Abstract

We present a miniaturized Fourier transform spectrometer (FTS) based on optical microelectromechanical system technology. The FTS is a Michelson interferometer with one scanning mirror. A new type of electrostatic comb drive actuator moves the mirror. We have measured a nonlinearity of the driving system of ±0.5 µm for a displacement of 38.5 µm. A method is presented to correct the spectrum to get rid of the nonlinearity. The driving reproducibility is ±25 nm. The measured resolution of the spectrometer after the phase correction is 6 nm at a wavelength of 633 nm.

© 1999 Optical Society of America

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