Abstract

The interference pattern produced by irradiation of a pair of pinholes with a beam contains information on both the spatial and the temporal coherence properties of the beam, as well as its power spectrum. We demonstrate experimentally for what is believed to be the first time that the spectrum of an extreme-ultraviolet (EUV) beam can be obtained from a measurement of the interference pattern produced by a pinhole pair. This approach offers a convenient method of making absolute wavelength and relative spectral intensity calibrations in the EUV.

© 2002 Optical Society of America

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References

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    [CrossRef]
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    [CrossRef] [PubMed]
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    [CrossRef] [PubMed]
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    [CrossRef] [PubMed]
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    [CrossRef]

2001 (2)

Y. Lui, M. Seminario, F. Tomasel, C. Chang, J. Rocca, and D. Attwood, Phys. Rev. A 63, 033802 (2001).
[CrossRef]

S. Backus, R. Bartels, S. Thompson, R. Dollinger, H. C. Kapteyn, and M. M. Murnane, Opt. Lett. 26, 465 (2001).
[CrossRef]

2000 (1)

C. Chang, P. Naulleau, E. Anderson, and D. Attwood, Opt. Commun. 182, 25 (2000).
[CrossRef]

1999 (1)

C. Durfee, A. Rundquist, S. Backus, C. Herne, M. M. Murnane, and H. C. Kapteyn, Phys. Rev. Lett. 83, 2187 (1999).
[CrossRef]

1998 (1)

A. Rundquist, C. Durfee, Z. Chang, C. Herne, S. Backus, M. M. Murnane, and H. C. Kapteyn, Science 280, 1412 (1998).
[CrossRef] [PubMed]

1995 (1)

1981 (1)

1957 (1)

1802 (1)

T. Young, Philos. Trans. R. Soc. London 12, 387 (1802).
[CrossRef]

Anderson, E.

C. Chang, P. Naulleau, E. Anderson, and D. Attwood, Opt. Commun. 182, 25 (2000).
[CrossRef]

Attwood, D.

Y. Lui, M. Seminario, F. Tomasel, C. Chang, J. Rocca, and D. Attwood, Phys. Rev. A 63, 033802 (2001).
[CrossRef]

C. Chang, P. Naulleau, E. Anderson, and D. Attwood, Opt. Commun. 182, 25 (2000).
[CrossRef]

Backus, S.

S. Backus, R. Bartels, S. Thompson, R. Dollinger, H. C. Kapteyn, and M. M. Murnane, Opt. Lett. 26, 465 (2001).
[CrossRef]

C. Durfee, A. Rundquist, S. Backus, C. Herne, M. M. Murnane, and H. C. Kapteyn, Phys. Rev. Lett. 83, 2187 (1999).
[CrossRef]

A. Rundquist, C. Durfee, Z. Chang, C. Herne, S. Backus, M. M. Murnane, and H. C. Kapteyn, Science 280, 1412 (1998).
[CrossRef] [PubMed]

Bartels, R.

Chang, C.

Y. Lui, M. Seminario, F. Tomasel, C. Chang, J. Rocca, and D. Attwood, Phys. Rev. A 63, 033802 (2001).
[CrossRef]

C. Chang, P. Naulleau, E. Anderson, and D. Attwood, Opt. Commun. 182, 25 (2000).
[CrossRef]

Chang, Z.

A. Rundquist, C. Durfee, Z. Chang, C. Herne, S. Backus, M. M. Murnane, and H. C. Kapteyn, Science 280, 1412 (1998).
[CrossRef] [PubMed]

Devaney, A.

Dollinger, R.

Durfee, C.

C. Durfee, A. Rundquist, S. Backus, C. Herne, M. M. Murnane, and H. C. Kapteyn, Phys. Rev. Lett. 83, 2187 (1999).
[CrossRef]

A. Rundquist, C. Durfee, Z. Chang, C. Herne, S. Backus, M. M. Murnane, and H. C. Kapteyn, Science 280, 1412 (1998).
[CrossRef] [PubMed]

Friberg, A.

Goodmann, J.

J. Goodmann, Statistical Optics (Wiley, New York, 1985).

Herne, C.

C. Durfee, A. Rundquist, S. Backus, C. Herne, M. M. Murnane, and H. C. Kapteyn, Phys. Rev. Lett. 83, 2187 (1999).
[CrossRef]

A. Rundquist, C. Durfee, Z. Chang, C. Herne, S. Backus, M. M. Murnane, and H. C. Kapteyn, Science 280, 1412 (1998).
[CrossRef] [PubMed]

Kapteyn, H. C.

S. Backus, R. Bartels, S. Thompson, R. Dollinger, H. C. Kapteyn, and M. M. Murnane, Opt. Lett. 26, 465 (2001).
[CrossRef]

C. Durfee, A. Rundquist, S. Backus, C. Herne, M. M. Murnane, and H. C. Kapteyn, Phys. Rev. Lett. 83, 2187 (1999).
[CrossRef]

A. Rundquist, C. Durfee, Z. Chang, C. Herne, S. Backus, M. M. Murnane, and H. C. Kapteyn, Science 280, 1412 (1998).
[CrossRef] [PubMed]

Lui, Y.

Y. Lui, M. Seminario, F. Tomasel, C. Chang, J. Rocca, and D. Attwood, Phys. Rev. A 63, 033802 (2001).
[CrossRef]

Murnane, M. M.

S. Backus, R. Bartels, S. Thompson, R. Dollinger, H. C. Kapteyn, and M. M. Murnane, Opt. Lett. 26, 465 (2001).
[CrossRef]

C. Durfee, A. Rundquist, S. Backus, C. Herne, M. M. Murnane, and H. C. Kapteyn, Phys. Rev. Lett. 83, 2187 (1999).
[CrossRef]

A. Rundquist, C. Durfee, Z. Chang, C. Herne, S. Backus, M. M. Murnane, and H. C. Kapteyn, Science 280, 1412 (1998).
[CrossRef] [PubMed]

Naulleau, P.

C. Chang, P. Naulleau, E. Anderson, and D. Attwood, Opt. Commun. 182, 25 (2000).
[CrossRef]

Rocca, J.

Y. Lui, M. Seminario, F. Tomasel, C. Chang, J. Rocca, and D. Attwood, Phys. Rev. A 63, 033802 (2001).
[CrossRef]

Rundquist, A.

C. Durfee, A. Rundquist, S. Backus, C. Herne, M. M. Murnane, and H. C. Kapteyn, Phys. Rev. Lett. 83, 2187 (1999).
[CrossRef]

A. Rundquist, C. Durfee, Z. Chang, C. Herne, S. Backus, M. M. Murnane, and H. C. Kapteyn, Science 280, 1412 (1998).
[CrossRef] [PubMed]

Seminario, M.

Y. Lui, M. Seminario, F. Tomasel, C. Chang, J. Rocca, and D. Attwood, Phys. Rev. A 63, 033802 (2001).
[CrossRef]

Thompson, B.

Thompson, S.

Tomasel, F.

Y. Lui, M. Seminario, F. Tomasel, C. Chang, J. Rocca, and D. Attwood, Phys. Rev. A 63, 033802 (2001).
[CrossRef]

Wolf, E.

Young, T.

T. Young, Philos. Trans. R. Soc. London 12, 387 (1802).
[CrossRef]

J. Opt. Soc. Am. (1)

Opt. Commun. (1)

C. Chang, P. Naulleau, E. Anderson, and D. Attwood, Opt. Commun. 182, 25 (2000).
[CrossRef]

Opt. Lett. (3)

Philos. Trans. R. Soc. London (1)

T. Young, Philos. Trans. R. Soc. London 12, 387 (1802).
[CrossRef]

Phys. Rev. A (1)

Y. Lui, M. Seminario, F. Tomasel, C. Chang, J. Rocca, and D. Attwood, Phys. Rev. A 63, 033802 (2001).
[CrossRef]

Phys. Rev. Lett. (1)

C. Durfee, A. Rundquist, S. Backus, C. Herne, M. M. Murnane, and H. C. Kapteyn, Phys. Rev. Lett. 83, 2187 (1999).
[CrossRef]

Science (1)

A. Rundquist, C. Durfee, Z. Chang, C. Herne, S. Backus, M. M. Murnane, and H. C. Kapteyn, Science 280, 1412 (1998).
[CrossRef] [PubMed]

Other (1)

J. Goodmann, Statistical Optics (Wiley, New York, 1985).

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Figures (3)

Fig. 1
Fig. 1

(a) Schematic of the experimental setup, where we have recorded (b) the EUV interferogram (note that the intensity is weakest for blue and strongest for red colorings), and (c) average of (b) along the y axis. The experimental conditions used here are z=2.85 m, δ=20 µm and d=574.6 µm.

Fig. 2
Fig. 2

Fourier transforms of Fig. 1(b), showing the spatial frequency distribution scaled in optical frequency. The central frequency observed in the sidebands corresponds to the 21st harmonic of the laser at 800 nm.

Fig. 3
Fig. 3

EUV spectrum obtained from a spectrometer Sˆνην (dashed curve) and from the spatial coherence measurement Sˆν (solid curve). The inset shows the spectrometer relative efficiency, ην, inferred from these data. When the spectrometer data are convolved with the pinhole resolution, the measured and calculated linewidths agree to within 10%.

Equations (3)

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Ix=2I0x1+γ12xcos2πdλ0zx,
γ12τ=T-1Sˆνμ12ν,
TIxFfx=2Tfxδfx+12Sˆfxμ12fxδfx-f0+δfx-f0,

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