Abstract

Direct-write laser micromachining of diamond on a submicrometer scale with a near-field scanning optical microscope with an uncoated tapered fiber tip has been demonstrated. Micromachined structures can be imaged in situ immediately after modification of the sample. An early stage of the ablation process, which is believed to be conversion of diamond into graphite, has been visualized.

© 2001 Optical Society of America

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References

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  1. T. Shibata, New Diamond Frontier Carbon Technol. 10, 161 (2000).
  2. J. K. Park, V. M. Ayres, J. Asmussen, and K. Mukherjee, Diamond Relat. Mater. 9, 1154 (2000).
    [CrossRef]
  3. P. E. Russell, T. J. Stark, D. P. Griffis, J. R. Phillips, and K. F. Jarausch, J. Vac. Sci. Technol. B 16, 2494 (1998).
    [CrossRef]
  4. Y. Sakamoto, M. Takaya, H. Sugimura, O. Takai, and N. Nakagiri, Appl. Phys. Lett. 73, 1913 (1998).
    [CrossRef]
  5. D. W. Pohl and D. Courjon, eds., Near-Field Optics (Kluwer, Dordrecht, The Netherlands, 1993).
    [CrossRef]
  6. I. I. Smolyaninov, D. L. Mazzoni, and C. C. Davis, Appl. Phys. Lett. 67, 3859 (1995).
    [CrossRef]

2000 (2)

T. Shibata, New Diamond Frontier Carbon Technol. 10, 161 (2000).

J. K. Park, V. M. Ayres, J. Asmussen, and K. Mukherjee, Diamond Relat. Mater. 9, 1154 (2000).
[CrossRef]

1998 (2)

P. E. Russell, T. J. Stark, D. P. Griffis, J. R. Phillips, and K. F. Jarausch, J. Vac. Sci. Technol. B 16, 2494 (1998).
[CrossRef]

Y. Sakamoto, M. Takaya, H. Sugimura, O. Takai, and N. Nakagiri, Appl. Phys. Lett. 73, 1913 (1998).
[CrossRef]

1995 (1)

I. I. Smolyaninov, D. L. Mazzoni, and C. C. Davis, Appl. Phys. Lett. 67, 3859 (1995).
[CrossRef]

Asmussen, J.

J. K. Park, V. M. Ayres, J. Asmussen, and K. Mukherjee, Diamond Relat. Mater. 9, 1154 (2000).
[CrossRef]

Ayres, V. M.

J. K. Park, V. M. Ayres, J. Asmussen, and K. Mukherjee, Diamond Relat. Mater. 9, 1154 (2000).
[CrossRef]

Davis, C. C.

I. I. Smolyaninov, D. L. Mazzoni, and C. C. Davis, Appl. Phys. Lett. 67, 3859 (1995).
[CrossRef]

Griffis, D. P.

P. E. Russell, T. J. Stark, D. P. Griffis, J. R. Phillips, and K. F. Jarausch, J. Vac. Sci. Technol. B 16, 2494 (1998).
[CrossRef]

Jarausch, K. F.

P. E. Russell, T. J. Stark, D. P. Griffis, J. R. Phillips, and K. F. Jarausch, J. Vac. Sci. Technol. B 16, 2494 (1998).
[CrossRef]

Mazzoni, D. L.

I. I. Smolyaninov, D. L. Mazzoni, and C. C. Davis, Appl. Phys. Lett. 67, 3859 (1995).
[CrossRef]

Mukherjee, K.

J. K. Park, V. M. Ayres, J. Asmussen, and K. Mukherjee, Diamond Relat. Mater. 9, 1154 (2000).
[CrossRef]

Nakagiri, N.

Y. Sakamoto, M. Takaya, H. Sugimura, O. Takai, and N. Nakagiri, Appl. Phys. Lett. 73, 1913 (1998).
[CrossRef]

Park, J. K.

J. K. Park, V. M. Ayres, J. Asmussen, and K. Mukherjee, Diamond Relat. Mater. 9, 1154 (2000).
[CrossRef]

Phillips, J. R.

P. E. Russell, T. J. Stark, D. P. Griffis, J. R. Phillips, and K. F. Jarausch, J. Vac. Sci. Technol. B 16, 2494 (1998).
[CrossRef]

Russell, P. E.

P. E. Russell, T. J. Stark, D. P. Griffis, J. R. Phillips, and K. F. Jarausch, J. Vac. Sci. Technol. B 16, 2494 (1998).
[CrossRef]

Sakamoto, Y.

Y. Sakamoto, M. Takaya, H. Sugimura, O. Takai, and N. Nakagiri, Appl. Phys. Lett. 73, 1913 (1998).
[CrossRef]

Shibata, T.

T. Shibata, New Diamond Frontier Carbon Technol. 10, 161 (2000).

Smolyaninov, I. I.

I. I. Smolyaninov, D. L. Mazzoni, and C. C. Davis, Appl. Phys. Lett. 67, 3859 (1995).
[CrossRef]

Stark, T. J.

P. E. Russell, T. J. Stark, D. P. Griffis, J. R. Phillips, and K. F. Jarausch, J. Vac. Sci. Technol. B 16, 2494 (1998).
[CrossRef]

Sugimura, H.

Y. Sakamoto, M. Takaya, H. Sugimura, O. Takai, and N. Nakagiri, Appl. Phys. Lett. 73, 1913 (1998).
[CrossRef]

Takai, O.

Y. Sakamoto, M. Takaya, H. Sugimura, O. Takai, and N. Nakagiri, Appl. Phys. Lett. 73, 1913 (1998).
[CrossRef]

Takaya, M.

Y. Sakamoto, M. Takaya, H. Sugimura, O. Takai, and N. Nakagiri, Appl. Phys. Lett. 73, 1913 (1998).
[CrossRef]

Appl. Phys. Lett. (2)

Y. Sakamoto, M. Takaya, H. Sugimura, O. Takai, and N. Nakagiri, Appl. Phys. Lett. 73, 1913 (1998).
[CrossRef]

I. I. Smolyaninov, D. L. Mazzoni, and C. C. Davis, Appl. Phys. Lett. 67, 3859 (1995).
[CrossRef]

Diamond Relat. Mater. (1)

J. K. Park, V. M. Ayres, J. Asmussen, and K. Mukherjee, Diamond Relat. Mater. 9, 1154 (2000).
[CrossRef]

J. Vac. Sci. Technol. B (1)

P. E. Russell, T. J. Stark, D. P. Griffis, J. R. Phillips, and K. F. Jarausch, J. Vac. Sci. Technol. B 16, 2494 (1998).
[CrossRef]

New Diamond Frontier Carbon Technol. (1)

T. Shibata, New Diamond Frontier Carbon Technol. 10, 161 (2000).

Other (1)

D. W. Pohl and D. Courjon, eds., Near-Field Optics (Kluwer, Dordrecht, The Netherlands, 1993).
[CrossRef]

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Figures (4)

Fig. 1
Fig. 1

Surface of a diamond sample (a) before and (b) after application of ten laser pulses in the center of the imaged area.

Fig. 2
Fig. 2

(a) Linear and (b) square patterns directly written on the diamond surface. (c) Optical transmission image at 633  nm measured simultaneously with (b) indicates diamond conversion into graphite within the irradiated area.

Fig. 3
Fig. 3

Surface of a diamond sample (a) before and (b) after application of two laser pulses in the center of the imaged area. A small protrusion that appeared as a result of irradiation at an attenuated laser power indicates an initial local volume increase of irradiated material, which may be explained as local conversion of diamond into graphite.

Fig. 4
Fig. 4

Peak intensity under the uncoated tapered fiber tip as a function of fiber-tip radius, assuming that 1  mJ of the 20-ns optical pulse of a 1060-nm Nd:YAG laser is coupled into the fiber (the real coupling in the experiment was substantially lower).

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