Abstract

We describe how focused-ion-beam (FIB) etching of slanted rib waveguide walls can be used to modify the differential group delay in a waveguide and introduce TE to TM mode conversion in a silicon-on-insulator rib waveguide. We achieved mode conversion by modifying the geometric cross section of a single-mode rib by FIB trimming. Waveguides with different lengths of 45° slant angle rib waveguide walls were fabricated and characterized. We measured the differential group delays and the mode conversion achieved for waveguides with different lengths of a FIB-trimmed slanted rib wall.

© 2003 Optical Society of America

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  1. G. Rickman, G. T. Reed, and F. Namavar, J. Lightwave Technol. 12,1771 (1994).
    [CrossRef]
  2. E. Hecht, Optics, 4th ed. (Addison-Wesley, San Francisco, Calif., 2002).
  3. T. Ando, T. Murata, H. Nakayama, J. Yamauchi, and H. Nakano, IEEE Photon. Technol. Lett. 14,1288 (2002).
    [CrossRef]
  4. H. Heidrich, P. Albrecht, M. Hamacher, H.-P. Nolting, H. Schroeter-Janssen, and C. M. Weinert, IEEE Photon. Technol. Lett. 4, 34 (1992).
    [CrossRef]
  5. H. Porte, J.-P. Goedgebuer, R. Ferriere, and N. Fort, IEEE J. Quantum Electron. 25,1760 (1989).
    [CrossRef]
  6. W. Y. Hwang, J. J. Kim, T. Zyung, M. C. Oh, and S. Y. Shin, IEEE J. Quantum Electron. 32,1054 (1996).
    [CrossRef]
  7. V. P. Hiinkov, R. Opitz, and W. Sohler, J. Lightwave Technol. 6,903 (1988).
    [CrossRef]
  8. S. S. A. Obayya, B. M. A. Rahman, K. T. V. Grattan, and H. A. El-Mikati, IEEE Photon. Technol. Lett. 13,681 (2001).
    [CrossRef]
  9. E. A. J. Marcatilli, Bell Syst. Tech. J. 48,2071 (1969).
    [CrossRef]

2002 (1)

T. Ando, T. Murata, H. Nakayama, J. Yamauchi, and H. Nakano, IEEE Photon. Technol. Lett. 14,1288 (2002).
[CrossRef]

2001 (1)

S. S. A. Obayya, B. M. A. Rahman, K. T. V. Grattan, and H. A. El-Mikati, IEEE Photon. Technol. Lett. 13,681 (2001).
[CrossRef]

1996 (1)

W. Y. Hwang, J. J. Kim, T. Zyung, M. C. Oh, and S. Y. Shin, IEEE J. Quantum Electron. 32,1054 (1996).
[CrossRef]

1994 (1)

G. Rickman, G. T. Reed, and F. Namavar, J. Lightwave Technol. 12,1771 (1994).
[CrossRef]

1992 (1)

H. Heidrich, P. Albrecht, M. Hamacher, H.-P. Nolting, H. Schroeter-Janssen, and C. M. Weinert, IEEE Photon. Technol. Lett. 4, 34 (1992).
[CrossRef]

1989 (1)

H. Porte, J.-P. Goedgebuer, R. Ferriere, and N. Fort, IEEE J. Quantum Electron. 25,1760 (1989).
[CrossRef]

1988 (1)

V. P. Hiinkov, R. Opitz, and W. Sohler, J. Lightwave Technol. 6,903 (1988).
[CrossRef]

1969 (1)

E. A. J. Marcatilli, Bell Syst. Tech. J. 48,2071 (1969).
[CrossRef]

Albrecht, P.

H. Heidrich, P. Albrecht, M. Hamacher, H.-P. Nolting, H. Schroeter-Janssen, and C. M. Weinert, IEEE Photon. Technol. Lett. 4, 34 (1992).
[CrossRef]

Ando, T.

T. Ando, T. Murata, H. Nakayama, J. Yamauchi, and H. Nakano, IEEE Photon. Technol. Lett. 14,1288 (2002).
[CrossRef]

El-Mikati, H. A.

S. S. A. Obayya, B. M. A. Rahman, K. T. V. Grattan, and H. A. El-Mikati, IEEE Photon. Technol. Lett. 13,681 (2001).
[CrossRef]

Ferriere, R.

H. Porte, J.-P. Goedgebuer, R. Ferriere, and N. Fort, IEEE J. Quantum Electron. 25,1760 (1989).
[CrossRef]

Fort, N.

H. Porte, J.-P. Goedgebuer, R. Ferriere, and N. Fort, IEEE J. Quantum Electron. 25,1760 (1989).
[CrossRef]

Goedgebuer, J.-P.

H. Porte, J.-P. Goedgebuer, R. Ferriere, and N. Fort, IEEE J. Quantum Electron. 25,1760 (1989).
[CrossRef]

Grattan, K. T. V.

S. S. A. Obayya, B. M. A. Rahman, K. T. V. Grattan, and H. A. El-Mikati, IEEE Photon. Technol. Lett. 13,681 (2001).
[CrossRef]

Hamacher, M.

H. Heidrich, P. Albrecht, M. Hamacher, H.-P. Nolting, H. Schroeter-Janssen, and C. M. Weinert, IEEE Photon. Technol. Lett. 4, 34 (1992).
[CrossRef]

Hecht, E.

E. Hecht, Optics, 4th ed. (Addison-Wesley, San Francisco, Calif., 2002).

Heidrich, H.

H. Heidrich, P. Albrecht, M. Hamacher, H.-P. Nolting, H. Schroeter-Janssen, and C. M. Weinert, IEEE Photon. Technol. Lett. 4, 34 (1992).
[CrossRef]

Hiinkov, V. P.

V. P. Hiinkov, R. Opitz, and W. Sohler, J. Lightwave Technol. 6,903 (1988).
[CrossRef]

Hwang, W. Y.

W. Y. Hwang, J. J. Kim, T. Zyung, M. C. Oh, and S. Y. Shin, IEEE J. Quantum Electron. 32,1054 (1996).
[CrossRef]

Kim, J. J.

W. Y. Hwang, J. J. Kim, T. Zyung, M. C. Oh, and S. Y. Shin, IEEE J. Quantum Electron. 32,1054 (1996).
[CrossRef]

Marcatilli, E. A. J.

E. A. J. Marcatilli, Bell Syst. Tech. J. 48,2071 (1969).
[CrossRef]

Murata, T.

T. Ando, T. Murata, H. Nakayama, J. Yamauchi, and H. Nakano, IEEE Photon. Technol. Lett. 14,1288 (2002).
[CrossRef]

Nakano, H.

T. Ando, T. Murata, H. Nakayama, J. Yamauchi, and H. Nakano, IEEE Photon. Technol. Lett. 14,1288 (2002).
[CrossRef]

Nakayama, H.

T. Ando, T. Murata, H. Nakayama, J. Yamauchi, and H. Nakano, IEEE Photon. Technol. Lett. 14,1288 (2002).
[CrossRef]

Namavar, F.

G. Rickman, G. T. Reed, and F. Namavar, J. Lightwave Technol. 12,1771 (1994).
[CrossRef]

Nolting, H.-P.

H. Heidrich, P. Albrecht, M. Hamacher, H.-P. Nolting, H. Schroeter-Janssen, and C. M. Weinert, IEEE Photon. Technol. Lett. 4, 34 (1992).
[CrossRef]

Obayya, S. S. A.

S. S. A. Obayya, B. M. A. Rahman, K. T. V. Grattan, and H. A. El-Mikati, IEEE Photon. Technol. Lett. 13,681 (2001).
[CrossRef]

Oh, M. C.

W. Y. Hwang, J. J. Kim, T. Zyung, M. C. Oh, and S. Y. Shin, IEEE J. Quantum Electron. 32,1054 (1996).
[CrossRef]

Opitz, R.

V. P. Hiinkov, R. Opitz, and W. Sohler, J. Lightwave Technol. 6,903 (1988).
[CrossRef]

Porte, H.

H. Porte, J.-P. Goedgebuer, R. Ferriere, and N. Fort, IEEE J. Quantum Electron. 25,1760 (1989).
[CrossRef]

Rahman, B. M. A.

S. S. A. Obayya, B. M. A. Rahman, K. T. V. Grattan, and H. A. El-Mikati, IEEE Photon. Technol. Lett. 13,681 (2001).
[CrossRef]

Reed, G. T.

G. Rickman, G. T. Reed, and F. Namavar, J. Lightwave Technol. 12,1771 (1994).
[CrossRef]

Rickman, G.

G. Rickman, G. T. Reed, and F. Namavar, J. Lightwave Technol. 12,1771 (1994).
[CrossRef]

Schroeter-Janssen, H.

H. Heidrich, P. Albrecht, M. Hamacher, H.-P. Nolting, H. Schroeter-Janssen, and C. M. Weinert, IEEE Photon. Technol. Lett. 4, 34 (1992).
[CrossRef]

Shin, S. Y.

W. Y. Hwang, J. J. Kim, T. Zyung, M. C. Oh, and S. Y. Shin, IEEE J. Quantum Electron. 32,1054 (1996).
[CrossRef]

Sohler, W.

V. P. Hiinkov, R. Opitz, and W. Sohler, J. Lightwave Technol. 6,903 (1988).
[CrossRef]

Weinert, C. M.

H. Heidrich, P. Albrecht, M. Hamacher, H.-P. Nolting, H. Schroeter-Janssen, and C. M. Weinert, IEEE Photon. Technol. Lett. 4, 34 (1992).
[CrossRef]

Yamauchi, J.

T. Ando, T. Murata, H. Nakayama, J. Yamauchi, and H. Nakano, IEEE Photon. Technol. Lett. 14,1288 (2002).
[CrossRef]

Zyung, T.

W. Y. Hwang, J. J. Kim, T. Zyung, M. C. Oh, and S. Y. Shin, IEEE J. Quantum Electron. 32,1054 (1996).
[CrossRef]

Bell Syst. Tech. J. (1)

E. A. J. Marcatilli, Bell Syst. Tech. J. 48,2071 (1969).
[CrossRef]

IEEE J. Quantum Electron. (2)

H. Porte, J.-P. Goedgebuer, R. Ferriere, and N. Fort, IEEE J. Quantum Electron. 25,1760 (1989).
[CrossRef]

W. Y. Hwang, J. J. Kim, T. Zyung, M. C. Oh, and S. Y. Shin, IEEE J. Quantum Electron. 32,1054 (1996).
[CrossRef]

IEEE Photon. Technol. Lett. (3)

S. S. A. Obayya, B. M. A. Rahman, K. T. V. Grattan, and H. A. El-Mikati, IEEE Photon. Technol. Lett. 13,681 (2001).
[CrossRef]

T. Ando, T. Murata, H. Nakayama, J. Yamauchi, and H. Nakano, IEEE Photon. Technol. Lett. 14,1288 (2002).
[CrossRef]

H. Heidrich, P. Albrecht, M. Hamacher, H.-P. Nolting, H. Schroeter-Janssen, and C. M. Weinert, IEEE Photon. Technol. Lett. 4, 34 (1992).
[CrossRef]

J. Lightwave Technol. (1)

G. Rickman, G. T. Reed, and F. Namavar, J. Lightwave Technol. 12,1771 (1994).
[CrossRef]

J. Lightwave Technol. (1)

V. P. Hiinkov, R. Opitz, and W. Sohler, J. Lightwave Technol. 6,903 (1988).
[CrossRef]

Other (1)

E. Hecht, Optics, 4th ed. (Addison-Wesley, San Francisco, Calif., 2002).

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Figures (6)

Fig. 1
Fig. 1

(a) Schematic of a cross section of a SOI rib waveguide with the critical designed parameters. (b) Structure of a trimmed rib waveguide. The arrow indicates the direction of light propagation.

Fig. 2
Fig. 2

(a) Cross section of a rib SOI waveguide profile. (b) Side view of the rib waveguide FIB trimmed to 45°. The arrow indicates the direction of light propagation.

Fig. 3
Fig. 3

Wavelength dependence of mode conversion percentage (above) and transmitted TE and TM power (below) after pure 1550-nm wavelength TE light was coupled into SOI rib waveguides with different trimmed lengths at 45°.

Fig. 4
Fig. 4

Elliptical polarization display obtained with input TE polarization through differently trim lengths.

Fig. 5
Fig. 5

Modal index difference between TE and TM under different rib geometry of a SOI waveguide simulated by a semivector beam propagation method mode solver.

Fig. 6
Fig. 6

DGD (in picoseconds) versus the slant portion length (in micrometers) measured with FIB-trimmed SOI single-mode rib waveguides.

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