We have constructed an interference microscope that produces, in real time, reflectivity and topography images of surfaces with depth discrimination better than . Intensity and phase images are obtained at the rate of 50 per second by use of a multiplexed lock-in detection and MMX assembler-optimized calculation routines. With a wavelength of , depth discrimination of and lateral resolution of were demonstrated, in good agreement with theory. Two-dimensional cross-sectional reflectivity and topography images taken at different depths in an integrated circuit are presented.
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