Abstract

Two-dimensional periodic structures were fabricated upon a fluorine-doped SiO2 film in which the fluorine content changed gradually in the direction of film thickness. The films were deposited by plasma-enhanced chemical-vapor deposition. The film was periodically patterned into a 1μm period and an 1μm-groove depth by inductive coupled plasma reactive-ion etching followed by chemical etching in a diluted HF solution. A surface reflectance of 0.7% was attained at 1.85μm wavelength, a value that is one fifth as large as the 3.5% Fresnel reflection of a SiO2 substrate with a flat surface.

© 2001 Optical Society of America

Full Article  |  PDF Article
OSA Recommended Articles
Broadband antireflection gratings fabricated upon silicon substrates

Y. Kanamori, M. Sasaki, and K. Hane
Opt. Lett. 24(20) 1422-1424 (1999)

Fluorine-doped SiO2 glasses for F2 excimer laser optics:?fluorine content and color-center formation

Hideo Hosono, Masafumi Mizuguchi, Linards Skuja, and Tohru Ogawa
Opt. Lett. 24(22) 1549-1551 (1999)

Influence of dry etching on the properties of SiO2 and HfO2 single layers

Lingyun Xie, Huasong Liu, Jun Zhao, Hongfei Jiao, Jinlong Zhang, Zhanshan Wang, and Xinbin Cheng
Appl. Opt. 59(5) A128-A134 (2020)

References

You do not have subscription access to this journal. Citation lists with outbound citation links are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription

Cited By

You do not have subscription access to this journal. Cited by links are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription

Figures (3)

You do not have subscription access to this journal. Figure files are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription

Metrics

You do not have subscription access to this journal. Article level metrics are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription