Abstract

We demonstrate direct three-dimensional (3-D) microfabrication inside a volume of silica glass. The whole fabrication process was carried out in two steps: (i) writing of the preprogrammed 3-D pattern inside silica glass by focused femtosecond (fs) laser pulses and (ii) etching of the written structure in a 5% aqueous solution of HF acid. This technique allows fabrication of 3-D channels as small as 10 μm in diameter inside the volume with any angle of interconnection and a high aspect ratio (10μm-diameter channels in a 100μm-thick silica slab).

© 2001 Optical Society of America

Full Article  |  PDF Article
OSA Recommended Articles
Shape control of microchannels fabricated in fused silica by femtosecond laser irradiation and chemical etching

Krishna Chaitanya Vishnubhatla, Nicola Bellini, Roberta Ramponi, Giulio Cerullo, and Roberto Osellame
Opt. Express 17(10) 8685-8695 (2009)

Polarization-independent etching of fused silica based on electrons dynamics control by shaped femtosecond pulse trains for microchannel fabrication

X. Yan, L. Jiang, X. Li, K. Zhang, B. Xia, P. Liu, L. Qu, and Y. Lu
Opt. Lett. 39(17) 5240-5243 (2014)

Fabrication of three-dimensional helical microchannels with arbitrary length and uniform diameter inside fused silica

Shengguan He, Feng Chen, Keyin Liu, Qing Yang, Hewei Liu, Hao Bian, Xiangwei Meng, Chao Shan, Jinhai Si, Yulong Zhao, and Xun Hou
Opt. Lett. 37(18) 3825-3827 (2012)

References

You do not have subscription access to this journal. Citation lists with outbound citation links are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription

Cited By

You do not have subscription access to this journal. Cited by links are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription

Figures (3)

You do not have subscription access to this journal. Figure files are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription

Metrics

You do not have subscription access to this journal. Article level metrics are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription