Abstract

We report a means of fabricating hydrophilic domains in a hydrophobic background by lithographically patterning an adhesive hydrophobic layer. Polymer microlenses were fabricated on these substrates by use of a dip-coating technique. Various lens shapes (circular, elliptical, square) were fabricated on a variety of substrates (SiO2, SiN, GaAs, InP, etc.), ranging in size from 2 to 500 µm in diameter, with fill factors of up to 90%. Plano–convex and double-convex lenses were fabricated, with f-numbers as low as 1.38 and 1.2, respectively. Optimum lens surfaces deviated from spherical by just ±5 nm. The lenses are stable at room temperature and exhibit minimal degradation after 24 h at 105 °C. The transfer of these polymer lenses to an underlying substrate was also demonstrated.

© 2000 Optical Society of America

Full Article  |  PDF Article
Related Articles
Ultraviolet-cured polymer microlens arrays

Takashi Okamoto, Miwa Mori, Tamae Karasawa, Seiichiro Hayakawa, Iwao Seo, and Heihachi Sato
Appl. Opt. 38(14) 2991-2996 (1999)

Optimization and theoretical modeling of polymer microlens arrays fabricated with the hydrophobic effect

Daniel M. Hartmann, Osman Kibar, and Sadik C. Esener
Appl. Opt. 40(16) 2736-2746 (2001)

Silicon microlens structures fabricated by scanning-probe gray-scale oxidation

C.-F. Chen, S.-D. Tzeng, H.-Y. Chen, and S. Gwo
Opt. Lett. 30(6) 652-654 (2005)

References

You do not have subscription access to this journal. Citation lists with outbound citation links are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription

Cited By

You do not have subscription access to this journal. Cited by links are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription

Figures (3)

You do not have subscription access to this journal. Figure files are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription

Metrics

You do not have subscription access to this journal. Article level metrics are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription