Abstract

We have constructed an interference microscope that produces, in real time, reflectivity and topography images of surfaces with depth discrimination better than 1 ?m. Intensity and phase images are obtained at the rate of 50??per second by use of a multiplexed lock-in detection and MMX assembler-optimized calculation routines. With a wavelength of 0.84 ?m, depth discrimination of 0.7 ?m and lateral resolution of 0.3 ?m were demonstrated, in good agreement with theory. Two-dimensional cross-sectional reflectivity and topography images taken at different depths in an integrated circuit are presented.

© 1999 Optical Society of America

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