Abstract
Mo–Sr multilayer mirrors were successfully
deposited by dc-magnetron sputtering and characterized in situ
with synchrotron radiation. Normal-incidence (3.6°) reflectance
of 23.0% at 8.8 nm, 40.8% at 9.4 nm, and 48.3%
at 10.5 nm were measured before the samples were exposed to
air. After exposure, as a result of the reactivity of Sr with oxygen and water
vapor, the reflectance of these multilayers decreased rapidly. Attempts to
use thin layers of C to passivate the surface of these Mo–Sr
multilayers were unsuccessful.
© 2001 Optical Society of America
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