Abstract

A low-coherence reflectometer based on a conventional Michelson interferometer and a novel silicon detector chip that allows parallel heterodyne detection is presented. Cross-sectional images of 64×256 pixels covering an area of 1.92 mm×1.3 mm are acquired at video rate and with a sensitivity close to the shot-noise limit. Applications in surface profiling and thickness measurement are demonstrated.

© 2000 Optical Society of America

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