Abstract

A single-element phase-shifting interferometer has been developed based on the lateral shearing interferometer. This new interferometer requires no precise alignment, and the phase is continuously varied by changes in the voltage across a commercially available liquid-crystal phase retarder.

© 2001 Optical Society of America

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References

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    [CrossRef]

1999 (1)

1995 (1)

J. E. Bjorkholm, A. A. MacDowell, O. R. Wood, B. LaFontaine, and D. M. Tennant, J. Vac. Sci. Technol. B 13, 2919 (1995).
[CrossRef]

1994 (1)

1976 (1)

J. C. Wyant, Opt. Commun. 19, 120 (1976).
[CrossRef]

1974 (1)

1968 (1)

1964 (1)

Bjorkholm, J. E.

J. E. Bjorkholm, A. A. MacDowell, O. R. Wood, B. LaFontaine, and D. M. Tennant, J. Vac. Sci. Technol. B 13, 2919 (1995).
[CrossRef]

Bruning, J. H.

J. E. Grievenkamp and J. H. Bruning, in Optical Shop Testing, 2nd ed., D. Malacara, ed. (Wiley, New York, 1992), Chap.  14.

Cornejo, A.

Creath, K.

Dutton, D.

Elster, C.

Grievenkamp, J. E.

J. E. Grievenkamp and J. H. Bruning, in Optical Shop Testing, 2nd ed., D. Malacara, ed. (Wiley, New York, 1992), Chap.  14.

LaFontaine, B.

J. E. Bjorkholm, A. A. MacDowell, O. R. Wood, B. LaFontaine, and D. M. Tennant, J. Vac. Sci. Technol. B 13, 2919 (1995).
[CrossRef]

Latta, M.

MacDowell, A. A.

J. E. Bjorkholm, A. A. MacDowell, O. R. Wood, B. LaFontaine, and D. M. Tennant, J. Vac. Sci. Technol. B 13, 2919 (1995).
[CrossRef]

Mercer, C. R.

Murty, M. V. R. K.

Rimmer, M. P.

Tennant, D. M.

J. E. Bjorkholm, A. A. MacDowell, O. R. Wood, B. LaFontaine, and D. M. Tennant, J. Vac. Sci. Technol. B 13, 2919 (1995).
[CrossRef]

Weingärtner, I.

Wood, O. R.

J. E. Bjorkholm, A. A. MacDowell, O. R. Wood, B. LaFontaine, and D. M. Tennant, J. Vac. Sci. Technol. B 13, 2919 (1995).
[CrossRef]

Wyant, J. C.

J. C. Wyant, Opt. Commun. 19, 120 (1976).
[CrossRef]

Appl. Opt. (3)

J. Opt. Soc. Am. A (1)

J. Vac. Sci. Technol. B (1)

J. E. Bjorkholm, A. A. MacDowell, O. R. Wood, B. LaFontaine, and D. M. Tennant, J. Vac. Sci. Technol. B 13, 2919 (1995).
[CrossRef]

Opt. Commun. (1)

J. C. Wyant, Opt. Commun. 19, 120 (1976).
[CrossRef]

Opt. Lett. (1)

Other (1)

J. E. Grievenkamp and J. H. Bruning, in Optical Shop Testing, 2nd ed., D. Malacara, ed. (Wiley, New York, 1992), Chap.  14.

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Figures (2)

Fig. 1
Fig. 1

Diagram of a phase-shifting shearing interferometer.

Fig. 2
Fig. 2

Phase shift of (a) 0° through (e) 360° in 90° steps in a liquid-crystal shearing interferometer.

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