2000).
[CrossRef]

1999 (1)

T. Siebert and B. Schmitz, Proc. SPIE 3637, 225 (1999).
[CrossRef]

1997 (3)

W. Shen, M.-W. Chang, and D.-S. Wan, Opt. Eng. 36, 905 (1997).
[CrossRef]

H. Schreiber and J. Schwider, Appl. Opt. 36, 22 (1997).

W. J. Cho and S. W. Kim, Opt. Eng. 36, 3 (1997).
[CrossRef]

1996 (1)

1992 (1)

M. V. Mantravadi, in Optical Shop Testing, 2nd ed., D. Malacara, ed. (Wiley, New York, 1992), Chap. 4.

1987 (1)

J. W. Hardy and A. J. MacGovern, Proc. SPIE 816, 180 (1987).
[CrossRef]

1979 (1)

A. K. Saxena, Appl. Opt. 18, 16 (1979).
[CrossRef]

1975 (2)

1970 (1)

1967 (1)

1964 (2)

Chang, M.-W.

W. Shen, M.-W. Chang, and D.-S. Wan, Opt. Eng. 36, 905 (1997).
[CrossRef]

Cho, W. J.

W. J. Cho and S. W. Kim, Opt. Eng. 36, 3 (1997).
[CrossRef]

Griffin, D. W.

Harbers, G.

Hardy, J. W.

J. W. Hardy and A. J. MacGovern, Proc. SPIE 816, 180 (1987).
[CrossRef]

Hariharan, P.

Kim, S. W.

W. J. Cho and S. W. Kim, Opt. Eng. 36, 3 (1997).
[CrossRef]

Kunst, P. J.

Leibbrandt, G. W. R.

MacGovern, A. J.

J. W. Hardy and A. J. MacGovern, Proc. SPIE 816, 180 (1987).
[CrossRef]

Mantravadi, M. V.

M. V. Mantravadi, in Optical Shop Testing, 2nd ed., D. Malacara, ed. (Wiley, New York, 1992), Chap. 4.

Murty, M. V. R. K.

Paez, G.

G. Paez, M. Strojnik, and G. G. Torales, Appl. Opt. 39, 28 (2000).
[CrossRef]

Rimmer, M. P.

Ronchi, V.

Saunders, J. B.

Saxena, A. K.

A. K. Saxena, Appl. Opt. 18, 16 (1979).
[CrossRef]

Schmitz, B.

T. Siebert and B. Schmitz, Proc. SPIE 3637, 225 (1999).
[CrossRef]

Schreiber, H.

H. Schreiber and J. Schwider, Appl. Opt. 36, 22 (1997).

Schwider, J.

H. Schreiber and J. Schwider, Appl. Opt. 36, 22 (1997).

Shen, W.

W. Shen, M.-W. Chang, and D.-S. Wan, Opt. Eng. 36, 905 (1997).
[CrossRef]

Siebert, T.

T. Siebert and B. Schmitz, Proc. SPIE 3637, 225 (1999).
[CrossRef]

Strojnik, M.

G. Paez, M. Strojnik, and G. G. Torales, Appl. Opt. 39, 28 (2000).
[CrossRef]

Torales, G. G.

G. Paez, M. Strojnik, and G. G. Torales, Appl. Opt. 39, 28 (2000).
[CrossRef]

Wan, D.-S.

W. Shen, M.-W. Chang, and D.-S. Wan, Opt. Eng. 36, 905 (1997).
[CrossRef]

Wyant, J. C.

Appl. Opt. (10)

Opt. Eng. (2)

W. Shen, M.-W. Chang, and D.-S. Wan, Opt. Eng. 36, 905 (1997).
[CrossRef]

W. J. Cho and S. W. Kim, Opt. Eng. 36, 3 (1997).
[CrossRef]

Opt. Lett. (1)

Proc. SPIE (2)

J. W. Hardy and A. J. MacGovern, Proc. SPIE 816, 180 (1987).
[CrossRef]

T. Siebert and B. Schmitz, Proc. SPIE 3637, 225 (1999).
[CrossRef]

Other (1)

M. V. Mantravadi, in Optical Shop Testing, 2nd ed., D. Malacara, ed. (Wiley, New York, 1992), Chap. 4.

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Figures (3)

Fig. 1
Fig. 1

Schematic diagram of our proposed phase-shifting LSI with two pairs of wedge plates, a beam splitter, and a single CCD camera.

Fig. 2
Fig. 2

Pair of wedge plates for phase shifting and tilt shearing.

Fig. 3
Fig. 3

Lateral shear interferograms: (a) x direction, (b) y direction, (c) both shutters open.

Equations (2)

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ΔWx=Wx+a,y-Wx,y+Xxx+ΔYxy,
ΔWy=Wx,y+b-Wx,y+Yyy+ΔXyx,

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