Abstract

A MoRu–Be multilayer coating was applied to a diffraction grating to enhance the grating’s normal-incidence efficiency near 11.4  nm wavelength. The holographic grating substrate had a blazed groove profile with 2400 grooves/mm and a microroughness of 0.8  nm. The efficiency in the second diffraction order, measured with synchrotron radiation, was 10.4% at a wavelength of 11.37  nm.

© 2001 Optical Society of America

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References

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  1. J. F. Seely, M. P. Kowalski, W. R. Hunter, J. C. Rife, T. W. Barbee, G. E. Holland, C. N. Boyer, and C. M. Brown, Appl. Opt. 32, 4890 (1993).
    [CrossRef] [PubMed]
  2. J. F. Seely, M. P. Kowalski, W. R. Hunter, T. W. Barbee, R. G. Cruddace, and J. C. Rife, Appl. Opt. 34, 6453 (1995).
    [CrossRef] [PubMed]
  3. J. F. Seely, L. I. Goray, W. R. Hunter, and J. C. Rife, Appl. Opt. 38, 1251 (1999).
    [CrossRef]
  4. S. Bajt, J. Vac. Sci. Technol. A 18, 557 (2000).
    [CrossRef]
  5. J. C. Rife, H. R. Sadeghi, and W. R. Hunter, Rev. Sci. Instrum. 60, 2064 (1989).
    [CrossRef]
  6. D. L. Windt, Comput. Phys. 12, 360 (1998). A copy of the software can be downloaded at cletus.phys.columbia.edu/~windt/idl/imd/imd.html .
    [CrossRef]
  7. B. L. Henke, E. M. Gullikson, and J. C. Davis, At. Data Nucl. Data Tables 54, 181 (1993) see also the web site http://www-cxro.lbl.gov/optical_constants/ for updated scattering factor files.
    [CrossRef]
  8. L. I. Goray and B. C. Chernov, in X-Ray and Extreme Ultraviolet Optics, R. B. Hoover and A. B. C. Walker, eds., Proc. SPIE2515, 240 (1995).
    [CrossRef]
  9. J. F. Seely, C. Montcalm, S. Baker, and S. Bajt, “High-efficiency MoRu/Be multilayer coated gratings operating near normal incidence in the 11.1–12.0-nm wavelength range,” Appl. Opt. (to be published).

2000 (1)

S. Bajt, J. Vac. Sci. Technol. A 18, 557 (2000).
[CrossRef]

1999 (1)

1998 (1)

D. L. Windt, Comput. Phys. 12, 360 (1998). A copy of the software can be downloaded at cletus.phys.columbia.edu/~windt/idl/imd/imd.html .
[CrossRef]

1995 (1)

1993 (2)

B. L. Henke, E. M. Gullikson, and J. C. Davis, At. Data Nucl. Data Tables 54, 181 (1993) see also the web site http://www-cxro.lbl.gov/optical_constants/ for updated scattering factor files.
[CrossRef]

J. F. Seely, M. P. Kowalski, W. R. Hunter, J. C. Rife, T. W. Barbee, G. E. Holland, C. N. Boyer, and C. M. Brown, Appl. Opt. 32, 4890 (1993).
[CrossRef] [PubMed]

1989 (1)

J. C. Rife, H. R. Sadeghi, and W. R. Hunter, Rev. Sci. Instrum. 60, 2064 (1989).
[CrossRef]

Bajt, S.

S. Bajt, J. Vac. Sci. Technol. A 18, 557 (2000).
[CrossRef]

J. F. Seely, C. Montcalm, S. Baker, and S. Bajt, “High-efficiency MoRu/Be multilayer coated gratings operating near normal incidence in the 11.1–12.0-nm wavelength range,” Appl. Opt. (to be published).

Baker, S.

J. F. Seely, C. Montcalm, S. Baker, and S. Bajt, “High-efficiency MoRu/Be multilayer coated gratings operating near normal incidence in the 11.1–12.0-nm wavelength range,” Appl. Opt. (to be published).

Barbee, T. W.

Boyer, C. N.

Brown, C. M.

Chernov, B. C.

L. I. Goray and B. C. Chernov, in X-Ray and Extreme Ultraviolet Optics, R. B. Hoover and A. B. C. Walker, eds., Proc. SPIE2515, 240 (1995).
[CrossRef]

Cruddace, R. G.

Davis, J. C.

B. L. Henke, E. M. Gullikson, and J. C. Davis, At. Data Nucl. Data Tables 54, 181 (1993) see also the web site http://www-cxro.lbl.gov/optical_constants/ for updated scattering factor files.
[CrossRef]

Goray, L. I.

J. F. Seely, L. I. Goray, W. R. Hunter, and J. C. Rife, Appl. Opt. 38, 1251 (1999).
[CrossRef]

L. I. Goray and B. C. Chernov, in X-Ray and Extreme Ultraviolet Optics, R. B. Hoover and A. B. C. Walker, eds., Proc. SPIE2515, 240 (1995).
[CrossRef]

Gullikson, E. M.

B. L. Henke, E. M. Gullikson, and J. C. Davis, At. Data Nucl. Data Tables 54, 181 (1993) see also the web site http://www-cxro.lbl.gov/optical_constants/ for updated scattering factor files.
[CrossRef]

Henke, B. L.

B. L. Henke, E. M. Gullikson, and J. C. Davis, At. Data Nucl. Data Tables 54, 181 (1993) see also the web site http://www-cxro.lbl.gov/optical_constants/ for updated scattering factor files.
[CrossRef]

Holland, G. E.

Hunter, W. R.

Kowalski, M. P.

Montcalm, C.

J. F. Seely, C. Montcalm, S. Baker, and S. Bajt, “High-efficiency MoRu/Be multilayer coated gratings operating near normal incidence in the 11.1–12.0-nm wavelength range,” Appl. Opt. (to be published).

Rife, J. C.

Sadeghi, H. R.

J. C. Rife, H. R. Sadeghi, and W. R. Hunter, Rev. Sci. Instrum. 60, 2064 (1989).
[CrossRef]

Seely, J. F.

Windt, D. L.

D. L. Windt, Comput. Phys. 12, 360 (1998). A copy of the software can be downloaded at cletus.phys.columbia.edu/~windt/idl/imd/imd.html .
[CrossRef]

Appl. Opt. (3)

At. Data Nucl. Data Tables (1)

B. L. Henke, E. M. Gullikson, and J. C. Davis, At. Data Nucl. Data Tables 54, 181 (1993) see also the web site http://www-cxro.lbl.gov/optical_constants/ for updated scattering factor files.
[CrossRef]

Comput. Phys. (1)

D. L. Windt, Comput. Phys. 12, 360 (1998). A copy of the software can be downloaded at cletus.phys.columbia.edu/~windt/idl/imd/imd.html .
[CrossRef]

J. Vac. Sci. Technol. A (1)

S. Bajt, J. Vac. Sci. Technol. A 18, 557 (2000).
[CrossRef]

Rev. Sci. Instrum. (1)

J. C. Rife, H. R. Sadeghi, and W. R. Hunter, Rev. Sci. Instrum. 60, 2064 (1989).
[CrossRef]

Other (2)

L. I. Goray and B. C. Chernov, in X-Ray and Extreme Ultraviolet Optics, R. B. Hoover and A. B. C. Walker, eds., Proc. SPIE2515, 240 (1995).
[CrossRef]

J. F. Seely, C. Montcalm, S. Baker, and S. Bajt, “High-efficiency MoRu/Be multilayer coated gratings operating near normal incidence in the 11.1–12.0-nm wavelength range,” Appl. Opt. (to be published).

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Figures (3)

Fig. 1
Fig. 1

(a) Measured (squares) and calculated (dashed curve) reflectance of a test flat mirror with 20  MoRu–Be bilayers at an angle of incidence of 10°. (b) Zero-order efficiency of a grating coated with a 50-bilayer MoRu–Be multilayer measured at an angle of 13.9° (squares). Also shown is the predicted reflectance of the multilayer coating (dashed curve). The measured zero-order efficiency is a factor of 10 lower than the reflectance.

Fig. 2
Fig. 2

Grating efficiency measured at a wavelength of 11.37  nm and an angle of incidence of 13.9°. The outside m<0 and inside m>0 diffraction orders are identified.

Fig. 3
Fig. 3

Efficiency of the grating (a) measured and (b) calculated for an angle of incidence of 13.9°.

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