Abstract

We focused the beam of a high-repetition-rate capillary-discharge tabletop laser operating at a wavelength of 46.9 nm, using a spherical Si/Sc multilayer mirror. The energy densities significantly exceeded the thresholds for the ablation of metals. Single-shot laser ablation patterns were used in combination with ray-tracing computations to characterize the focused beam. The radiation intensity within the 2µm-diameter central region of the focal spot was estimated to be 1011 W/cm2, with a corresponding energy density of 100 J/cm2.

© 1999 Optical Society of America

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