Abstract

A MoRu–Be multilayer coating was applied to a diffraction grating to enhance the grating’s normal-incidence efficiency near 11.4  nm wavelength. The holographic grating substrate had a blazed groove profile with 2400 grooves/mm and a microroughness of 0.8  nm. The efficiency in the second diffraction order, measured with synchrotron radiation, was 10.4% at a wavelength of 11.37  nm.

© 2001 Optical Society of America

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  1. J. F. Seely, M. P. Kowalski, W. R. Hunter, J. C. Rife, T. W. Barbee, G. E. Holland, C. N. Boyer, and C. M. Brown, Appl. Opt. 32, 4890 (1993).
    [CrossRef] [PubMed]
  2. J. F. Seely, M. P. Kowalski, W. R. Hunter, T. W. Barbee, R. G. Cruddace, and J. C. Rife, Appl. Opt. 34, 6453 (1995).
    [CrossRef] [PubMed]
  3. J. F. Seely, L. I. Goray, W. R. Hunter, and J. C. Rife, Appl. Opt. 38, 1251 (1999).
    [CrossRef]
  4. S. Bajt, J. Vac. Sci. Technol. A 18, 557 (2000).
    [CrossRef]
  5. J. C. Rife, H. R. Sadeghi, and W. R. Hunter, Rev. Sci. Instrum. 60, 2064 (1989).
    [CrossRef]
  6. D. L. Windt, Comput. Phys. 12, 360 (1998). A copy of the software can be downloaded at cletus.phys.columbia.edu/~windt/idl/imd/imd.html .
    [CrossRef]
  7. B. L. Henke, E. M. Gullikson, and J. C. Davis, At. Data Nucl. Data Tables 54, 181 (1993) see also the web site http://www-cxro.lbl.gov/optical_constants/ for updated scattering factor files.
    [CrossRef]
  8. L. I. Goray and B. C. Chernov, in X-Ray and Extreme Ultraviolet Optics, R. B. Hoover and A. B. C. Walker, eds., Proc. SPIE2515, 240 (1995).
  9. J. F. Seely, C. Montcalm, S. Baker, and S. Bajt, “High-efficiency MoRu/Be multilayer coated gratings operating near normal incidence in the 11.1–12.0-nm wavelength range,” Appl. Opt. (to be published).

2000 (1)

S. Bajt, J. Vac. Sci. Technol. A 18, 557 (2000).
[CrossRef]

1999 (1)

1998 (1)

D. L. Windt, Comput. Phys. 12, 360 (1998). A copy of the software can be downloaded at cletus.phys.columbia.edu/~windt/idl/imd/imd.html .
[CrossRef]

1995 (1)

1993 (2)

B. L. Henke, E. M. Gullikson, and J. C. Davis, At. Data Nucl. Data Tables 54, 181 (1993) see also the web site http://www-cxro.lbl.gov/optical_constants/ for updated scattering factor files.
[CrossRef]

J. F. Seely, M. P. Kowalski, W. R. Hunter, J. C. Rife, T. W. Barbee, G. E. Holland, C. N. Boyer, and C. M. Brown, Appl. Opt. 32, 4890 (1993).
[CrossRef] [PubMed]

1989 (1)

J. C. Rife, H. R. Sadeghi, and W. R. Hunter, Rev. Sci. Instrum. 60, 2064 (1989).
[CrossRef]

Bajt, S.

S. Bajt, J. Vac. Sci. Technol. A 18, 557 (2000).
[CrossRef]

J. F. Seely, C. Montcalm, S. Baker, and S. Bajt, “High-efficiency MoRu/Be multilayer coated gratings operating near normal incidence in the 11.1–12.0-nm wavelength range,” Appl. Opt. (to be published).

Baker, S.

J. F. Seely, C. Montcalm, S. Baker, and S. Bajt, “High-efficiency MoRu/Be multilayer coated gratings operating near normal incidence in the 11.1–12.0-nm wavelength range,” Appl. Opt. (to be published).

Barbee, T. W.

Boyer, C. N.

Brown, C. M.

Chernov, B. C.

L. I. Goray and B. C. Chernov, in X-Ray and Extreme Ultraviolet Optics, R. B. Hoover and A. B. C. Walker, eds., Proc. SPIE2515, 240 (1995).

Cruddace, R. G.

Davis, J. C.

B. L. Henke, E. M. Gullikson, and J. C. Davis, At. Data Nucl. Data Tables 54, 181 (1993) see also the web site http://www-cxro.lbl.gov/optical_constants/ for updated scattering factor files.
[CrossRef]

Goray, L. I.

J. F. Seely, L. I. Goray, W. R. Hunter, and J. C. Rife, Appl. Opt. 38, 1251 (1999).
[CrossRef]

L. I. Goray and B. C. Chernov, in X-Ray and Extreme Ultraviolet Optics, R. B. Hoover and A. B. C. Walker, eds., Proc. SPIE2515, 240 (1995).

Gullikson, E. M.

B. L. Henke, E. M. Gullikson, and J. C. Davis, At. Data Nucl. Data Tables 54, 181 (1993) see also the web site http://www-cxro.lbl.gov/optical_constants/ for updated scattering factor files.
[CrossRef]

Henke, B. L.

B. L. Henke, E. M. Gullikson, and J. C. Davis, At. Data Nucl. Data Tables 54, 181 (1993) see also the web site http://www-cxro.lbl.gov/optical_constants/ for updated scattering factor files.
[CrossRef]

Holland, G. E.

Hunter, W. R.

Kowalski, M. P.

Montcalm, C.

J. F. Seely, C. Montcalm, S. Baker, and S. Bajt, “High-efficiency MoRu/Be multilayer coated gratings operating near normal incidence in the 11.1–12.0-nm wavelength range,” Appl. Opt. (to be published).

Rife, J. C.

Sadeghi, H. R.

J. C. Rife, H. R. Sadeghi, and W. R. Hunter, Rev. Sci. Instrum. 60, 2064 (1989).
[CrossRef]

Seely, J. F.

Windt, D. L.

D. L. Windt, Comput. Phys. 12, 360 (1998). A copy of the software can be downloaded at cletus.phys.columbia.edu/~windt/idl/imd/imd.html .
[CrossRef]

Appl. Opt. (3)

At. Data Nucl. Data Tables (1)

B. L. Henke, E. M. Gullikson, and J. C. Davis, At. Data Nucl. Data Tables 54, 181 (1993) see also the web site http://www-cxro.lbl.gov/optical_constants/ for updated scattering factor files.
[CrossRef]

Comput. Phys. (1)

D. L. Windt, Comput. Phys. 12, 360 (1998). A copy of the software can be downloaded at cletus.phys.columbia.edu/~windt/idl/imd/imd.html .
[CrossRef]

J. Vac. Sci. Technol. A (1)

S. Bajt, J. Vac. Sci. Technol. A 18, 557 (2000).
[CrossRef]

Rev. Sci. Instrum. (1)

J. C. Rife, H. R. Sadeghi, and W. R. Hunter, Rev. Sci. Instrum. 60, 2064 (1989).
[CrossRef]

Other (2)

L. I. Goray and B. C. Chernov, in X-Ray and Extreme Ultraviolet Optics, R. B. Hoover and A. B. C. Walker, eds., Proc. SPIE2515, 240 (1995).

J. F. Seely, C. Montcalm, S. Baker, and S. Bajt, “High-efficiency MoRu/Be multilayer coated gratings operating near normal incidence in the 11.1–12.0-nm wavelength range,” Appl. Opt. (to be published).

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