Abstract

A spatial resolution of 20 nm is demonstrated at 2.07-nm wavelength by use of a soft x-ray microscope based on Fresnel zone plate lenses and partially coherent illumination. Nanostructural test patterns, formed by sputtered multilayer coatings and transmission electron microscopy thinning techniques, provide clear experimental results.

© 2003 Optical Society of America

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Corrections

Weilun Chao, Erik Anderson, Gregory P. Denbeaux, Bruce Harteneck, J. Alexander Liddle, Deirdre L. Olynick, Angelic L. Pearson, Farhad Salmassi, ChengYu Song, and David T. Attwood, "20-nm-resolution soft x-ray microscopy demonstrated by use of multilayer test structures: erratum," Opt. Lett. 28, 2530-2530 (2003)
https://www.osapublishing.org/ol/abstract.cfm?uri=ol-28-24-2530

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