Abstract
We present a miniaturized Fourier transform spectrometer (FTS) based on optical microelectromechanical system technology. The FTS is a Michelson interferometer with one scanning mirror. A new type of electrostatic comb drive actuator moves the mirror. We have measured a nonlinearity of the driving system of for a displacement of . A method is presented to correct the spectrum to get rid of the nonlinearity. The driving reproducibility is . The measured resolution of the spectrometer after the phase correction is 6 nm at a wavelength of 633 nm.
© 1999 Optical Society of America
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