Abstract

A one-dimensional, spatial light phase modulator consists of a coherent array of programmable micromirrors. Each micromirror has rotation as well as elevation control to permit high-fidelity, piecewise linear approximations to a desired spatial phase profile. We demonstrate programmable, coherent spatial modulation by configuring a four-micromirror array to act as a blazed diffraction grating, showing five diffraction orders. In sharp contrast, adjustment of each mirror elevation converts the grating into the equivalent of a single, large tilted mirror that reflects only in a new specular direction. Higher-order diffraction is effectively suppressed.

© 2002 Optical Society of America

Full Article  |  PDF Article

References

  • View by:
  • |
  • |
  • |

  1. A. M. Weiner, Prog. Quantum Electron. 19, 161 (1995).
    [CrossRef]
  2. A. Braun, S. Kane, and T. Norris, Opt. Lett. 22, 615 (1997).
    [CrossRef] [PubMed]
  3. E. Zeek, K. Maginnis, S. Backus, U. Russek, M. Murnane, G. Mourou, H. Kapteyn, and G. Vdovin, Opt. Lett. 24, 493 (1999).
    [CrossRef]
  4. A. M. Weiner, D. E. Leaird, J. S. Patel, and J. R. Wullert, IEEE J. Quantum Electron. 28, 908 (1992).
    [CrossRef]
  5. F. Verluise, V. Laude, Z. Cheng, Ch. Spielman, and P. Tournois, Opt. Lett. 25, 575 (2000).
    [CrossRef]
  6. J. M. Bustillo, R. T. Howe, and R. S. Muller, Proc. IEEE 86, 1552 (1998).
    [CrossRef]
  7. K. W. Markus, D. A. Koester, A. Cowen, R. Mahadevan, V. R. Dhuler, D. Roberson, and L. Smith, Proc. SPIE 2639, 54 (1995).
    [CrossRef]
  8. D. M. Burns and V. M. Bright, Sensors Actuators A 70, 9 (1998).
    [CrossRef]

2000

1999

1998

D. M. Burns and V. M. Bright, Sensors Actuators A 70, 9 (1998).
[CrossRef]

J. M. Bustillo, R. T. Howe, and R. S. Muller, Proc. IEEE 86, 1552 (1998).
[CrossRef]

1997

1995

K. W. Markus, D. A. Koester, A. Cowen, R. Mahadevan, V. R. Dhuler, D. Roberson, and L. Smith, Proc. SPIE 2639, 54 (1995).
[CrossRef]

A. M. Weiner, Prog. Quantum Electron. 19, 161 (1995).
[CrossRef]

1992

A. M. Weiner, D. E. Leaird, J. S. Patel, and J. R. Wullert, IEEE J. Quantum Electron. 28, 908 (1992).
[CrossRef]

Backus, S.

Braun, A.

Bright, V. M.

D. M. Burns and V. M. Bright, Sensors Actuators A 70, 9 (1998).
[CrossRef]

Burns, D. M.

D. M. Burns and V. M. Bright, Sensors Actuators A 70, 9 (1998).
[CrossRef]

Bustillo, J. M.

J. M. Bustillo, R. T. Howe, and R. S. Muller, Proc. IEEE 86, 1552 (1998).
[CrossRef]

Cheng, Z.

Cowen, A.

K. W. Markus, D. A. Koester, A. Cowen, R. Mahadevan, V. R. Dhuler, D. Roberson, and L. Smith, Proc. SPIE 2639, 54 (1995).
[CrossRef]

Dhuler, V. R.

K. W. Markus, D. A. Koester, A. Cowen, R. Mahadevan, V. R. Dhuler, D. Roberson, and L. Smith, Proc. SPIE 2639, 54 (1995).
[CrossRef]

Howe, R. T.

J. M. Bustillo, R. T. Howe, and R. S. Muller, Proc. IEEE 86, 1552 (1998).
[CrossRef]

Kane, S.

Kapteyn, H.

Koester, D. A.

K. W. Markus, D. A. Koester, A. Cowen, R. Mahadevan, V. R. Dhuler, D. Roberson, and L. Smith, Proc. SPIE 2639, 54 (1995).
[CrossRef]

Laude, V.

Leaird, D. E.

A. M. Weiner, D. E. Leaird, J. S. Patel, and J. R. Wullert, IEEE J. Quantum Electron. 28, 908 (1992).
[CrossRef]

Maginnis, K.

Mahadevan, R.

K. W. Markus, D. A. Koester, A. Cowen, R. Mahadevan, V. R. Dhuler, D. Roberson, and L. Smith, Proc. SPIE 2639, 54 (1995).
[CrossRef]

Markus, K. W.

K. W. Markus, D. A. Koester, A. Cowen, R. Mahadevan, V. R. Dhuler, D. Roberson, and L. Smith, Proc. SPIE 2639, 54 (1995).
[CrossRef]

Mourou, G.

Muller, R. S.

J. M. Bustillo, R. T. Howe, and R. S. Muller, Proc. IEEE 86, 1552 (1998).
[CrossRef]

Murnane, M.

Norris, T.

Patel, J. S.

A. M. Weiner, D. E. Leaird, J. S. Patel, and J. R. Wullert, IEEE J. Quantum Electron. 28, 908 (1992).
[CrossRef]

Roberson, D.

K. W. Markus, D. A. Koester, A. Cowen, R. Mahadevan, V. R. Dhuler, D. Roberson, and L. Smith, Proc. SPIE 2639, 54 (1995).
[CrossRef]

Russek, U.

Smith, L.

K. W. Markus, D. A. Koester, A. Cowen, R. Mahadevan, V. R. Dhuler, D. Roberson, and L. Smith, Proc. SPIE 2639, 54 (1995).
[CrossRef]

Spielman, Ch.

Tournois, P.

Vdovin, G.

Verluise, F.

Weiner, A. M.

A. M. Weiner, Prog. Quantum Electron. 19, 161 (1995).
[CrossRef]

A. M. Weiner, D. E. Leaird, J. S. Patel, and J. R. Wullert, IEEE J. Quantum Electron. 28, 908 (1992).
[CrossRef]

Wullert, J. R.

A. M. Weiner, D. E. Leaird, J. S. Patel, and J. R. Wullert, IEEE J. Quantum Electron. 28, 908 (1992).
[CrossRef]

Zeek, E.

IEEE J. Quantum Electron.

A. M. Weiner, D. E. Leaird, J. S. Patel, and J. R. Wullert, IEEE J. Quantum Electron. 28, 908 (1992).
[CrossRef]

Opt. Lett.

Proc. IEEE

J. M. Bustillo, R. T. Howe, and R. S. Muller, Proc. IEEE 86, 1552 (1998).
[CrossRef]

Proc. SPIE

K. W. Markus, D. A. Koester, A. Cowen, R. Mahadevan, V. R. Dhuler, D. Roberson, and L. Smith, Proc. SPIE 2639, 54 (1995).
[CrossRef]

Prog. Quantum Electron.

A. M. Weiner, Prog. Quantum Electron. 19, 161 (1995).
[CrossRef]

Sensors Actuators A

D. M. Burns and V. M. Bright, Sensors Actuators A 70, 9 (1998).
[CrossRef]

Cited By

OSA participates in CrossRef's Cited-By Linking service. Citing articles from OSA journals and other participating publishers are listed here.

Alert me when this article is cited.


Figures (4)

Fig. 1
Fig. 1

(a) Quadratic phase modulation comparison between step and piecewise SLPM. The filled circles represent the desired quadratic phase-modulation profile. Piecewise linear phase modulation is shown by the curve connecting the circles. (b) Comparison among the three output short pulses.

Fig. 2
Fig. 2

Scanning electron microscope photographs of the micromirror array. The bottom picture shows four moveable mirrors and two stationary reference mirrors. The left-hand enlargement shows the details of the upper comb electrode and the lower planar capacitive electrode. The right-hand enlargement shows the tether (anchor) and spring that support the mirror.

Fig. 3
Fig. 3

Measured micromirror motion. (a) Elevation versus applied potentials for downward (curve I) and upward (curve II) displacements. (b) Tilt versus applied potentials. The same potential is applied to the diagonally opposing electrodes.

Fig. 4
Fig. 4

Coherent phased-array far-field diffraction patterns. The left-hand inset in each plot illustrates the mirror positions; the pictures are CCD camera images of far-field intensity diffraction patterns. The plot is the corresponding digitized intensity profile. The mirrors are adjusted for (a) reference planar reflection, (b) blazed grating, (c) pixelated equivalent of a single larger tilted mirror.

Equations (1)

Equations on this page are rendered with MathJax. Learn more.

ΔL1diff=fΔθ1diff=fsin-1λ/d-sin θin-θ0.

Metrics