Abstract

We have built a 1000μm-diameter silicon nitride deformable mirror for focus-control applications, using micro-optoelectromechanical systems technology. We achieved variable focal lengths from 36 to 360  mm while maintaining zero primary spherical aberration, using a maximum control voltage of 100  V. Active control of spherical aberration of approximately two waves at 660  nm was demonstrated.

© 2001 Optical Society of America

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