Abstract

A multichannel ellipsometer in the dual-rotating-compensator configuration has been developed for potential applications in real-time Mueller matrix spectroscopy of anisotropic surfaces and films. This instrument provides spectra (1.7–5.3 eV) in all 16 elements of the unnormalized Mueller matrix M of a film–substrate system with a minimum overall data acquisition time of ta=0.25 s. We have applied this instrument first for high-precision determination of spectra in M with ta=2.5 s for a microscopically sculptured film.

© 2000 Optical Society of America

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References

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    [CrossRef]
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    [CrossRef]
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    [CrossRef]
  10. Low-cogging hollow shaft rotary motor system, Airex Corporation, Dover, N.H. 03820.
  11. PDA-1024 spectrometric detector, Princeton Instruments, Inc., Princeton, N.J. 08619.
  12. CP-140 imaging spectrograph, Instruments S. A., Inc., Edison, N.J. 08820.
  13. PMR8M-2° MgF2 polarizer, Halbo Optics, Chelmsford CM3 5ZA, UK.
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    [CrossRef]

1999 (1)

1998 (1)

J. Lee, P. I. Rovira, I. An, and R. W. Collins, Rev. Sci. Instrum. 69, 1800 (1998).
[CrossRef]

1997 (1)

P. I. Rovira, R. A. Yarussi, R. W. Collins, R. Messier, V. C. Venugopal, A. Lakhtakia, K. Robbie, and M. J. Brett, Appl. Phys. Lett. 71, 1180 (1997).
[CrossRef]

1992 (1)

1990 (1)

R. W. Collins, Rev. Sci. Instrum. 61, 2029 (1990).
[CrossRef]

1985 (1)

J. Gil and E. Bernabeu, Opt. Acta 32, 259 (1985).
[CrossRef]

1978 (1)

1957 (1)

1954 (1)

An, I.

J. Lee, P. I. Rovira, I. An, and R. W. Collins, Rev. Sci. Instrum. 69, 1800 (1998).
[CrossRef]

Azzam, R. M. A.

Bernabeu, E.

J. Gil and E. Bernabeu, Opt. Acta 32, 259 (1985).
[CrossRef]

Brett, M. J.

P. I. Rovira, R. A. Yarussi, R. W. Collins, R. Messier, V. C. Venugopal, A. Lakhtakia, K. Robbie, and M. J. Brett, Appl. Phys. Lett. 71, 1180 (1997).
[CrossRef]

Collins, R. W.

R. W. Collins and J. Koh, J. Opt. Soc. Am. A 16, 1997 (1999).
[CrossRef]

J. Lee, P. I. Rovira, I. An, and R. W. Collins, Rev. Sci. Instrum. 69, 1800 (1998).
[CrossRef]

P. I. Rovira, R. A. Yarussi, R. W. Collins, R. Messier, V. C. Venugopal, A. Lakhtakia, K. Robbie, and M. J. Brett, Appl. Phys. Lett. 71, 1180 (1997).
[CrossRef]

R. W. Collins, Rev. Sci. Instrum. 61, 2029 (1990).
[CrossRef]

Conn, G. K. T.

Eaton, G. K.

Gil, J.

J. Gil and E. Bernabeu, Opt. Acta 32, 259 (1985).
[CrossRef]

Goldstein, D. H.

Koh, J.

Lakhtakia, A.

P. I. Rovira, R. A. Yarussi, R. W. Collins, R. Messier, V. C. Venugopal, A. Lakhtakia, K. Robbie, and M. J. Brett, Appl. Phys. Lett. 71, 1180 (1997).
[CrossRef]

Lee, J.

J. Lee, P. I. Rovira, I. An, and R. W. Collins, Rev. Sci. Instrum. 69, 1800 (1998).
[CrossRef]

Messier, R.

P. I. Rovira, R. A. Yarussi, R. W. Collins, R. Messier, V. C. Venugopal, A. Lakhtakia, K. Robbie, and M. J. Brett, Appl. Phys. Lett. 71, 1180 (1997).
[CrossRef]

Robbie, K.

P. I. Rovira, R. A. Yarussi, R. W. Collins, R. Messier, V. C. Venugopal, A. Lakhtakia, K. Robbie, and M. J. Brett, Appl. Phys. Lett. 71, 1180 (1997).
[CrossRef]

Rovira, P. I.

J. Lee, P. I. Rovira, I. An, and R. W. Collins, Rev. Sci. Instrum. 69, 1800 (1998).
[CrossRef]

P. I. Rovira, R. A. Yarussi, R. W. Collins, R. Messier, V. C. Venugopal, A. Lakhtakia, K. Robbie, and M. J. Brett, Appl. Phys. Lett. 71, 1180 (1997).
[CrossRef]

Sekera, Z.

Venugopal, V. C.

P. I. Rovira, R. A. Yarussi, R. W. Collins, R. Messier, V. C. Venugopal, A. Lakhtakia, K. Robbie, and M. J. Brett, Appl. Phys. Lett. 71, 1180 (1997).
[CrossRef]

Yarussi, R. A.

P. I. Rovira, R. A. Yarussi, R. W. Collins, R. Messier, V. C. Venugopal, A. Lakhtakia, K. Robbie, and M. J. Brett, Appl. Phys. Lett. 71, 1180 (1997).
[CrossRef]

Appl. Opt. (1)

Appl. Phys. Lett. (1)

P. I. Rovira, R. A. Yarussi, R. W. Collins, R. Messier, V. C. Venugopal, A. Lakhtakia, K. Robbie, and M. J. Brett, Appl. Phys. Lett. 71, 1180 (1997).
[CrossRef]

J. Opt. Soc. Am. (2)

J. Opt. Soc. Am. A (1)

Opt. Acta (1)

J. Gil and E. Bernabeu, Opt. Acta 32, 259 (1985).
[CrossRef]

Opt. Lett. (1)

Rev. Sci. Instrum. (2)

J. Lee, P. I. Rovira, I. An, and R. W. Collins, Rev. Sci. Instrum. 69, 1800 (1998).
[CrossRef]

R. W. Collins, Rev. Sci. Instrum. 61, 2029 (1990).
[CrossRef]

Other (6)

R. W. Collins, D. E. Aspnes, and E. A. Irene, eds., Proceedings of the Second International Conference on Spectroscopic Ellipsometry (Elsevier, Amsterdam, 1998), also published as Thin Solid Films 313-314, (1998).

Low-cogging hollow shaft rotary motor system, Airex Corporation, Dover, N.H. 03820.

PDA-1024 spectrometric detector, Princeton Instruments, Inc., Princeton, N.J. 08619.

CP-140 imaging spectrograph, Instruments S. A., Inc., Edison, N.J. 08820.

PMR8M-2° MgF2 polarizer, Halbo Optics, Chelmsford CM3 5ZA, UK.

RZ-1/4-350-M MgF2 biplate compensator, Optics for Research, Caldwell, N.J. 07006.

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Figures (4)

Fig. 1
Fig. 1

Simplified schematic of the dual-rotating-compensator ellipsometer in the reflection mode.

Fig. 2
Fig. 2

Spectra (each with 170 data values) for 7 selected normalized Mueller matrix elements measured straight through without a sample. The values in parentheses have been added to the data for clarity. The values at the left represent the spectral average and standard deviation. The total data-acquisition time was 2.5 s.

Fig. 3
Fig. 3

Spectra (each with 81 data values) for the 15 normalized Mueller matrix elements measured in transmission for a 4.7µm-thick anisotropic MgF2 helicoidal STF. The values in parentheses have been added to the data. The total data-acquisition time was 2.5 s.

Fig. 4
Fig. 4

(a) Trace condition on the normalized Mueller matrix m in the absence of a sample and for the STF of Fig. 3. (b) Transmittance of the STF for unpolarized light and for left and right circularly polarized light (left-hand scale) calculated from M=M11m. Also shown is the difference between the transmittance for left and right circularly polarized light (right-hand scale).

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