We developed a deep-UV single-mode coherent light source through two-stage highly efficient frequency conversions by use of external cavities. In the first stage, second-harmonic power of 500 mW was obtained by frequency doubling of a 746-nm Ti:sapphire laser with a conversion efficiency of 40%. In the second stage, 50-mW power at was obtained by doubly resonant sum-frequency mixing of 373-nm light from the first-stage conversion and 780-nm light from a diode laser. The output performance of this deep-UV light source is sufficient for laser cooling of neutral silicon atoms.
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