Abstract

A MoRu–Be multilayer coating was applied to a diffraction grating to enhance the grating’s normal-incidence efficiency near 11.4  nm wavelength. The holographic grating substrate had a blazed groove profile with 2400 grooves/mm and a microroughness of 0.8  nm. The efficiency in the second diffraction order, measured with synchrotron radiation, was 10.4% at a wavelength of 11.37  nm.

© 2001 Optical Society of America

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References

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  1. J. F. Seely, M. P. Kowalski, W. R. Hunter, J. C. Rife, T. W. Barbee, G. E. Holland, C. N. Boyer, and C. M. Brown, Appl. Opt. 32, 4890 (1993).
    [CrossRef] [PubMed]
  2. J. F. Seely, M. P. Kowalski, W. R. Hunter, T. W. Barbee, R. G. Cruddace, and J. C. Rife, Appl. Opt. 34, 6453 (1995).
    [CrossRef] [PubMed]
  3. J. F. Seely, L. I. Goray, W. R. Hunter, and J. C. Rife, Appl. Opt. 38, 1251 (1999).
    [CrossRef]
  4. S. Bajt, J. Vac. Sci. Technol. A 18, 557 (2000).
    [CrossRef]
  5. J. C. Rife, H. R. Sadeghi, and W. R. Hunter, Rev. Sci. Instrum. 60, 2064 (1989).
    [CrossRef]
  6. D. L. Windt, Comput. Phys. 12, 360 (1998). A copy of the software can be downloaded at cletus.phys.columbia.edu/~windt/idl/imd/imd.html .
    [CrossRef]
  7. B. L. Henke, E. M. Gullikson, and J. C. Davis, At. Data Nucl. Data Tables 54, 181 (1993) see also the web site http://www-cxro.lbl.gov/optical_constants/ for updated scattering factor files.
    [CrossRef]
  8. L. I. Goray and B. C. Chernov, in X-Ray and Extreme Ultraviolet Optics, R. B. Hoover and A. B. C. Walker, eds., Proc. SPIE2515, 240 (1995).
    [CrossRef]
  9. J. F. Seely, C. Montcalm, S. Baker, and S. Bajt, “High-efficiency MoRu/Be multilayer coated gratings operating near normal incidence in the 11.1–12.0-nm wavelength range,” Appl. Opt. (to be published).

2000 (1)

S. Bajt, J. Vac. Sci. Technol. A 18, 557 (2000).
[CrossRef]

1999 (1)

1998 (1)

D. L. Windt, Comput. Phys. 12, 360 (1998). A copy of the software can be downloaded at cletus.phys.columbia.edu/~windt/idl/imd/imd.html .
[CrossRef]

1995 (1)

1993 (2)

J. F. Seely, M. P. Kowalski, W. R. Hunter, J. C. Rife, T. W. Barbee, G. E. Holland, C. N. Boyer, and C. M. Brown, Appl. Opt. 32, 4890 (1993).
[CrossRef] [PubMed]

B. L. Henke, E. M. Gullikson, and J. C. Davis, At. Data Nucl. Data Tables 54, 181 (1993) see also the web site http://www-cxro.lbl.gov/optical_constants/ for updated scattering factor files.
[CrossRef]

1989 (1)

J. C. Rife, H. R. Sadeghi, and W. R. Hunter, Rev. Sci. Instrum. 60, 2064 (1989).
[CrossRef]

Bajt, S.

S. Bajt, J. Vac. Sci. Technol. A 18, 557 (2000).
[CrossRef]

J. F. Seely, C. Montcalm, S. Baker, and S. Bajt, “High-efficiency MoRu/Be multilayer coated gratings operating near normal incidence in the 11.1–12.0-nm wavelength range,” Appl. Opt. (to be published).

Baker, S.

J. F. Seely, C. Montcalm, S. Baker, and S. Bajt, “High-efficiency MoRu/Be multilayer coated gratings operating near normal incidence in the 11.1–12.0-nm wavelength range,” Appl. Opt. (to be published).

Barbee, T. W.

Boyer, C. N.

Brown, C. M.

Chernov, B. C.

L. I. Goray and B. C. Chernov, in X-Ray and Extreme Ultraviolet Optics, R. B. Hoover and A. B. C. Walker, eds., Proc. SPIE2515, 240 (1995).
[CrossRef]

Cruddace, R. G.

Davis, J. C.

B. L. Henke, E. M. Gullikson, and J. C. Davis, At. Data Nucl. Data Tables 54, 181 (1993) see also the web site http://www-cxro.lbl.gov/optical_constants/ for updated scattering factor files.
[CrossRef]

Goray, L. I.

J. F. Seely, L. I. Goray, W. R. Hunter, and J. C. Rife, Appl. Opt. 38, 1251 (1999).
[CrossRef]

L. I. Goray and B. C. Chernov, in X-Ray and Extreme Ultraviolet Optics, R. B. Hoover and A. B. C. Walker, eds., Proc. SPIE2515, 240 (1995).
[CrossRef]

Gullikson, E. M.

B. L. Henke, E. M. Gullikson, and J. C. Davis, At. Data Nucl. Data Tables 54, 181 (1993) see also the web site http://www-cxro.lbl.gov/optical_constants/ for updated scattering factor files.
[CrossRef]

Henke, B. L.

B. L. Henke, E. M. Gullikson, and J. C. Davis, At. Data Nucl. Data Tables 54, 181 (1993) see also the web site http://www-cxro.lbl.gov/optical_constants/ for updated scattering factor files.
[CrossRef]

Holland, G. E.

Hunter, W. R.

Kowalski, M. P.

Montcalm, C.

J. F. Seely, C. Montcalm, S. Baker, and S. Bajt, “High-efficiency MoRu/Be multilayer coated gratings operating near normal incidence in the 11.1–12.0-nm wavelength range,” Appl. Opt. (to be published).

Rife, J. C.

Sadeghi, H. R.

J. C. Rife, H. R. Sadeghi, and W. R. Hunter, Rev. Sci. Instrum. 60, 2064 (1989).
[CrossRef]

Seely, J. F.

Windt, D. L.

D. L. Windt, Comput. Phys. 12, 360 (1998). A copy of the software can be downloaded at cletus.phys.columbia.edu/~windt/idl/imd/imd.html .
[CrossRef]

Appl. Opt. (3)

At. Data Nucl. Data Tables (1)

B. L. Henke, E. M. Gullikson, and J. C. Davis, At. Data Nucl. Data Tables 54, 181 (1993) see also the web site http://www-cxro.lbl.gov/optical_constants/ for updated scattering factor files.
[CrossRef]

Comput. Phys. (1)

D. L. Windt, Comput. Phys. 12, 360 (1998). A copy of the software can be downloaded at cletus.phys.columbia.edu/~windt/idl/imd/imd.html .
[CrossRef]

J. Vac. Sci. Technol. A (1)

S. Bajt, J. Vac. Sci. Technol. A 18, 557 (2000).
[CrossRef]

Rev. Sci. Instrum. (1)

J. C. Rife, H. R. Sadeghi, and W. R. Hunter, Rev. Sci. Instrum. 60, 2064 (1989).
[CrossRef]

Other (2)

L. I. Goray and B. C. Chernov, in X-Ray and Extreme Ultraviolet Optics, R. B. Hoover and A. B. C. Walker, eds., Proc. SPIE2515, 240 (1995).
[CrossRef]

J. F. Seely, C. Montcalm, S. Baker, and S. Bajt, “High-efficiency MoRu/Be multilayer coated gratings operating near normal incidence in the 11.1–12.0-nm wavelength range,” Appl. Opt. (to be published).

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Figures (3)

Fig. 1
Fig. 1

(a) Measured (squares) and calculated (dashed curve) reflectance of a test flat mirror with 20  MoRu–Be bilayers at an angle of incidence of 10°. (b) Zero-order efficiency of a grating coated with a 50-bilayer MoRu–Be multilayer measured at an angle of 13.9° (squares). Also shown is the predicted reflectance of the multilayer coating (dashed curve). The measured zero-order efficiency is a factor of 10 lower than the reflectance.

Fig. 2
Fig. 2

Grating efficiency measured at a wavelength of 11.37  nm and an angle of incidence of 13.9°. The outside m<0 and inside m>0 diffraction orders are identified.

Fig. 3
Fig. 3

Efficiency of the grating (a) measured and (b) calculated for an angle of incidence of 13.9°.

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