Molybdenum–strontium multilayer mirrors for the 8–12-nm extreme-ultraviolet wavelength region

Abstract

Mo–Sr multilayer mirrors were successfully deposited by dc-magnetron sputtering and characterized in situ with synchrotron radiation. Normal-incidence (3.6°) reflectance of 23.0% at 8.8  nm, 40.8% at 9.4  nm, and 48.3% at 10.5  nm were measured before the samples were exposed to air. After exposure, as a result of the reactivity of Sr with oxygen and water vapor, the reflectance of these multilayers decreased rapidly. Attempts to use thin layers of C to passivate the surface of these Mo–Sr multilayers were unsuccessful.

© 2001 Optical Society of America

Survey of Ti-, B-, and Y-based soft x-ray–extreme ultraviolet multilayer mirrors for the 2- to 12-nm wavelength region

Claude Montcalm, Patrick A. Kearney, J. M. Slaughter, Brian T. Sullivan, M. Chaker, Henri Pépin, and Charles M. Falco
Appl. Opt. 35(25) 5134-5147 (1996)

Mo/Y multilayer mirrors for the 8–12-nm wavelength region

Claude Montcalm, Brian T. Sullivan, M. Ranger, J. M. Slaughter, Patrick A. Kearney, Charles M. Falco, and M. Chaker
Opt. Lett. 19(13) 1004-1006 (1994)

Mo/Y multilayer mirrors for the 8–12-nm wavelength region

Claude Montcalm, Brian T. Sullivan, M. Ranger, J. M. Slaughter, Patrick A. Kearney, Charles M. Falco, and M. Chaker
Opt. Lett. 19(15) 1173-1175 (1994)

In situ reflectance measurements of soft-x-ray/extreme-ultraviolet Mo/Y multilayer mirrors

Claude Montcalm, Brian T. Sullivan, Sophie Duguay, M. Ranger, W. Steffens, Henri Pépin, and M. Chaker
Opt. Lett. 20(12) 1450-1452 (1995)

Design and performance of capping layers for extreme-ultraviolet multilayer mirrors

Saša Bajt, Henry N. Chapman, Nhan Nguyen, Jennifer Alameda, Jeffrey C. Robinson, Michael Malinowski, Eric Gullikson, Andrew Aquila, Charles Tarrio, and Steven Grantham
Appl. Opt. 42(28) 5750-5758 (2003)