Abstract

We demonstrate generation and focusing of 49.7-nm pulses with an average power of 0.1 mW at 200 Hz and with a pulse energy of >1 µJ at 10 Hz by the fifth harmonic of a femtosecond KrF laser. The fifth harmonic is selected and focused with a concave Sc/Si multilayer mirror to a diameter of 2µ m, resulting in a peak intensity of 0.5 TW/cm2, which will make extreme-ultraviolet nonlinear optics feasible. A novel single-shot linear in situ method of spot-size measurement by use of self-trapped exciton luminescence is also demonstrated.

© 2002 Optical Society of America

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