Abstract

By moving silica glass in a preprogrammed structure, we directly produced three-dimensional holes with femtosecond laser pulses in single step. When distilled water was introduced into a hole drilled from the rear surface of the glass, the effects of blocking and redeposition of ablated material were greatly reduced and the aspect ratio of the depth of the hole was increased. Straight holes of 4μm diameter were more than 200 μm deep. Three-dimensional channels can be micromachined inside transparent materials by use of this method, as we have demonstrated by drilling a square-wave-shaped hole inside silica glass.

© 2001 Optical Society of America

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2001

2000

1999

X. Chen X. Liu, J. Laser Appl. 11, 268 (1999).
[CrossRef]

M. D. Perry, B. C. Stuart, P. S. Banks, M. D. Feit, V. Yanovsky, A. M. Rubenchik, J. Appl. Phys. 85, 6803 (1999).
[CrossRef]

Y. Kondo, J. Qiu, T. Mitsuyu, K. Hirao, T. Yoko, Jpn. J. Appl. Phys. 38, L1146 (1999).
[CrossRef]

1998

M. D. Shirk P. A. Molian, J. Laser Appl. 10, 18 (1998).
[CrossRef]

J. Kruger, W. Kautek, M. Lenzner, S. Sartania, C. Spielmann, F. Krausz, Appl. Surf. Sci. 127–129, 892 (1998).

1997

K. Miura, J. Qiu, H. Inouye, T. Mitsuyu, K. Hirao, Appl. Phys. Lett. 71, 3329 (1997).
[CrossRef]

H. Varel, D. Ashkenasi, A. Rosenfeld, M. Wahmer, E. E. B. Campbell, Appl. Phys. A 65, 367 (1997).
[CrossRef]

1996

E. N. Glezer, M. Milosavljevic, L. Huang, R. J. Finlay, T.-H. Her, J. P. Callan, E. Mazur, Opt. Lett. 21, 2023 (1996).
[CrossRef] [PubMed]

B. N. Chichkov, C. Momma, S. Nolte, F. von Alvensleben, A. Tunnermann, Appl. Phys. A 63, 109 (1996).
[CrossRef]

1992

J. Ihlemann, B. Wolff, P. Simon, Appl. Phys. A 54, 363 (1992).
[CrossRef]

Ashkenasi, D.

H. Varel, D. Ashkenasi, A. Rosenfeld, M. Wahmer, E. E. B. Campbell, Appl. Phys. A 65, 367 (1997).
[CrossRef]

Banks, P. S.

M. D. Perry, B. C. Stuart, P. S. Banks, M. D. Feit, V. Yanovsky, A. M. Rubenchik, J. Appl. Phys. 85, 6803 (1999).
[CrossRef]

Borrelli, N. F.

Brodeur, A.

Callan, J. P.

Campbell, E. E. B.

H. Varel, D. Ashkenasi, A. Rosenfeld, M. Wahmer, E. E. B. Campbell, Appl. Phys. A 65, 367 (1997).
[CrossRef]

Chen, X.

X. Chen X. Liu, J. Laser Appl. 11, 268 (1999).
[CrossRef]

Chichkov, B. N.

B. N. Chichkov, C. Momma, S. Nolte, F. von Alvensleben, A. Tunnermann, Appl. Phys. A 63, 109 (1996).
[CrossRef]

Feit, M. D.

M. D. Perry, B. C. Stuart, P. S. Banks, M. D. Feit, V. Yanovsky, A. M. Rubenchik, J. Appl. Phys. 85, 6803 (1999).
[CrossRef]

Finlay, R. J.

Garcia, J. F.

Glezer, E. N.

Gower, M. C.

Hayashi, K.

Her, T.-H.

Hirao, K.

Y. Kondo, J. Qiu, T. Mitsuyu, K. Hirao, T. Yoko, Jpn. J. Appl. Phys. 38, L1146 (1999).
[CrossRef]

K. Miura, J. Qiu, H. Inouye, T. Mitsuyu, K. Hirao, Appl. Phys. Lett. 71, 3329 (1997).
[CrossRef]

Huang, L.

Ihlemann, J.

J. Ihlemann, B. Wolff, P. Simon, Appl. Phys. A 54, 363 (1992).
[CrossRef]

Inouye, H.

K. Miura, J. Qiu, H. Inouye, T. Mitsuyu, K. Hirao, Appl. Phys. Lett. 71, 3329 (1997).
[CrossRef]

Itoh, K.

Juodkazis, S.

Kautek, W.

J. Kruger, W. Kautek, M. Lenzner, S. Sartania, C. Spielmann, F. Krausz, Appl. Surf. Sci. 127–129, 892 (1998).

Kondo, Y.

Y. Kondo, J. Qiu, T. Mitsuyu, K. Hirao, T. Yoko, Jpn. J. Appl. Phys. 38, L1146 (1999).
[CrossRef]

Krausz, F.

J. Kruger, W. Kautek, M. Lenzner, S. Sartania, C. Spielmann, F. Krausz, Appl. Surf. Sci. 127–129, 892 (1998).

Kruger, J.

J. Kruger, W. Kautek, M. Lenzner, S. Sartania, C. Spielmann, F. Krausz, Appl. Surf. Sci. 127–129, 892 (1998).

Lenzner, M.

J. Kruger, W. Kautek, M. Lenzner, S. Sartania, C. Spielmann, F. Krausz, Appl. Surf. Sci. 127–129, 892 (1998).

Liu, X.

X. Chen X. Liu, J. Laser Appl. 11, 268 (1999).
[CrossRef]

Marcinkevicius, A.

Matsuo, S.

Mazur, E.

Milosavljevic, M.

Misawa, H.

Mitsuyu, T.

Y. Kondo, J. Qiu, T. Mitsuyu, K. Hirao, T. Yoko, Jpn. J. Appl. Phys. 38, L1146 (1999).
[CrossRef]

K. Miura, J. Qiu, H. Inouye, T. Mitsuyu, K. Hirao, Appl. Phys. Lett. 71, 3329 (1997).
[CrossRef]

Miura, K.

K. Miura, J. Qiu, H. Inouye, T. Mitsuyu, K. Hirao, Appl. Phys. Lett. 71, 3329 (1997).
[CrossRef]

Miwa, M.

Molian, P. A.

M. D. Shirk P. A. Molian, J. Laser Appl. 10, 18 (1998).
[CrossRef]

Momma, C.

B. N. Chichkov, C. Momma, S. Nolte, F. von Alvensleben, A. Tunnermann, Appl. Phys. A 63, 109 (1996).
[CrossRef]

Nishii, J.

Nolte, S.

B. N. Chichkov, C. Momma, S. Nolte, F. von Alvensleben, A. Tunnermann, Appl. Phys. A 63, 109 (1996).
[CrossRef]

Perry, M. D.

M. D. Perry, B. C. Stuart, P. S. Banks, M. D. Feit, V. Yanovsky, A. M. Rubenchik, J. Appl. Phys. 85, 6803 (1999).
[CrossRef]

Qiu, J.

Y. Kondo, J. Qiu, T. Mitsuyu, K. Hirao, T. Yoko, Jpn. J. Appl. Phys. 38, L1146 (1999).
[CrossRef]

K. Miura, J. Qiu, H. Inouye, T. Mitsuyu, K. Hirao, Appl. Phys. Lett. 71, 3329 (1997).
[CrossRef]

Rosenfeld, A.

H. Varel, D. Ashkenasi, A. Rosenfeld, M. Wahmer, E. E. B. Campbell, Appl. Phys. A 65, 367 (1997).
[CrossRef]

Rubenchik, A. M.

M. D. Perry, B. C. Stuart, P. S. Banks, M. D. Feit, V. Yanovsky, A. M. Rubenchik, J. Appl. Phys. 85, 6803 (1999).
[CrossRef]

Sartania, S.

J. Kruger, W. Kautek, M. Lenzner, S. Sartania, C. Spielmann, F. Krausz, Appl. Surf. Sci. 127–129, 892 (1998).

Schaffer, C. B.

Shirk, M. D.

M. D. Shirk P. A. Molian, J. Laser Appl. 10, 18 (1998).
[CrossRef]

Simon, P.

J. Ihlemann, B. Wolff, P. Simon, Appl. Phys. A 54, 363 (1992).
[CrossRef]

Spielmann, C.

J. Kruger, W. Kautek, M. Lenzner, S. Sartania, C. Spielmann, F. Krausz, Appl. Surf. Sci. 127–129, 892 (1998).

Streltsov, A. M.

Stuart, B. C.

M. D. Perry, B. C. Stuart, P. S. Banks, M. D. Feit, V. Yanovsky, A. M. Rubenchik, J. Appl. Phys. 85, 6803 (1999).
[CrossRef]

Sun, H.-B.

Sun, K.

Toma, T.

Tunnermann, A.

B. N. Chichkov, C. Momma, S. Nolte, F. von Alvensleben, A. Tunnermann, Appl. Phys. A 63, 109 (1996).
[CrossRef]

Varel, H.

H. Varel, D. Ashkenasi, A. Rosenfeld, M. Wahmer, E. E. B. Campbell, Appl. Phys. A 65, 367 (1997).
[CrossRef]

von Alvensleben, F.

B. N. Chichkov, C. Momma, S. Nolte, F. von Alvensleben, A. Tunnermann, Appl. Phys. A 63, 109 (1996).
[CrossRef]

Wahmer, M.

H. Varel, D. Ashkenasi, A. Rosenfeld, M. Wahmer, E. E. B. Campbell, Appl. Phys. A 65, 367 (1997).
[CrossRef]

Watanabe, M.

Watanabe, W.

Wolff, B.

J. Ihlemann, B. Wolff, P. Simon, Appl. Phys. A 54, 363 (1992).
[CrossRef]

Xu, Y.

Yamada, K.

Yanovsky, V.

M. D. Perry, B. C. Stuart, P. S. Banks, M. D. Feit, V. Yanovsky, A. M. Rubenchik, J. Appl. Phys. 85, 6803 (1999).
[CrossRef]

Yoko, T.

Y. Kondo, J. Qiu, T. Mitsuyu, K. Hirao, T. Yoko, Jpn. J. Appl. Phys. 38, L1146 (1999).
[CrossRef]

Appl. Phys. A

B. N. Chichkov, C. Momma, S. Nolte, F. von Alvensleben, A. Tunnermann, Appl. Phys. A 63, 109 (1996).
[CrossRef]

H. Varel, D. Ashkenasi, A. Rosenfeld, M. Wahmer, E. E. B. Campbell, Appl. Phys. A 65, 367 (1997).
[CrossRef]

J. Ihlemann, B. Wolff, P. Simon, Appl. Phys. A 54, 363 (1992).
[CrossRef]

Appl. Phys. Lett.

K. Miura, J. Qiu, H. Inouye, T. Mitsuyu, K. Hirao, Appl. Phys. Lett. 71, 3329 (1997).
[CrossRef]

Appl. Surf. Sci.

J. Kruger, W. Kautek, M. Lenzner, S. Sartania, C. Spielmann, F. Krausz, Appl. Surf. Sci. 127–129, 892 (1998).

J. Appl. Phys.

M. D. Perry, B. C. Stuart, P. S. Banks, M. D. Feit, V. Yanovsky, A. M. Rubenchik, J. Appl. Phys. 85, 6803 (1999).
[CrossRef]

J. Laser Appl.

M. D. Shirk P. A. Molian, J. Laser Appl. 10, 18 (1998).
[CrossRef]

X. Chen X. Liu, J. Laser Appl. 11, 268 (1999).
[CrossRef]

Jpn. J. Appl. Phys.

Y. Kondo, J. Qiu, T. Mitsuyu, K. Hirao, T. Yoko, Jpn. J. Appl. Phys. 38, L1146 (1999).
[CrossRef]

Opt. Express

Opt. Lett.

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Figures (4)

Fig. 1
Fig. 1

Top view of the experimental setup for microdrilling of silica glass from its rear surface.

Fig. 2
Fig. 2

Microdrilling of silica glass from its rear surface in air without and with an inflow of water into the hole. Incident energy, 1 μJ per pulse. (a)–(c) Drilling without an inflow of water; (d), (e) drilling with an inflow of water. (f) Image of (e) after the water has receded.

Fig. 3
Fig. 3

Two holes drilled from the rear surface that was in contact with distilled water. Incident pulse energy, 1 μJ.

Fig. 4
Fig. 4

Square-wave shaped hole drilled by movement of the sample in different directions. (a) The finished hole with diameters of 7 μm (pulse energy, 4 μJ) and 4 μm (pulse energy, 1 μJ). (b) Video clips of the drying process of the refilled hole.

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