Abstract

We report a means of fabricating hydrophilic domains in a hydrophobic background by lithographically patterning an adhesive hydrophobic layer. Polymer microlenses were fabricated on these substrates by use of a dip-coating technique. Various lens shapes (circular, elliptical, square) were fabricated on a variety of substrates (SiO2, SiN, GaAs, InP, etc.), ranging in size from 2 to 500 µm in diameter, with fill factors of up to 90%. Plano–convex and double-convex lenses were fabricated, with f-numbers as low as 1.38 and 1.2, respectively. Optimum lens surfaces deviated from spherical by just ±5 nm. The lenses are stable at room temperature and exhibit minimal degradation after 24 h at 105 °C. The transfer of these polymer lenses to an underlying substrate was also demonstrated.

© 2000 Optical Society of America

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References

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  1. W. R. Cox, D. J. Hayes, T. Chen, and D. W. Ussery, Proc. SPIE 2383, 110 (1995).
    [CrossRef]
  2. M. Kurner and S. Kurner, Micro-optics and Lithography (VUB, Brussels, 1997), pp. 81–118.
  3. S. Sinzinger and J. Jahns, Microoptics (Wiley, New York, 1999), Chap. 4, pp. 85–104.
  4. E. Kim and G. M. Whitesides, Chem. Mater. 7, 1257 (1995).
    [CrossRef]
  5. J. L. Wilbur, A. Kurmar, H. Biebuyck, E. Kim, and G. M. Whitesides, Nanotechnology 7, 452 (1996).
    [CrossRef]
  6. H. Biebuyck and G. M. Whitesides, Langmuir 10, 2790 (1994).
    [CrossRef]
  7. S. Amai, Japanese patent04261501 A2 920917.

1996

J. L. Wilbur, A. Kurmar, H. Biebuyck, E. Kim, and G. M. Whitesides, Nanotechnology 7, 452 (1996).
[CrossRef]

1995

W. R. Cox, D. J. Hayes, T. Chen, and D. W. Ussery, Proc. SPIE 2383, 110 (1995).
[CrossRef]

E. Kim and G. M. Whitesides, Chem. Mater. 7, 1257 (1995).
[CrossRef]

1994

H. Biebuyck and G. M. Whitesides, Langmuir 10, 2790 (1994).
[CrossRef]

Amai, S.

S. Amai, Japanese patent04261501 A2 920917.

Biebuyck, H.

J. L. Wilbur, A. Kurmar, H. Biebuyck, E. Kim, and G. M. Whitesides, Nanotechnology 7, 452 (1996).
[CrossRef]

H. Biebuyck and G. M. Whitesides, Langmuir 10, 2790 (1994).
[CrossRef]

Chen, T.

W. R. Cox, D. J. Hayes, T. Chen, and D. W. Ussery, Proc. SPIE 2383, 110 (1995).
[CrossRef]

Cox, W. R.

W. R. Cox, D. J. Hayes, T. Chen, and D. W. Ussery, Proc. SPIE 2383, 110 (1995).
[CrossRef]

Hayes, D. J.

W. R. Cox, D. J. Hayes, T. Chen, and D. W. Ussery, Proc. SPIE 2383, 110 (1995).
[CrossRef]

Jahns, J.

S. Sinzinger and J. Jahns, Microoptics (Wiley, New York, 1999), Chap. 4, pp. 85–104.

Kim, E.

J. L. Wilbur, A. Kurmar, H. Biebuyck, E. Kim, and G. M. Whitesides, Nanotechnology 7, 452 (1996).
[CrossRef]

E. Kim and G. M. Whitesides, Chem. Mater. 7, 1257 (1995).
[CrossRef]

Kurmar, A.

J. L. Wilbur, A. Kurmar, H. Biebuyck, E. Kim, and G. M. Whitesides, Nanotechnology 7, 452 (1996).
[CrossRef]

Kurner, M.

M. Kurner and S. Kurner, Micro-optics and Lithography (VUB, Brussels, 1997), pp. 81–118.

Kurner, S.

M. Kurner and S. Kurner, Micro-optics and Lithography (VUB, Brussels, 1997), pp. 81–118.

Sinzinger, S.

S. Sinzinger and J. Jahns, Microoptics (Wiley, New York, 1999), Chap. 4, pp. 85–104.

Ussery, D. W.

W. R. Cox, D. J. Hayes, T. Chen, and D. W. Ussery, Proc. SPIE 2383, 110 (1995).
[CrossRef]

Whitesides, G. M.

J. L. Wilbur, A. Kurmar, H. Biebuyck, E. Kim, and G. M. Whitesides, Nanotechnology 7, 452 (1996).
[CrossRef]

E. Kim and G. M. Whitesides, Chem. Mater. 7, 1257 (1995).
[CrossRef]

H. Biebuyck and G. M. Whitesides, Langmuir 10, 2790 (1994).
[CrossRef]

Wilbur, J. L.

J. L. Wilbur, A. Kurmar, H. Biebuyck, E. Kim, and G. M. Whitesides, Nanotechnology 7, 452 (1996).
[CrossRef]

Chem. Mater.

E. Kim and G. M. Whitesides, Chem. Mater. 7, 1257 (1995).
[CrossRef]

Langmuir

H. Biebuyck and G. M. Whitesides, Langmuir 10, 2790 (1994).
[CrossRef]

Nanotechnology

J. L. Wilbur, A. Kurmar, H. Biebuyck, E. Kim, and G. M. Whitesides, Nanotechnology 7, 452 (1996).
[CrossRef]

Proc. SPIE

W. R. Cox, D. J. Hayes, T. Chen, and D. W. Ussery, Proc. SPIE 2383, 110 (1995).
[CrossRef]

Other

M. Kurner and S. Kurner, Micro-optics and Lithography (VUB, Brussels, 1997), pp. 81–118.

S. Sinzinger and J. Jahns, Microoptics (Wiley, New York, 1999), Chap. 4, pp. 85–104.

S. Amai, Japanese patent04261501 A2 920917.

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Figures (3)

Fig. 1
Fig. 1

Process flow for hydrophobic patterning.

Fig. 2
Fig. 2

Arrays of circular and square (fill factor, 90%) microlenses fabricated on SiO2 substrates.

Fig. 3
Fig. 3

Left, AFM scan of the surface of a 50µm-diameter lens. Right, deviation from an ideal sphere of the middle 130 µm of a 500µm-diameter lens.

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