Abstract

A multichannel ellipsometer in the dual-rotating-compensator configuration has been developed for potential applications in real-time Mueller matrix spectroscopy of anisotropic surfaces and films. This instrument provides spectra (1.7–5.3 eV) in all 16 elements of the unnormalized Mueller matrix M of a film–substrate system with a minimum overall data acquisition time of ta=0.25 s. We have applied this instrument first for high-precision determination of spectra in M with ta=2.5 s for a microscopically sculptured film.

© 2000 Optical Society of America

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