Abstract

A model has been developed that predicts the effective optical path through a thick, refractive specimen on a reflective substrate, as measured with a scanning confocal interference microscope equipped with a high-numerical-aperture objective. Assuming that the effective pinhole of the confocal microscope has an infinitesimal diameter, only one ray in the illumination bundle (the magic ray) contributes to the differential optical path length (OPL). A pinhole with finite diameter, however, allows rays within a small angular cone centered on the magic ray to contribute to the OPL. The model was incorporated into an iterative algorithm that allows the measured phase to be corrected for refractive errors by use of an a priori estimate of the sample profile. The algorithm was validated with a reflected-light microscope equipped with a phase-shifting laser-feedback interferometer to measure the interface shape and the 68° contact angle of a silicone-oil drop on a coated silicon wafer.

© 2000 Optical Society of America

Full Article  |  PDF Article

Errata

David G. Fischer and Ben Ovryn, "Interfacial shape and contact-angle measurement of transparent samples with confocal interference microscopy: a publisher’s erratum," Opt. Lett. 25, 862-862 (2000)
https://www.osapublishing.org/ol/abstract.cfm?uri=ol-25-11-862

References

You do not have subscription access to this journal. Citation lists with outbound citation links are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription

Cited By

You do not have subscription access to this journal. Cited by links are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription

Figures (4)

You do not have subscription access to this journal. Figure files are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription

Equations (2)

You do not have subscription access to this journal. Equations are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription

Metrics

You do not have subscription access to this journal. Article level metrics are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription