Abstract
A scanning homodyne Michelson interferometer is constructed for two-dimensional imaging of high-frequency surface acoustic wave (SAW) fields in SAW devices. The interferometer possesses a sensitivity of , and it is capable of directly measuring SAW’s with frequencies ranging from 0.5 MHz up to 1 GHz. The fast scheme used for locating the optimum operation point of the interferometer facilitates high measuring speeds, up to 50,000 points/h. The measured field image has a lateral resolution of better than . The fully optical noninvasive scanning system can be applied to SAW device development and research, providing information on acoustic wave distribution that cannot be obtained by merely electrical measurements.
© 2000 Optical Society of America
Full Article | PDF ArticleMore Like This
Christophe Gorecki, Franck Chollet, Eric Bonnotte, and Hideki Kawakatsu
Opt. Lett. 22(23) 1784-1786 (1997)
Yonghua Zhao, Zhongping Chen, Christopher Saxer, Shaohua Xiang, Johannes F. de Boer, and J. Stuart Nelson
Opt. Lett. 25(2) 114-116 (2000)
Takashi Fukano and Ichirou Yamaguchi
Opt. Lett. 25(8) 548-550 (2000)