Abstract

We designed, fabricated, and characterized a binary diffractive lens with features less than 60 nm. The lens was designed for operation in the red portion of the spectrum. Experimental measurements of lens performance agree with predictions generated by rigorous models of diffraction.

© 2000 Optical Society of America

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References

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1999

1998

1996

1995

1994

P. Kipfer, M. Collischon, H. Haidner, J. T. Sheridan, J. Schwider, N. Streibl, and J. Lindolf, Opt. Eng. 33, 79 (1994).
[CrossRef]

Astilean, S.

Bengtsson, J.

H. Martinsson, J. Bengtsson, M. Ghisoni, and A. Larsson, IEEE Photon. Technol. Lett. 11, 503 (1999).
[CrossRef]

Cambril, E.

Chavel, P.

Chen, F. T.

Collischon, M.

P. Kipfer, M. Collischon, H. Haidner, J. T. Sheridan, J. Schwider, N. Streibl, and J. Lindolf, Opt. Eng. 33, 79 (1994).
[CrossRef]

J. N. Mait, D. W. Prather, Ph. Lalanne, and M. Collischon, in Diffractive Optics, Vol. 22 of European Optical Society Topical Meetings Digest Series (European Optical Society, Jena, Germany, 1999), pp. 32–33.

Craighead, H. G.

de Beaucoudrey, N.

Drabik, T. J.

Ghisoni, M.

H. Martinsson, J. Bengtsson, M. Ghisoni, and A. Larsson, IEEE Photon. Technol. Lett. 11, 503 (1999).
[CrossRef]

Haidner, H.

P. Kipfer, M. Collischon, H. Haidner, J. T. Sheridan, J. Schwider, N. Streibl, and J. Lindolf, Opt. Eng. 33, 79 (1994).
[CrossRef]

Kipfer, P.

P. Kipfer, M. Collischon, H. Haidner, J. T. Sheridan, J. Schwider, N. Streibl, and J. Lindolf, Opt. Eng. 33, 79 (1994).
[CrossRef]

Lalanne, Ph.

Ph. Lalanne, S. Astilean, P. Chavel, E. Cambril, and H. Launois, J. Opt. Soc. Am. A 16, 1143 (1999).
[CrossRef]

Ph. Lalanne, S. Astilean, P. Chavel, E. Cambril, and H. Launois, Opt. Lett. 23, 1081 (1998).
[CrossRef]

S. Astilean, Ph. Lalanne, P. Chavel, E. Cambril, and H. Launois, Opt. Lett. 23, 552 (1998).
[CrossRef]

J. N. Mait, D. W. Prather, Ph. Lalanne, and M. Collischon, in Diffractive Optics, Vol. 22 of European Optical Society Topical Meetings Digest Series (European Optical Society, Jena, Germany, 1999), pp. 32–33.

Larsson, A.

H. Martinsson, J. Bengtsson, M. Ghisoni, and A. Larsson, IEEE Photon. Technol. Lett. 11, 503 (1999).
[CrossRef]

Launois, H.

Lindolf, J.

P. Kipfer, M. Collischon, H. Haidner, J. T. Sheridan, J. Schwider, N. Streibl, and J. Lindolf, Opt. Eng. 33, 79 (1994).
[CrossRef]

Mait, J. N.

J. N. Mait, D. W. Prather, and M. S. Mirotznik, Opt. Lett. 23, 1343 (1998).
[CrossRef]

J. N. Mait, D. W. Prather, Ph. Lalanne, and M. Collischon, in Diffractive Optics, Vol. 22 of European Optical Society Topical Meetings Digest Series (European Optical Society, Jena, Germany, 1999), pp. 32–33.

Martinsson, H.

H. Martinsson, J. Bengtsson, M. Ghisoni, and A. Larsson, IEEE Photon. Technol. Lett. 11, 503 (1999).
[CrossRef]

Miller, J. M.

Mirotznik, M. S.

Prather, D. W.

D. W. Prather and S. Shi, J. Opt. Soc. Am. A 16, 1131 (1999).
[CrossRef]

J. N. Mait, D. W. Prather, and M. S. Mirotznik, Opt. Lett. 23, 1343 (1998).
[CrossRef]

J. N. Mait, D. W. Prather, Ph. Lalanne, and M. Collischon, in Diffractive Optics, Vol. 22 of European Optical Society Topical Meetings Digest Series (European Optical Society, Jena, Germany, 1999), pp. 32–33.

Schwider, J.

P. Kipfer, M. Collischon, H. Haidner, J. T. Sheridan, J. Schwider, N. Streibl, and J. Lindolf, Opt. Eng. 33, 79 (1994).
[CrossRef]

Sheridan, J. T.

P. Kipfer, M. Collischon, H. Haidner, J. T. Sheridan, J. Schwider, N. Streibl, and J. Lindolf, Opt. Eng. 33, 79 (1994).
[CrossRef]

Shi, S.

Smith, R. E.

Streibl, N.

P. Kipfer, M. Collischon, H. Haidner, J. T. Sheridan, J. Schwider, N. Streibl, and J. Lindolf, Opt. Eng. 33, 79 (1994).
[CrossRef]

Vawter, G. A.

Warren, M. E.

Wendt, J. R.

Zhou, Z.

IEEE Photon. Technol. Lett.

H. Martinsson, J. Bengtsson, M. Ghisoni, and A. Larsson, IEEE Photon. Technol. Lett. 11, 503 (1999).
[CrossRef]

J. Opt. Soc. Am. A

Opt. Eng.

P. Kipfer, M. Collischon, H. Haidner, J. T. Sheridan, J. Schwider, N. Streibl, and J. Lindolf, Opt. Eng. 33, 79 (1994).
[CrossRef]

Opt. Lett.

Other

J. N. Mait, D. W. Prather, Ph. Lalanne, and M. Collischon, in Diffractive Optics, Vol. 22 of European Optical Society Topical Meetings Digest Series (European Optical Society, Jena, Germany, 1999), pp. 32–33.

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Figures (3)

Fig. 1
Fig. 1

Depth profile of axisymmetric binary subwavelength lens in radial cross section. 2π-continuous-phase lens and limited-phase lenses used to obtain the binary profile (dashed line) are also shown (heavy solid line).

Fig. 2
Fig. 2

Etched subwavelength lens taken by scanning electron microscope. The desired binary profile is shown for comparison.

Fig. 3
Fig. 3

Line scans of simulated and experimentally measured intensity responses at a plane 65 µm from lens.

Equations (3)

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neffx=ns-n0θxθ0+n0,
θ0=2πdns-n0λ,
tx=dm=- rectx-mΔ-gmΔ/2gmΔ,

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