© 2003 Optical Society of America

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  1. L. Vaissié, W. Mohammed, and E. G. Johnson, Opt. Lett. 28, 651 (2003).

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Fig. 2
Fig. 2

Picture of the 275-nm outcoupler grating obtained by FIB [focused ion beam] at 45° tilt (inset). The grating was protected by a 1 µ m -thick layer of platinum coating during the cross-section milling. The corresponding near-field normalized intensity profile is shown along with the theoretical exponential decay predicted by the perturbation theory. The near-field profile was obtained from p -side imaging of a device before backside processing.