Abstract

Mo–Sr multilayer mirrors were successfully deposited by dc-magnetron sputtering and characterized in situ with synchrotron radiation. Normal-incidence (3.6°) reflectance of 23.0% at 8.8  nm, 40.8% at 9.4  nm, and 48.3% at 10.5  nm were measured before the samples were exposed to air. After exposure, as a result of the reactivity of Sr with oxygen and water vapor, the reflectance of these multilayers decreased rapidly. Attempts to use thin layers of C to passivate the surface of these Mo–Sr multilayers were unsuccessful.

© 2001 Optical Society of America

Full Article  |  PDF Article

References

  • View by:
  • |
  • |
  • |

  1. R. H. Stulen and D. W. Sweeney, IEEE J. Quantum Electron. 35, 694 (1999).
    [CrossRef]
  2. U. Feldman, P. Mandelbaum, J. F. Seely, G. A. Doscheck, and H. Gursky, Astrophys. J. Suppl. 81, 387 (1992).
    [CrossRef]
  3. A. K. Dupree, N. S. Brickhouse, and G. J. Hanson, in Astrophysics in the Extreme Ultraviolet, S. Bowyer and R. Malina, eds., Vol. 152 of IAU Colloquia Series (Kluwer, Dordrecht, The Netherlands, 1996), p. 141.
    [CrossRef]
  4. A tabulation of measured normal-incidence reflectances, scattering factors of all materials, and details on the synchrotron beamline used for these experiments can be found at www-cxro.lbl.gov .
  5. C. Montcalm, P. A. Kearney, J. M. Slaughter, B. T. Sullivan, M. Chaker, H. Pépin, and C. M. Falco, Appl. Opt. 35, 5134 (1996).
    [CrossRef] [PubMed]
  6. C. Montcalm, B. T. Sullivan, M. Ranger, and H. Pépin, J. Vac. Sci. Technol. A 15, 3069 (1997).
    [CrossRef]
  7. C. R. Hammond, in CRC Handbook of Chemistry and Physics, D. R. Lide, ed. (CRC, Boca Raton, Fla., 1994), pp. 4–28.

1999 (1)

R. H. Stulen and D. W. Sweeney, IEEE J. Quantum Electron. 35, 694 (1999).
[CrossRef]

1997 (1)

C. Montcalm, B. T. Sullivan, M. Ranger, and H. Pépin, J. Vac. Sci. Technol. A 15, 3069 (1997).
[CrossRef]

1996 (1)

1992 (1)

U. Feldman, P. Mandelbaum, J. F. Seely, G. A. Doscheck, and H. Gursky, Astrophys. J. Suppl. 81, 387 (1992).
[CrossRef]

Brickhouse, N. S.

A. K. Dupree, N. S. Brickhouse, and G. J. Hanson, in Astrophysics in the Extreme Ultraviolet, S. Bowyer and R. Malina, eds., Vol. 152 of IAU Colloquia Series (Kluwer, Dordrecht, The Netherlands, 1996), p. 141.
[CrossRef]

Chaker, M.

Doscheck, G. A.

U. Feldman, P. Mandelbaum, J. F. Seely, G. A. Doscheck, and H. Gursky, Astrophys. J. Suppl. 81, 387 (1992).
[CrossRef]

Dupree, A. K.

A. K. Dupree, N. S. Brickhouse, and G. J. Hanson, in Astrophysics in the Extreme Ultraviolet, S. Bowyer and R. Malina, eds., Vol. 152 of IAU Colloquia Series (Kluwer, Dordrecht, The Netherlands, 1996), p. 141.
[CrossRef]

Falco, C. M.

Feldman, U.

U. Feldman, P. Mandelbaum, J. F. Seely, G. A. Doscheck, and H. Gursky, Astrophys. J. Suppl. 81, 387 (1992).
[CrossRef]

Gursky, H.

U. Feldman, P. Mandelbaum, J. F. Seely, G. A. Doscheck, and H. Gursky, Astrophys. J. Suppl. 81, 387 (1992).
[CrossRef]

Hammond, C. R.

C. R. Hammond, in CRC Handbook of Chemistry and Physics, D. R. Lide, ed. (CRC, Boca Raton, Fla., 1994), pp. 4–28.

Hanson, G. J.

A. K. Dupree, N. S. Brickhouse, and G. J. Hanson, in Astrophysics in the Extreme Ultraviolet, S. Bowyer and R. Malina, eds., Vol. 152 of IAU Colloquia Series (Kluwer, Dordrecht, The Netherlands, 1996), p. 141.
[CrossRef]

Kearney, P. A.

Mandelbaum, P.

U. Feldman, P. Mandelbaum, J. F. Seely, G. A. Doscheck, and H. Gursky, Astrophys. J. Suppl. 81, 387 (1992).
[CrossRef]

Montcalm, C.

Pépin, H.

Ranger, M.

C. Montcalm, B. T. Sullivan, M. Ranger, and H. Pépin, J. Vac. Sci. Technol. A 15, 3069 (1997).
[CrossRef]

Seely, J. F.

U. Feldman, P. Mandelbaum, J. F. Seely, G. A. Doscheck, and H. Gursky, Astrophys. J. Suppl. 81, 387 (1992).
[CrossRef]

Slaughter, J. M.

Stulen, R. H.

R. H. Stulen and D. W. Sweeney, IEEE J. Quantum Electron. 35, 694 (1999).
[CrossRef]

Sullivan, B. T.

Sweeney, D. W.

R. H. Stulen and D. W. Sweeney, IEEE J. Quantum Electron. 35, 694 (1999).
[CrossRef]

Appl. Opt. (1)

Astrophys. J. Suppl. (1)

U. Feldman, P. Mandelbaum, J. F. Seely, G. A. Doscheck, and H. Gursky, Astrophys. J. Suppl. 81, 387 (1992).
[CrossRef]

IEEE J. Quantum Electron. (1)

R. H. Stulen and D. W. Sweeney, IEEE J. Quantum Electron. 35, 694 (1999).
[CrossRef]

J. Vac. Sci. Technol. A (1)

C. Montcalm, B. T. Sullivan, M. Ranger, and H. Pépin, J. Vac. Sci. Technol. A 15, 3069 (1997).
[CrossRef]

Other (3)

C. R. Hammond, in CRC Handbook of Chemistry and Physics, D. R. Lide, ed. (CRC, Boca Raton, Fla., 1994), pp. 4–28.

A. K. Dupree, N. S. Brickhouse, and G. J. Hanson, in Astrophysics in the Extreme Ultraviolet, S. Bowyer and R. Malina, eds., Vol. 152 of IAU Colloquia Series (Kluwer, Dordrecht, The Netherlands, 1996), p. 141.
[CrossRef]

A tabulation of measured normal-incidence reflectances, scattering factors of all materials, and details on the synchrotron beamline used for these experiments can be found at www-cxro.lbl.gov .

Cited By

OSA participates in CrossRef's Cited-By Linking service. Citing articles from OSA journals and other participating publishers are listed here.

Alert me when this article is cited.


Figures (2)

Fig. 1
Fig. 1

Normal-incidence (3.6°) reflectance of three Mo–Sr multilayer sample. Data points, measured reflectance; solid curves, best theoretical fits; dashed curve, maximum theoretical peak reflectance of an ideal Mo–Sr multilayer throughout the wavelength region of interest.

Fig. 2
Fig. 2

Series of grazing-incidence reflectance measurements made on the same Mo–Sr multilayer sample after various intervals of exposure to air.

Tables (1)

Tables Icon

Table 1 Fitting Parameters for the Three Multilayers Shown in Fig.  1.

Metrics