Abstract

Two-dimensional periodic structures were fabricated upon a fluorine-doped SiO2 film in which the fluorine content changed gradually in the direction of film thickness. The films were deposited by plasma-enhanced chemical-vapor deposition. The film was periodically patterned into a 1μm period and an 1μm-groove depth by inductive coupled plasma reactive-ion etching followed by chemical etching in a diluted HF solution. A surface reflectance of 0.7% was attained at 1.85μm wavelength, a value that is one fifth as large as the 3.5% Fresnel reflection of a SiO2 substrate with a flat surface.

© 2001 Optical Society of America

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References

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1999 (1)

1997 (1)

P. Lalanne and G. M. Morris, Nanotechnology 8, 53 (1997).
[CrossRef]

1995 (2)

1993 (1)

1988 (1)

M. G. Moharam, Proc. SPIE 883, 8–11 (1988).
[CrossRef]

1987 (1)

1983 (2)

R. C. Enger and S. K. Case, Appl. Opt. 22, 3220 (1983).
[CrossRef]

D. L. Wood, E. M. Rabinovich, D. W. Johnson, J. B. MacChesney, and E. M. Vogel, J. Am. Ceram. Soc. 66, 693 (1983).
[CrossRef]

1982 (1)

S. J. Wilson and M. C. Hutley, Opt. Acta 29, 993 (1982).
[CrossRef]

Case, S. K.

Enger, R. C.

Gaylord, T. K.

Grann, E. B.

Hane, K.

Hutley, M. C.

S. J. Wilson and M. C. Hutley, Opt. Acta 29, 993 (1982).
[CrossRef]

Johnson, D. W.

D. L. Wood, E. M. Rabinovich, D. W. Johnson, J. B. MacChesney, and E. M. Vogel, J. Am. Ceram. Soc. 66, 693 (1983).
[CrossRef]

Kanamori, Y.

Kikuta, H.

H. Toyota, K. Takahara, M. Okano, T. Yotsuya, and H. Kikuta, in Diffractive Optics and Micro-optics, Vol. 41 of OSA Trends in Optics and Phtonics Series (Optical Society of America, Washington, D.C., 2000), pp. 126–128.

Kimura, Y.

Lalanne, P.

P. Lalanne and G. M. Morris, Nanotechnology 8, 53 (1997).
[CrossRef]

MacChesney, J. B.

D. L. Wood, E. M. Rabinovich, D. W. Johnson, J. B. MacChesney, and E. M. Vogel, J. Am. Ceram. Soc. 66, 693 (1983).
[CrossRef]

Moharam, M. G.

M. G. Moharam, Proc. SPIE 883, 8–11 (1988).
[CrossRef]

Moharan, M. G.

Morris, G. M.

P. Lalanne and G. M. Morris, Nanotechnology 8, 53 (1997).
[CrossRef]

D. H. Raguin and G. M. Morris, Appl. Opt. 32, 1154 (1993).
[CrossRef] [PubMed]

Nishida, N.

Ohta, Y.

Okano, M.

H. Toyota, K. Takahara, M. Okano, T. Yotsuya, and H. Kikuta, in Diffractive Optics and Micro-optics, Vol. 41 of OSA Trends in Optics and Phtonics Series (Optical Society of America, Washington, D.C., 2000), pp. 126–128.

Ono, Y.

Pommet, D. A.

Rabinovich, E. M.

D. L. Wood, E. M. Rabinovich, D. W. Johnson, J. B. MacChesney, and E. M. Vogel, J. Am. Ceram. Soc. 66, 693 (1983).
[CrossRef]

Raguin, D. H.

Sasaki, M.

Takahara, K.

H. Toyota, K. Takahara, M. Okano, T. Yotsuya, and H. Kikuta, in Diffractive Optics and Micro-optics, Vol. 41 of OSA Trends in Optics and Phtonics Series (Optical Society of America, Washington, D.C., 2000), pp. 126–128.

Toyota, H.

H. Toyota, K. Takahara, M. Okano, T. Yotsuya, and H. Kikuta, in Diffractive Optics and Micro-optics, Vol. 41 of OSA Trends in Optics and Phtonics Series (Optical Society of America, Washington, D.C., 2000), pp. 126–128.

Vogel, E. M.

D. L. Wood, E. M. Rabinovich, D. W. Johnson, J. B. MacChesney, and E. M. Vogel, J. Am. Ceram. Soc. 66, 693 (1983).
[CrossRef]

Wilson, S. J.

S. J. Wilson and M. C. Hutley, Opt. Acta 29, 993 (1982).
[CrossRef]

Wood, D. L.

D. L. Wood, E. M. Rabinovich, D. W. Johnson, J. B. MacChesney, and E. M. Vogel, J. Am. Ceram. Soc. 66, 693 (1983).
[CrossRef]

Yotsuya, T.

H. Toyota, K. Takahara, M. Okano, T. Yotsuya, and H. Kikuta, in Diffractive Optics and Micro-optics, Vol. 41 of OSA Trends in Optics and Phtonics Series (Optical Society of America, Washington, D.C., 2000), pp. 126–128.

Appl. Opt. (3)

J. Am. Ceram. Soc. (1)

D. L. Wood, E. M. Rabinovich, D. W. Johnson, J. B. MacChesney, and E. M. Vogel, J. Am. Ceram. Soc. 66, 693 (1983).
[CrossRef]

J. Opt. Soc. Am. A (2)

Nanotechnology (1)

P. Lalanne and G. M. Morris, Nanotechnology 8, 53 (1997).
[CrossRef]

Opt. Acta (1)

S. J. Wilson and M. C. Hutley, Opt. Acta 29, 993 (1982).
[CrossRef]

Opt. Lett. (1)

Proc. SPIE (1)

M. G. Moharam, Proc. SPIE 883, 8–11 (1988).
[CrossRef]

Other (1)

H. Toyota, K. Takahara, M. Okano, T. Yotsuya, and H. Kikuta, in Diffractive Optics and Micro-optics, Vol. 41 of OSA Trends in Optics and Phtonics Series (Optical Society of America, Washington, D.C., 2000), pp. 126–128.

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Figures (3)

Fig. 1
Fig. 1

Etching rate versus CF4 flow rate for F2-doped SiO2 films.

Fig. 2
Fig. 2

Scanning-electron microscope photographs of the fabricated structures (a) before, (b) during, and (c) after wet etching.

Fig. 3
Fig. 3

Transmittance spectra of 1-mm-thick SiO2 samples. The curves that correspond to the spectra of the fabricated structures before and after the wet etching are shown. Curves for the spectrum of a SiO2 substrate with flat surface and for the spectrum of the theoretically estimated value of the fabricated structure are also shown.

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