Abstract

The thickness distribution of single-layer thin films is measured with a slit-beam-profile reflectometer. A convergent slit beam generated by a cylindrical lens is projected onto a specimen. A CCD chip with a pixel matrix of 512×480 is used to detect the intensity distribution of the reflected beam, which is passed through another cylindrical lens. By analyzing the picture taken by the CCD, we can obtain information about the angular reflectance at each reflecting point along the slit line, and the thickness or the refractive index at each point can be evaluated by mathematical fitting to a reflectance formula.

© 2000 Optical Society of America

Full Article  |  PDF Article

References

  • View by:
  • |
  • |
  • |

  1. A. Rosencwaig, J. Opsal, D. L. Willenborg, S. M. Kelso, and J. T. Fanton, Appl. Phys. Lett. 60, 1301 (1992).
    [CrossRef]
  2. J. M. Leng, J. J. Sidorowich, M. Senko, and J. Opsal, Thin Solid Films 313-314, 270 (1998).
    [CrossRef]
  3. D. W. Ewak and J. W. Y. Lit, Appl. Opt. 27, 4562 (1988).
    [CrossRef]
  4. J. A. Nelder and R. Mead, Comp. J. 7, 308 (1965).
    [CrossRef]

1998 (1)

J. M. Leng, J. J. Sidorowich, M. Senko, and J. Opsal, Thin Solid Films 313-314, 270 (1998).
[CrossRef]

1992 (1)

A. Rosencwaig, J. Opsal, D. L. Willenborg, S. M. Kelso, and J. T. Fanton, Appl. Phys. Lett. 60, 1301 (1992).
[CrossRef]

1988 (1)

1965 (1)

J. A. Nelder and R. Mead, Comp. J. 7, 308 (1965).
[CrossRef]

Ewak, D. W.

Fanton, J. T.

A. Rosencwaig, J. Opsal, D. L. Willenborg, S. M. Kelso, and J. T. Fanton, Appl. Phys. Lett. 60, 1301 (1992).
[CrossRef]

Kelso, S. M.

A. Rosencwaig, J. Opsal, D. L. Willenborg, S. M. Kelso, and J. T. Fanton, Appl. Phys. Lett. 60, 1301 (1992).
[CrossRef]

Leng, J. M.

J. M. Leng, J. J. Sidorowich, M. Senko, and J. Opsal, Thin Solid Films 313-314, 270 (1998).
[CrossRef]

Lit, J. W. Y.

Mead, R.

J. A. Nelder and R. Mead, Comp. J. 7, 308 (1965).
[CrossRef]

Nelder, J. A.

J. A. Nelder and R. Mead, Comp. J. 7, 308 (1965).
[CrossRef]

Opsal, J.

J. M. Leng, J. J. Sidorowich, M. Senko, and J. Opsal, Thin Solid Films 313-314, 270 (1998).
[CrossRef]

A. Rosencwaig, J. Opsal, D. L. Willenborg, S. M. Kelso, and J. T. Fanton, Appl. Phys. Lett. 60, 1301 (1992).
[CrossRef]

Rosencwaig, A.

A. Rosencwaig, J. Opsal, D. L. Willenborg, S. M. Kelso, and J. T. Fanton, Appl. Phys. Lett. 60, 1301 (1992).
[CrossRef]

Senko, M.

J. M. Leng, J. J. Sidorowich, M. Senko, and J. Opsal, Thin Solid Films 313-314, 270 (1998).
[CrossRef]

Sidorowich, J. J.

J. M. Leng, J. J. Sidorowich, M. Senko, and J. Opsal, Thin Solid Films 313-314, 270 (1998).
[CrossRef]

Willenborg, D. L.

A. Rosencwaig, J. Opsal, D. L. Willenborg, S. M. Kelso, and J. T. Fanton, Appl. Phys. Lett. 60, 1301 (1992).
[CrossRef]

Appl. Opt. (1)

Appl. Phys. Lett. (1)

A. Rosencwaig, J. Opsal, D. L. Willenborg, S. M. Kelso, and J. T. Fanton, Appl. Phys. Lett. 60, 1301 (1992).
[CrossRef]

Comp. J. (1)

J. A. Nelder and R. Mead, Comp. J. 7, 308 (1965).
[CrossRef]

Thin Solid Films (1)

J. M. Leng, J. J. Sidorowich, M. Senko, and J. Opsal, Thin Solid Films 313-314, 270 (1998).
[CrossRef]

Cited By

OSA participates in CrossRef's Cited-By Linking service. Citing articles from OSA journals and other participating publishers are listed here.

Alert me when this article is cited.


Figures (4)

Fig. 1
Fig. 1

Schematic diagram of the SBPR.

Fig. 2
Fig. 2

Schematic diagram of the experimental setup.

Fig. 3
Fig. 3

Reflected beam image for a cover glass.

Fig. 4
Fig. 4

(a) Reflected beam image for a SiO2 thin film and (b) thickness distributions along test lines aa, bb, and cc. See text for details of inset.

Equations (5)

Equations on this page are rendered with MathJax. Learn more.

Rs,p=r01s,p+r12s,pexp-2iβ1+r01s,pr12s,pexp-2iβ2,
β=2πn12-n02 sin2 θ1/2d/λ.
rj,j+1s,p=ηj-ηj+1/ηj+ηj+1,  j=0,1,
ηj=nj2-n02 sin2 θ1/2for s polarizationnj2/nj2-n02 sin2 θ1/2for p polarization.
Ry,θ=RSiθIsampley,θ/ISiy,θ,

Metrics