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Compact 3-dB tapered multimode interference coupler in silicon-on-insulator

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Abstract

We have fabricated a compact 3-dB multimode interference coupler with a large silicon-on-insulator cross section. To reduce the length of the usual symmetric interference multimode interference coupler, we propose using a parabolically tapered structure. The length of the device is 398 μm. The device has a uniformity of 0.28 dB.

© 2001 Optical Society of America

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