Abstract

Phase perturbations in the object plane of a partially coherent imaging system are found to produce artifacts in the aerial image. It is demonstrated that phase perturbations of as little as λ/30 rms can produce visible deformation in the final image for modest coherence factors, such as σc=0.4. A combination of simulation and experiment is used to demonstrate the effects. Application to line-edge roughness in lithography is described.

© 2000 Optical Society of America

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