We demonstrate the feasibility of implementing the generalized phase-contrast (GPC) method in a planar-integrated micro-optics platform. An entire diffractive lens system with a Fourier plane phase-only filter has been designed and manufactured in a 50-mm-diameter fused-silica substrate by use of a four-level multimask lithography. Experimental results show successful conversion of an input phase distribution into a high-contrast intensity distribution. The diffraction efficiency of the optical components is found to limit the operating range of the GPC system.
© 2002 Optical Society of AmericaFull Article | PDF Article
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