Abstract

Mo–Sr multilayer mirrors were successfully deposited by dc-magnetron sputtering and characterized in situ with synchrotron radiation. Normal-incidence (3.6°) reflectance of 23.0% at 8.8  nm, 40.8% at 9.4  nm, and 48.3% at 10.5  nm were measured before the samples were exposed to air. After exposure, as a result of the reactivity of Sr with oxygen and water vapor, the reflectance of these multilayers decreased rapidly. Attempts to use thin layers of C to passivate the surface of these Mo–Sr multilayers were unsuccessful.

© 2001 Optical Society of America

Full Article  |  PDF Article
OSA Recommended Articles
Survey of Ti-, B-, and Y-based soft x-ray–extreme ultraviolet multilayer mirrors for the 2- to 12-nm wavelength region

Claude Montcalm, Patrick A. Kearney, J. M. Slaughter, Brian T. Sullivan, M. Chaker, Henri Pépin, and Charles M. Falco
Appl. Opt. 35(25) 5134-5147 (1996)

Experimental comparison of extreme-ultraviolet multilayers for solar physics

David L. Windt, Soizik Donguy, John Seely, and Benjawan Kjornrattanawanich
Appl. Opt. 43(9) 1835-1848 (2004)

Pd/B4C/Y multilayer coatings for extreme ultraviolet applications near 10  nm wavelength

David L. Windt and Eric M. Gullikson
Appl. Opt. 54(18) 5850-5860 (2015)

More Recommended Articles

References

You do not have subscription access to this journal. Citation lists with outbound citation links are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription

Cited By

You do not have subscription access to this journal. Cited by links are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription

Figures (2)

You do not have subscription access to this journal. Figure files are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription

Tables (1)

You do not have subscription access to this journal. Article tables are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription

Metrics

You do not have subscription access to this journal. Article level metrics are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription