Abstract

Alloy–ceramic oxide multilayers of Ni80Nb20MgO with 3.56-nm period have been made by use of the pulsed-laser deposition technique and characterized by means of grazing-incidence x-ray reflectivity. The interface roughness was found to be only 0.35 nm at the two interfaces, Ni80Nb20MgO and MgONi80Nb20, leading to a peak reflectivity of 38% at the first order. The atomic structure in the two individual layers, Ni80Nb20 and MgO, is found to be amorphous, in agreement with the deposition conditions. These multilayers can be used as mirrors for soft x rays in the angular range 18° to 39°, depending on the actual wavelength of radiation in the water-window region.

© 2001 Optical Society of America

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