Abstract

We demonstrate generalized ellipsometry for precise measurement of the principal indices of refraction, the extinction coefficients, and the orientations of the crystal a, b, and c axes of orthorhombic absorbing materials. Stibnite Sb2S3 single crystals cut approximately parallel to (100), (010), (001), and (313) are studied at a representative wavelength of 589 nm. The (313) surface is sufficient for retrieval of all optical constants. The expected effects of surface over-layer formation are removed numerically. We propose generalized ellipsometry as a powerful tool for measurement of anisotropic optical function spectra of biaxial materials.

© 2002 Optical Society of America

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