Abstract

The surface laser-induced damage threshold (LIDT) of CsLiB6O10 (CLBO) crystal was enhanced twofold with improved crystallinity and ion-beam etching. For crystals with high crystal quality (bulk LIDT, 15.019.0 GW/cm2), the surface LIDT was 1.4-fold higher than for those with conventional crystal quality (bulk LIDT, 9.012.0 GW/cm2). In addition, removal of residual surface-polishing compounds by means of ion-beam etching can further enhance the surface LIDT by another 1.5-fold. Thus, CLBO crystals with high crystal quality and ion-beam etching are now more reliable for high-power UV light generation.

© 2002 Optical Society of America

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  1. Y. Mori, I. Kuroda, S. Nakajima, T. Sasaki, and S. Nakai, Appl. Phys. Lett. 67, 1818 (1995).
    [CrossRef]
  2. T. Sasaki, Y. Mori, I. Kuroda, S. Nakajima, K. Yamaguchi, S. Watanabe, and S. Nakai, Acta Crystallogr. Sect. C 51, 2222 (1995).
    [CrossRef]
  3. U. Stamm, W. Zschocke, T. Schroder, N. Deutsch, and D. Basting, in Advanced Solid-State Lasers, C. R. Pollock and W. R. Bosenberg, eds., Vol. 10 of OSA Trends in Optics and Photonics Series (Optical Society of America, Washington, D.C., 1997), p. 7.
  4. Y. K. Yap, M. Inagaki, S. Nakajima, Y. Mori, and T. Sasaki, Opt. Lett. 21, 1348 (1996).
    [CrossRef] [PubMed]
  5. Y. K. Yap, K. Deki, N. Kitatochi, Y. Mori, and T. Sasaki, Opt. Lett. 23, 1016 (1998).
    [CrossRef]
  6. T. Kojima, S. Konno, S. Fujikawa, K. Yasui, T. Kamimura, M. Yoshimura, Y. Mori, T. Sasaki, M. Tanaka, and Y. Okada, in Conference on Lasers and Electro-Optics (CLEO), Vol. 56 of OSA Trends in Optics and Photonics Series (Optical Society of America, Washington, D.C., 2001), p. 390.
  7. K. Nakai, T. Kamimura, H. Sawada, M. Yashimura, Y. Mori, T. Sasaki, H. Yoshida, and M. Nakatsuka, in Digest of Conference on Lasers and Electro-Optics (CLEO/Pacific Rim) (Optical Society of America, Washington, D.C., 1999), p. 967.
  8. T. Kamimura, R. Ono, Y. K. Yap, M. Yoshimura, Y. Mori, and T. Sasaki, Jpn. J. Appl. Phys. 40, L111 (2001).
    [CrossRef]
  9. T. Kamimura, K. Nakai, K. Murase, M. Yoshimura, Y. Mori, T. Sasaki, and K. Yoshida, in Advanced Solid State Lasers, H. Injeyan, U. Keller, and C. Marshall, eds., Vol. 34 of OSA Trends in Optics and Photonics Series (Optical Society of America, Washington, D.C., 2000), p. 464.
  10. T. Kamimura, M. Yoshimura, T. Inoue, Y. Mori, T. Sasaki, H. Yoshida, M. Nakatsuka, K. Yoshida, K. Deki, and M. Horiguchi, Proc. SPIE 3244, 400 (1997).
    [CrossRef]

2001 (1)

T. Kamimura, R. Ono, Y. K. Yap, M. Yoshimura, Y. Mori, and T. Sasaki, Jpn. J. Appl. Phys. 40, L111 (2001).
[CrossRef]

1998 (1)

1997 (1)

T. Kamimura, M. Yoshimura, T. Inoue, Y. Mori, T. Sasaki, H. Yoshida, M. Nakatsuka, K. Yoshida, K. Deki, and M. Horiguchi, Proc. SPIE 3244, 400 (1997).
[CrossRef]

1996 (1)

1995 (2)

Y. Mori, I. Kuroda, S. Nakajima, T. Sasaki, and S. Nakai, Appl. Phys. Lett. 67, 1818 (1995).
[CrossRef]

T. Sasaki, Y. Mori, I. Kuroda, S. Nakajima, K. Yamaguchi, S. Watanabe, and S. Nakai, Acta Crystallogr. Sect. C 51, 2222 (1995).
[CrossRef]

Basting, D.

U. Stamm, W. Zschocke, T. Schroder, N. Deutsch, and D. Basting, in Advanced Solid-State Lasers, C. R. Pollock and W. R. Bosenberg, eds., Vol. 10 of OSA Trends in Optics and Photonics Series (Optical Society of America, Washington, D.C., 1997), p. 7.

Deki, K.

Y. K. Yap, K. Deki, N. Kitatochi, Y. Mori, and T. Sasaki, Opt. Lett. 23, 1016 (1998).
[CrossRef]

T. Kamimura, M. Yoshimura, T. Inoue, Y. Mori, T. Sasaki, H. Yoshida, M. Nakatsuka, K. Yoshida, K. Deki, and M. Horiguchi, Proc. SPIE 3244, 400 (1997).
[CrossRef]

Deutsch, N.

U. Stamm, W. Zschocke, T. Schroder, N. Deutsch, and D. Basting, in Advanced Solid-State Lasers, C. R. Pollock and W. R. Bosenberg, eds., Vol. 10 of OSA Trends in Optics and Photonics Series (Optical Society of America, Washington, D.C., 1997), p. 7.

Fujikawa, S.

T. Kojima, S. Konno, S. Fujikawa, K. Yasui, T. Kamimura, M. Yoshimura, Y. Mori, T. Sasaki, M. Tanaka, and Y. Okada, in Conference on Lasers and Electro-Optics (CLEO), Vol. 56 of OSA Trends in Optics and Photonics Series (Optical Society of America, Washington, D.C., 2001), p. 390.

Horiguchi, M.

T. Kamimura, M. Yoshimura, T. Inoue, Y. Mori, T. Sasaki, H. Yoshida, M. Nakatsuka, K. Yoshida, K. Deki, and M. Horiguchi, Proc. SPIE 3244, 400 (1997).
[CrossRef]

Inagaki, M.

Inoue, T.

T. Kamimura, M. Yoshimura, T. Inoue, Y. Mori, T. Sasaki, H. Yoshida, M. Nakatsuka, K. Yoshida, K. Deki, and M. Horiguchi, Proc. SPIE 3244, 400 (1997).
[CrossRef]

Kamimura, T.

T. Kamimura, R. Ono, Y. K. Yap, M. Yoshimura, Y. Mori, and T. Sasaki, Jpn. J. Appl. Phys. 40, L111 (2001).
[CrossRef]

T. Kamimura, M. Yoshimura, T. Inoue, Y. Mori, T. Sasaki, H. Yoshida, M. Nakatsuka, K. Yoshida, K. Deki, and M. Horiguchi, Proc. SPIE 3244, 400 (1997).
[CrossRef]

K. Nakai, T. Kamimura, H. Sawada, M. Yashimura, Y. Mori, T. Sasaki, H. Yoshida, and M. Nakatsuka, in Digest of Conference on Lasers and Electro-Optics (CLEO/Pacific Rim) (Optical Society of America, Washington, D.C., 1999), p. 967.

T. Kamimura, K. Nakai, K. Murase, M. Yoshimura, Y. Mori, T. Sasaki, and K. Yoshida, in Advanced Solid State Lasers, H. Injeyan, U. Keller, and C. Marshall, eds., Vol. 34 of OSA Trends in Optics and Photonics Series (Optical Society of America, Washington, D.C., 2000), p. 464.

T. Kojima, S. Konno, S. Fujikawa, K. Yasui, T. Kamimura, M. Yoshimura, Y. Mori, T. Sasaki, M. Tanaka, and Y. Okada, in Conference on Lasers and Electro-Optics (CLEO), Vol. 56 of OSA Trends in Optics and Photonics Series (Optical Society of America, Washington, D.C., 2001), p. 390.

Kitatochi, N.

Kojima, T.

T. Kojima, S. Konno, S. Fujikawa, K. Yasui, T. Kamimura, M. Yoshimura, Y. Mori, T. Sasaki, M. Tanaka, and Y. Okada, in Conference on Lasers and Electro-Optics (CLEO), Vol. 56 of OSA Trends in Optics and Photonics Series (Optical Society of America, Washington, D.C., 2001), p. 390.

Konno, S.

T. Kojima, S. Konno, S. Fujikawa, K. Yasui, T. Kamimura, M. Yoshimura, Y. Mori, T. Sasaki, M. Tanaka, and Y. Okada, in Conference on Lasers and Electro-Optics (CLEO), Vol. 56 of OSA Trends in Optics and Photonics Series (Optical Society of America, Washington, D.C., 2001), p. 390.

Kuroda, I.

Y. Mori, I. Kuroda, S. Nakajima, T. Sasaki, and S. Nakai, Appl. Phys. Lett. 67, 1818 (1995).
[CrossRef]

T. Sasaki, Y. Mori, I. Kuroda, S. Nakajima, K. Yamaguchi, S. Watanabe, and S. Nakai, Acta Crystallogr. Sect. C 51, 2222 (1995).
[CrossRef]

Mori, Y.

T. Kamimura, R. Ono, Y. K. Yap, M. Yoshimura, Y. Mori, and T. Sasaki, Jpn. J. Appl. Phys. 40, L111 (2001).
[CrossRef]

Y. K. Yap, K. Deki, N. Kitatochi, Y. Mori, and T. Sasaki, Opt. Lett. 23, 1016 (1998).
[CrossRef]

T. Kamimura, M. Yoshimura, T. Inoue, Y. Mori, T. Sasaki, H. Yoshida, M. Nakatsuka, K. Yoshida, K. Deki, and M. Horiguchi, Proc. SPIE 3244, 400 (1997).
[CrossRef]

Y. K. Yap, M. Inagaki, S. Nakajima, Y. Mori, and T. Sasaki, Opt. Lett. 21, 1348 (1996).
[CrossRef] [PubMed]

Y. Mori, I. Kuroda, S. Nakajima, T. Sasaki, and S. Nakai, Appl. Phys. Lett. 67, 1818 (1995).
[CrossRef]

T. Sasaki, Y. Mori, I. Kuroda, S. Nakajima, K. Yamaguchi, S. Watanabe, and S. Nakai, Acta Crystallogr. Sect. C 51, 2222 (1995).
[CrossRef]

T. Kojima, S. Konno, S. Fujikawa, K. Yasui, T. Kamimura, M. Yoshimura, Y. Mori, T. Sasaki, M. Tanaka, and Y. Okada, in Conference on Lasers and Electro-Optics (CLEO), Vol. 56 of OSA Trends in Optics and Photonics Series (Optical Society of America, Washington, D.C., 2001), p. 390.

T. Kamimura, K. Nakai, K. Murase, M. Yoshimura, Y. Mori, T. Sasaki, and K. Yoshida, in Advanced Solid State Lasers, H. Injeyan, U. Keller, and C. Marshall, eds., Vol. 34 of OSA Trends in Optics and Photonics Series (Optical Society of America, Washington, D.C., 2000), p. 464.

K. Nakai, T. Kamimura, H. Sawada, M. Yashimura, Y. Mori, T. Sasaki, H. Yoshida, and M. Nakatsuka, in Digest of Conference on Lasers and Electro-Optics (CLEO/Pacific Rim) (Optical Society of America, Washington, D.C., 1999), p. 967.

Murase, K.

T. Kamimura, K. Nakai, K. Murase, M. Yoshimura, Y. Mori, T. Sasaki, and K. Yoshida, in Advanced Solid State Lasers, H. Injeyan, U. Keller, and C. Marshall, eds., Vol. 34 of OSA Trends in Optics and Photonics Series (Optical Society of America, Washington, D.C., 2000), p. 464.

Nakai, K.

T. Kamimura, K. Nakai, K. Murase, M. Yoshimura, Y. Mori, T. Sasaki, and K. Yoshida, in Advanced Solid State Lasers, H. Injeyan, U. Keller, and C. Marshall, eds., Vol. 34 of OSA Trends in Optics and Photonics Series (Optical Society of America, Washington, D.C., 2000), p. 464.

K. Nakai, T. Kamimura, H. Sawada, M. Yashimura, Y. Mori, T. Sasaki, H. Yoshida, and M. Nakatsuka, in Digest of Conference on Lasers and Electro-Optics (CLEO/Pacific Rim) (Optical Society of America, Washington, D.C., 1999), p. 967.

Nakai, S.

Y. Mori, I. Kuroda, S. Nakajima, T. Sasaki, and S. Nakai, Appl. Phys. Lett. 67, 1818 (1995).
[CrossRef]

T. Sasaki, Y. Mori, I. Kuroda, S. Nakajima, K. Yamaguchi, S. Watanabe, and S. Nakai, Acta Crystallogr. Sect. C 51, 2222 (1995).
[CrossRef]

Nakajima, S.

Y. K. Yap, M. Inagaki, S. Nakajima, Y. Mori, and T. Sasaki, Opt. Lett. 21, 1348 (1996).
[CrossRef] [PubMed]

Y. Mori, I. Kuroda, S. Nakajima, T. Sasaki, and S. Nakai, Appl. Phys. Lett. 67, 1818 (1995).
[CrossRef]

T. Sasaki, Y. Mori, I. Kuroda, S. Nakajima, K. Yamaguchi, S. Watanabe, and S. Nakai, Acta Crystallogr. Sect. C 51, 2222 (1995).
[CrossRef]

Nakatsuka, M.

T. Kamimura, M. Yoshimura, T. Inoue, Y. Mori, T. Sasaki, H. Yoshida, M. Nakatsuka, K. Yoshida, K. Deki, and M. Horiguchi, Proc. SPIE 3244, 400 (1997).
[CrossRef]

K. Nakai, T. Kamimura, H. Sawada, M. Yashimura, Y. Mori, T. Sasaki, H. Yoshida, and M. Nakatsuka, in Digest of Conference on Lasers and Electro-Optics (CLEO/Pacific Rim) (Optical Society of America, Washington, D.C., 1999), p. 967.

Okada, Y.

T. Kojima, S. Konno, S. Fujikawa, K. Yasui, T. Kamimura, M. Yoshimura, Y. Mori, T. Sasaki, M. Tanaka, and Y. Okada, in Conference on Lasers and Electro-Optics (CLEO), Vol. 56 of OSA Trends in Optics and Photonics Series (Optical Society of America, Washington, D.C., 2001), p. 390.

Ono, R.

T. Kamimura, R. Ono, Y. K. Yap, M. Yoshimura, Y. Mori, and T. Sasaki, Jpn. J. Appl. Phys. 40, L111 (2001).
[CrossRef]

Sasaki, T.

T. Kamimura, R. Ono, Y. K. Yap, M. Yoshimura, Y. Mori, and T. Sasaki, Jpn. J. Appl. Phys. 40, L111 (2001).
[CrossRef]

Y. K. Yap, K. Deki, N. Kitatochi, Y. Mori, and T. Sasaki, Opt. Lett. 23, 1016 (1998).
[CrossRef]

T. Kamimura, M. Yoshimura, T. Inoue, Y. Mori, T. Sasaki, H. Yoshida, M. Nakatsuka, K. Yoshida, K. Deki, and M. Horiguchi, Proc. SPIE 3244, 400 (1997).
[CrossRef]

Y. K. Yap, M. Inagaki, S. Nakajima, Y. Mori, and T. Sasaki, Opt. Lett. 21, 1348 (1996).
[CrossRef] [PubMed]

Y. Mori, I. Kuroda, S. Nakajima, T. Sasaki, and S. Nakai, Appl. Phys. Lett. 67, 1818 (1995).
[CrossRef]

T. Sasaki, Y. Mori, I. Kuroda, S. Nakajima, K. Yamaguchi, S. Watanabe, and S. Nakai, Acta Crystallogr. Sect. C 51, 2222 (1995).
[CrossRef]

T. Kojima, S. Konno, S. Fujikawa, K. Yasui, T. Kamimura, M. Yoshimura, Y. Mori, T. Sasaki, M. Tanaka, and Y. Okada, in Conference on Lasers and Electro-Optics (CLEO), Vol. 56 of OSA Trends in Optics and Photonics Series (Optical Society of America, Washington, D.C., 2001), p. 390.

T. Kamimura, K. Nakai, K. Murase, M. Yoshimura, Y. Mori, T. Sasaki, and K. Yoshida, in Advanced Solid State Lasers, H. Injeyan, U. Keller, and C. Marshall, eds., Vol. 34 of OSA Trends in Optics and Photonics Series (Optical Society of America, Washington, D.C., 2000), p. 464.

K. Nakai, T. Kamimura, H. Sawada, M. Yashimura, Y. Mori, T. Sasaki, H. Yoshida, and M. Nakatsuka, in Digest of Conference on Lasers and Electro-Optics (CLEO/Pacific Rim) (Optical Society of America, Washington, D.C., 1999), p. 967.

Sawada, H.

K. Nakai, T. Kamimura, H. Sawada, M. Yashimura, Y. Mori, T. Sasaki, H. Yoshida, and M. Nakatsuka, in Digest of Conference on Lasers and Electro-Optics (CLEO/Pacific Rim) (Optical Society of America, Washington, D.C., 1999), p. 967.

Schroder, T.

U. Stamm, W. Zschocke, T. Schroder, N. Deutsch, and D. Basting, in Advanced Solid-State Lasers, C. R. Pollock and W. R. Bosenberg, eds., Vol. 10 of OSA Trends in Optics and Photonics Series (Optical Society of America, Washington, D.C., 1997), p. 7.

Stamm, U.

U. Stamm, W. Zschocke, T. Schroder, N. Deutsch, and D. Basting, in Advanced Solid-State Lasers, C. R. Pollock and W. R. Bosenberg, eds., Vol. 10 of OSA Trends in Optics and Photonics Series (Optical Society of America, Washington, D.C., 1997), p. 7.

Tanaka, M.

T. Kojima, S. Konno, S. Fujikawa, K. Yasui, T. Kamimura, M. Yoshimura, Y. Mori, T. Sasaki, M. Tanaka, and Y. Okada, in Conference on Lasers and Electro-Optics (CLEO), Vol. 56 of OSA Trends in Optics and Photonics Series (Optical Society of America, Washington, D.C., 2001), p. 390.

Watanabe, S.

T. Sasaki, Y. Mori, I. Kuroda, S. Nakajima, K. Yamaguchi, S. Watanabe, and S. Nakai, Acta Crystallogr. Sect. C 51, 2222 (1995).
[CrossRef]

Yamaguchi, K.

T. Sasaki, Y. Mori, I. Kuroda, S. Nakajima, K. Yamaguchi, S. Watanabe, and S. Nakai, Acta Crystallogr. Sect. C 51, 2222 (1995).
[CrossRef]

Yap, Y. K.

Yashimura, M.

K. Nakai, T. Kamimura, H. Sawada, M. Yashimura, Y. Mori, T. Sasaki, H. Yoshida, and M. Nakatsuka, in Digest of Conference on Lasers and Electro-Optics (CLEO/Pacific Rim) (Optical Society of America, Washington, D.C., 1999), p. 967.

Yasui, K.

T. Kojima, S. Konno, S. Fujikawa, K. Yasui, T. Kamimura, M. Yoshimura, Y. Mori, T. Sasaki, M. Tanaka, and Y. Okada, in Conference on Lasers and Electro-Optics (CLEO), Vol. 56 of OSA Trends in Optics and Photonics Series (Optical Society of America, Washington, D.C., 2001), p. 390.

Yoshida, H.

T. Kamimura, M. Yoshimura, T. Inoue, Y. Mori, T. Sasaki, H. Yoshida, M. Nakatsuka, K. Yoshida, K. Deki, and M. Horiguchi, Proc. SPIE 3244, 400 (1997).
[CrossRef]

K. Nakai, T. Kamimura, H. Sawada, M. Yashimura, Y. Mori, T. Sasaki, H. Yoshida, and M. Nakatsuka, in Digest of Conference on Lasers and Electro-Optics (CLEO/Pacific Rim) (Optical Society of America, Washington, D.C., 1999), p. 967.

Yoshida, K.

T. Kamimura, M. Yoshimura, T. Inoue, Y. Mori, T. Sasaki, H. Yoshida, M. Nakatsuka, K. Yoshida, K. Deki, and M. Horiguchi, Proc. SPIE 3244, 400 (1997).
[CrossRef]

T. Kamimura, K. Nakai, K. Murase, M. Yoshimura, Y. Mori, T. Sasaki, and K. Yoshida, in Advanced Solid State Lasers, H. Injeyan, U. Keller, and C. Marshall, eds., Vol. 34 of OSA Trends in Optics and Photonics Series (Optical Society of America, Washington, D.C., 2000), p. 464.

Yoshimura, M.

T. Kamimura, R. Ono, Y. K. Yap, M. Yoshimura, Y. Mori, and T. Sasaki, Jpn. J. Appl. Phys. 40, L111 (2001).
[CrossRef]

T. Kamimura, M. Yoshimura, T. Inoue, Y. Mori, T. Sasaki, H. Yoshida, M. Nakatsuka, K. Yoshida, K. Deki, and M. Horiguchi, Proc. SPIE 3244, 400 (1997).
[CrossRef]

T. Kamimura, K. Nakai, K. Murase, M. Yoshimura, Y. Mori, T. Sasaki, and K. Yoshida, in Advanced Solid State Lasers, H. Injeyan, U. Keller, and C. Marshall, eds., Vol. 34 of OSA Trends in Optics and Photonics Series (Optical Society of America, Washington, D.C., 2000), p. 464.

T. Kojima, S. Konno, S. Fujikawa, K. Yasui, T. Kamimura, M. Yoshimura, Y. Mori, T. Sasaki, M. Tanaka, and Y. Okada, in Conference on Lasers and Electro-Optics (CLEO), Vol. 56 of OSA Trends in Optics and Photonics Series (Optical Society of America, Washington, D.C., 2001), p. 390.

Zschocke, W.

U. Stamm, W. Zschocke, T. Schroder, N. Deutsch, and D. Basting, in Advanced Solid-State Lasers, C. R. Pollock and W. R. Bosenberg, eds., Vol. 10 of OSA Trends in Optics and Photonics Series (Optical Society of America, Washington, D.C., 1997), p. 7.

Acta Crystallogr. Sect. C (1)

T. Sasaki, Y. Mori, I. Kuroda, S. Nakajima, K. Yamaguchi, S. Watanabe, and S. Nakai, Acta Crystallogr. Sect. C 51, 2222 (1995).
[CrossRef]

Appl. Phys. Lett. (1)

Y. Mori, I. Kuroda, S. Nakajima, T. Sasaki, and S. Nakai, Appl. Phys. Lett. 67, 1818 (1995).
[CrossRef]

Jpn. J. Appl. Phys. (1)

T. Kamimura, R. Ono, Y. K. Yap, M. Yoshimura, Y. Mori, and T. Sasaki, Jpn. J. Appl. Phys. 40, L111 (2001).
[CrossRef]

Opt. Lett. (2)

Proc. SPIE (1)

T. Kamimura, M. Yoshimura, T. Inoue, Y. Mori, T. Sasaki, H. Yoshida, M. Nakatsuka, K. Yoshida, K. Deki, and M. Horiguchi, Proc. SPIE 3244, 400 (1997).
[CrossRef]

Other (4)

T. Kamimura, K. Nakai, K. Murase, M. Yoshimura, Y. Mori, T. Sasaki, and K. Yoshida, in Advanced Solid State Lasers, H. Injeyan, U. Keller, and C. Marshall, eds., Vol. 34 of OSA Trends in Optics and Photonics Series (Optical Society of America, Washington, D.C., 2000), p. 464.

U. Stamm, W. Zschocke, T. Schroder, N. Deutsch, and D. Basting, in Advanced Solid-State Lasers, C. R. Pollock and W. R. Bosenberg, eds., Vol. 10 of OSA Trends in Optics and Photonics Series (Optical Society of America, Washington, D.C., 1997), p. 7.

T. Kojima, S. Konno, S. Fujikawa, K. Yasui, T. Kamimura, M. Yoshimura, Y. Mori, T. Sasaki, M. Tanaka, and Y. Okada, in Conference on Lasers and Electro-Optics (CLEO), Vol. 56 of OSA Trends in Optics and Photonics Series (Optical Society of America, Washington, D.C., 2001), p. 390.

K. Nakai, T. Kamimura, H. Sawada, M. Yashimura, Y. Mori, T. Sasaki, H. Yoshida, and M. Nakatsuka, in Digest of Conference on Lasers and Electro-Optics (CLEO/Pacific Rim) (Optical Society of America, Washington, D.C., 1999), p. 967.

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Figures (3)

Fig. 1
Fig. 1

Zirconium 4s spectra of (a) as-polished and (b) ion-etched (80-nm-depth) specimens.

Fig. 2
Fig. 2

Relationship of surface roughness to applied ion-beam voltage at an argon-gas pressure of 3×10-4 Torr.

Fig. 3
Fig. 3

Relationship between surface LIDT and etched depth for samples with conventional and high crystal quality.

Tables (1)

Tables Icon

Table 1 Summary of Sample Parameters

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