Abstract

A femtosecond laser beam focused inside fused silica and other glasses can modify the refractive index of the glass. Chemical etching and atomic-force microscope studies show that the modified region can have a sharp-tipped cone-shaped structure with a tip diameter as small as 100 nm. Placing the structure near the bottom surface of a silica glass sample and applying a selective chemical etch to the bottom surface produces clean, circular, submicrometer-diameter holes. Holes spaced as close to one another as 1.4 µm are demonstrated.

© 2003 Optical Society of America

Full Article  |  PDF Article
OSA Recommended Articles
Ultra-high resolution index of refraction profiles of femtosecond laser modified silica structures

R. S. Taylor, C. Hnatovsky, E. Simova, D. M. Rayner, M. Mehandale, V. R. Bhardwaj, and P. B. Corkum
Opt. Express 11(7) 775-781 (2003)

Fabrication and characterization of microstructures with optical quality surfaces in fused silica glass using femtosecond laser pulses and chemical etching

Yuri Sikorski, Corneliu Rablau, Mark Dugan, Ali A. Said, Philippe Bado, and Lars Guenter Beholz
Appl. Opt. 45(28) 7519-7523 (2006)

Maskless fabrication of concave microlens arrays on silica glasses by a femtosecond-laser-enhanced local wet etching method

Feng Chen, Hewei Liu, Qing Yang, Xianhua Wang, Cong Hou, Hao Bian, Weiwei Liang, Jinhai Si, and Xun Hou
Opt. Express 18(19) 20334-20343 (2010)

References

You do not have subscription access to this journal. Citation lists with outbound citation links are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription

Cited By

You do not have subscription access to this journal. Cited by links are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription

Figures (3)

You do not have subscription access to this journal. Figure files are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription

Metrics

You do not have subscription access to this journal. Article level metrics are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription