Abstract

A novel interference microscope for three-dimensional (3D) imaging based on a wavelength-to-depth encoding technique is presented. Wavelength-to-depth encoding is realized by use of a diffractive lens and wavelength tuning. A high depth resolution of 0.71 µm is obtained with 0.90-N.A. objective lenses. Experimental measurements of a four-level grating are presented, and the results are found to be comparable with those obtained with a Dektak profilometer and a similar interference microscope that uses mechanical depth scanning. The system is promising for fast, noncontact, high-resolution 3D imaging.

© 2000 Optical Society of America

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References

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G. Barbastathis, M. Balberg, and D. J. Brady, Opt. Lett. 24, 813 (1999).

A. Dubois, A. C. Boccara, and M. Lebec, Opt. Lett. 24, 309 (1999).
[CrossRef]

1998 (2)

F. Delorme, G. Alibert, C. Ougier, S. Slempkes, and H. Nakajima, Electron. Lett. 34, 279 (1998).
[CrossRef]

F. C. Chang and G. Kino, Appl. Opt. 37, 3471 (1998).
[CrossRef]

1997 (1)

1995 (1)

1994 (1)

M. Gu and C. J. R. Sheppard, J. Opt. Soc. Am. A 11, 1615 (1994).

1993 (1)

1992 (1)

1990 (2)

1987 (1)

M. Davidson, K. Kaufman, I. Mazor, and F. Cohen, Proc. SPIE 775, 233 (1987).
[CrossRef]

Alibert, G.

F. Delorme, G. Alibert, C. Ougier, S. Slempkes, and H. Nakajima, Electron. Lett. 34, 279 (1998).
[CrossRef]

Arons, E.

Balberg, M.

G. Barbastathis, M. Balberg, and D. J. Brady, Opt. Lett. 24, 813 (1999).

Barbastathis, G.

G. Barbastathis, M. Balberg, and D. J. Brady, Opt. Lett. 24, 813 (1999).

Boccara, A. C.

Brady, D. J.

G. Barbastathis, M. Balberg, and D. J. Brady, Opt. Lett. 24, 813 (1999).

Caber, P. J.

Chang, F. C.

Chim, S.

Cohen, F.

M. Davidson, K. Kaufman, I. Mazor, and F. Cohen, Proc. SPIE 775, 233 (1987).
[CrossRef]

Davidson, M.

M. Davidson, K. Kaufman, I. Mazor, and F. Cohen, Proc. SPIE 775, 233 (1987).
[CrossRef]

Delorme, F.

F. Delorme, G. Alibert, C. Ougier, S. Slempkes, and H. Nakajima, Electron. Lett. 34, 279 (1998).
[CrossRef]

Dobson, S.

Dresel, T.

Dubois, A.

Fainman, Y.

Goodman, J. W.

J. W. Goodman, Introduction to Fourier Optics (McGraw-Hill, New York, 1996), Chaps. 5 and 6.

Gu, M.

M. Gu and C. J. R. Sheppard, J. Opt. Soc. Am. A 11, 1615 (1994).

Hausler, G.

Kaufman, K.

M. Davidson, K. Kaufman, I. Mazor, and F. Cohen, Proc. SPIE 775, 233 (1987).
[CrossRef]

Kino, G.

Lebec, M.

Lee, B. S.

Mandel, L.

L. Mandel and E. Wolf, Optical Coherence and Quantum Optics (Cambridge U. Press, New York, 1995), Chap. 4.
[CrossRef]

Mazor, I.

M. Davidson, K. Kaufman, I. Mazor, and F. Cohen, Proc. SPIE 775, 233 (1987).
[CrossRef]

Nakajima, H.

F. Delorme, G. Alibert, C. Ougier, S. Slempkes, and H. Nakajima, Electron. Lett. 34, 279 (1998).
[CrossRef]

Ougier, C.

F. Delorme, G. Alibert, C. Ougier, S. Slempkes, and H. Nakajima, Electron. Lett. 34, 279 (1998).
[CrossRef]

Sheppard, C. J. R.

M. Gu and C. J. R. Sheppard, J. Opt. Soc. Am. A 11, 1615 (1994).

Slempkes, S.

F. Delorme, G. Alibert, C. Ougier, S. Slempkes, and H. Nakajima, Electron. Lett. 34, 279 (1998).
[CrossRef]

Strand, T.

Sun, P. C.

Venzke, H.

Wolf, E.

L. Mandel and E. Wolf, Optical Coherence and Quantum Optics (Cambridge U. Press, New York, 1995), Chap. 4.
[CrossRef]

Appl. Opt. (7)

Electron. Lett. (1)

F. Delorme, G. Alibert, C. Ougier, S. Slempkes, and H. Nakajima, Electron. Lett. 34, 279 (1998).
[CrossRef]

J. Opt. Soc. Am. A (1)

M. Gu and C. J. R. Sheppard, J. Opt. Soc. Am. A 11, 1615 (1994).

Opt. Lett. (2)

G. Barbastathis, M. Balberg, and D. J. Brady, Opt. Lett. 24, 813 (1999).

A. Dubois, A. C. Boccara, and M. Lebec, Opt. Lett. 24, 309 (1999).
[CrossRef]

Proc. SPIE (1)

M. Davidson, K. Kaufman, I. Mazor, and F. Cohen, Proc. SPIE 775, 233 (1987).
[CrossRef]

Other (3)

J. W. Goodman, Introduction to Fourier Optics (McGraw-Hill, New York, 1996), Chaps. 5 and 6.

T. Wilson, ed., Confocal Microscopy (Academic, San Diego, Calif., 1990).

L. Mandel and E. Wolf, Optical Coherence and Quantum Optics (Cambridge U. Press, New York, 1995), Chap. 4.
[CrossRef]

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Figures (4)

Fig. 1
Fig. 1

Schematic diagram of the interference microscope using wavelength-to-depth encoding. BS1–BS3, beam splitters; RGG, rotating ground glass. See text for other definitions.

Fig. 2
Fig. 2

Calibration for wavelength-to-depth encoding.

Fig. 3
Fig. 3

Depth-response envelope with wavelength-to-depth scanning.

Fig. 4
Fig. 4

Experimental results for a four-level grating.

Tables (1)

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Table 1 Comparison of Profile Measurements of a Four-Level Grating with a Dektak Profilometer and an Interference Microscope with Two Types of Scanning

Equations (1)

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Δz=f0fc2Δf=-f0fc2fλdλdΔλ.

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