Abstract

Computations with the rigorous differential method show that single gratings made by ion implantation have a diffraction efficiency in the +1 transmitted order under TE illumination of only 0.78%. The insertion of such gratings into multilayer dielectric Fabry–Perot cavities leads to an enhancement of the free-space diffraction efficiency. Different designs for the multilayer are considered. An 18.8% efficiency is reached with 11-layer mirrors. This result is obtained by optimization of the thickness of the spacer of the Fabry–Perot cavity that contains the grating and centering of the wavelength of the mirrors. The dependence of optical properties of the structure on the various optogeometrical parameters of the structure is discussed.

© 2000 Optical Society of America

Full Article  |  PDF Article
OSA Recommended Articles
Fabry–Perot multilayers for enhancing the diffraction efficiency of ion-implanted gratings

Ludovic Escoubas, François Flory, Fabien Lemarchand, Emmanuel Drouard, Laurent Roux, Stéphane Tisserand, and Gérard Albrand
Appl. Opt. 40(10) 1587-1592 (2001)

High-efficiency x-ray gratings with asymmetric-cut multilayers

Saša Bajt, Henry N. Chapman, Andrew Aquila, and Eric Gullikson
J. Opt. Soc. Am. A 29(3) 216-230 (2012)

High-efficiency dielectric reflection gratings: design, fabrication, and analysis

Karl Hehl, Joerg Bischoff, Ullrich Mohaupt, Martin Palme, Bernd Schnabel, Lutz Wenke, Ragnar Bödefeld, Wolfgang Theobald, Eberhard Welsch, Roland Sauerbrey, and Hartmut Heyer
Appl. Opt. 38(30) 6257-6271 (1999)

References

You do not have subscription access to this journal. Citation lists with outbound citation links are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription

Cited By

You do not have subscription access to this journal. Cited by links are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription

Figures (4)

You do not have subscription access to this journal. Figure files are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription

Tables (1)

You do not have subscription access to this journal. Article tables are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription

Metrics

You do not have subscription access to this journal. Article level metrics are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription