Abstract

A digital phase-shifting interferometer with a liquid-crystal-display coupled, parallel aligned, nematic liquid-crystal spatial light modulator is developed. The optical phase shift in the Michelson-type polarization interferometer is achieved by a digital phase shift of a grating displayed on the spatial light modulator. Accurate experimental results of using the heterodyne system for π/2 phase steps were demonstrated. A phase-shifting interferometer with no moving parts and no requirement for calibration of the value of the phase shift was achieved.

© 2003 Optical Society of America

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References

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    [CrossRef]

2001

M. M. Gonzalez and N. A. Ochoa, Opt. Commun. 191, 203 (2001).
[CrossRef]

1999

Y. Igasaki, F. Li, N. Yoshida, H. Toyoda, T. Inoue, N. Mukohzaka, Y. Kobayashi, and T. Hara, Opt. Rev. 6, 339 (1999).
[CrossRef]

Y. Ishii, Opt. Rev. 6, 273 (1999).
[CrossRef]

1994

H. Kadono, M. Ogusu, and S. Toyooka, Opt. Commun. 110, 391 (1994).
[CrossRef]

1988

N. George and T. Stone, Opt. Commun. 67, 185 (1988).
[CrossRef]

1987

1984

Chen, J.

Creath, K.

K. Creath, in Progress in Optics, E. Wolf, ed. (Elsevier, Amsterdam, 1988), Vol. 26, p. 349.
[CrossRef]

Eiju, T.

George, N.

N. George and T. Stone, Opt. Commun. 67, 185 (1988).
[CrossRef]

Gonzalez, M. M.

M. M. Gonzalez and N. A. Ochoa, Opt. Commun. 191, 203 (2001).
[CrossRef]

Hara, T.

Y. Igasaki, F. Li, N. Yoshida, H. Toyoda, T. Inoue, N. Mukohzaka, Y. Kobayashi, and T. Hara, Opt. Rev. 6, 339 (1999).
[CrossRef]

Hariharan, P.

Igasaki, Y.

Y. Igasaki, F. Li, N. Yoshida, H. Toyoda, T. Inoue, N. Mukohzaka, Y. Kobayashi, and T. Hara, Opt. Rev. 6, 339 (1999).
[CrossRef]

Inoue, T.

Y. Igasaki, F. Li, N. Yoshida, H. Toyoda, T. Inoue, N. Mukohzaka, Y. Kobayashi, and T. Hara, Opt. Rev. 6, 339 (1999).
[CrossRef]

Ishii, Y.

Kadono, H.

H. Kadono, M. Ogusu, and S. Toyooka, Opt. Commun. 110, 391 (1994).
[CrossRef]

Kobayashi, Y.

Y. Igasaki, F. Li, N. Yoshida, H. Toyoda, T. Inoue, N. Mukohzaka, Y. Kobayashi, and T. Hara, Opt. Rev. 6, 339 (1999).
[CrossRef]

Li, F.

Y. Igasaki, F. Li, N. Yoshida, H. Toyoda, T. Inoue, N. Mukohzaka, Y. Kobayashi, and T. Hara, Opt. Rev. 6, 339 (1999).
[CrossRef]

Mukohzaka, N.

Y. Igasaki, F. Li, N. Yoshida, H. Toyoda, T. Inoue, N. Mukohzaka, Y. Kobayashi, and T. Hara, Opt. Rev. 6, 339 (1999).
[CrossRef]

Murata, K.

Ochoa, N. A.

M. M. Gonzalez and N. A. Ochoa, Opt. Commun. 191, 203 (2001).
[CrossRef]

Ogusu, M.

H. Kadono, M. Ogusu, and S. Toyooka, Opt. Commun. 110, 391 (1994).
[CrossRef]

Oreb, B. F.

Stone, T.

N. George and T. Stone, Opt. Commun. 67, 185 (1988).
[CrossRef]

Toyoda, H.

Y. Igasaki, F. Li, N. Yoshida, H. Toyoda, T. Inoue, N. Mukohzaka, Y. Kobayashi, and T. Hara, Opt. Rev. 6, 339 (1999).
[CrossRef]

Toyooka, S.

H. Kadono, M. Ogusu, and S. Toyooka, Opt. Commun. 110, 391 (1994).
[CrossRef]

Yatagai, T.

Yoshida, N.

Y. Igasaki, F. Li, N. Yoshida, H. Toyoda, T. Inoue, N. Mukohzaka, Y. Kobayashi, and T. Hara, Opt. Rev. 6, 339 (1999).
[CrossRef]

Appl. Opt.

Opt. Commun.

M. M. Gonzalez and N. A. Ochoa, Opt. Commun. 191, 203 (2001).
[CrossRef]

H. Kadono, M. Ogusu, and S. Toyooka, Opt. Commun. 110, 391 (1994).
[CrossRef]

N. George and T. Stone, Opt. Commun. 67, 185 (1988).
[CrossRef]

Opt. Lett.

Opt. Rev.

Y. Ishii, Opt. Rev. 6, 273 (1999).
[CrossRef]

Y. Igasaki, F. Li, N. Yoshida, H. Toyoda, T. Inoue, N. Mukohzaka, Y. Kobayashi, and T. Hara, Opt. Rev. 6, 339 (1999).
[CrossRef]

Other

K. Creath, in Progress in Optics, E. Wolf, ed. (Elsevier, Amsterdam, 1988), Vol. 26, p. 349.
[CrossRef]

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Figures (3)

Fig. 1
Fig. 1

Schematic setup for the digital phase-shifting polarization interferometer with the LCD-coupled PAL-SLM: A, analyzer; other abbreviations defined in text.

Fig. 2
Fig. 2

Four interference fringe patterns of the mirror surface observed at additional phase shifts of (a) 0, (b) π/2, (c) π, and (d) 3π/2.

Fig. 3
Fig. 3

Phase distribution of the low-quality mirror surface calculated by a four-step algorithm.

Equations (1)

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ϕ=tan-1I4-I2I1-I3.

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