Abstract

Color-center formation in F-doped, OH-free synthetic SiO2 glasses by irradiation with F2 excimer lasers (157 nm) was examined as a function of the F content. The concentration of photoinduced E centers was reduced to 1/20 by 1 mol.% F2 doping and remained almost constant on further doping to 7.3 mol. %. The absorption edge was considerably shifted to a lower wavelength (157.4 nm153 nm for a 5-mm-thick sample) by 1-mol. % doping and decreased only slightly on further doping. The intensities of the Raman bands that are due to three- and four-membered ring structures were significantly reduced by 1-mol. % F doping. These results strongly suggest that elimination of strained Si—O—Si bonds by F doping plays a central role in the improvement of radiation resistance of SiO2 glasses to F2 laser light.

© 1999 Optical Society of America

Full Article  |  PDF Article

References

  • View by:
  • |
  • |
  • |

  1. T. N. Bloomstein, M. W. Hormn, M. Rothschild, R. R. Kunz, S. T. Palmacc, and R. B. Goodman, J. Vac. Sci. Technol. B 15, 2112 (1997).
    [CrossRef]
  2. M. Mizuguchi, H. Hosono, H. Kawazoe, and T. Ogawa, J. Opt. Soc. Am. B 16, 1153 (1999).
    [CrossRef]
  3. I. P. Kaminow, B. G. Bagley, and C. G. Olsen, Appl. Phys. Lett. 32, 98 (1978).
    [CrossRef]
  4. H. Hosono, M. Mizuguchi, H. Kawazoe, and T. Ogawa, Appl. Phys. Lett. 74, 2755 (1999).
    [CrossRef]
  5. D. L. Griscom, J. Ceram. Soc. Jpn. 99, 923 (1991).
    [CrossRef]
  6. L. Skuja, J. Non-Cryst. Solids 239, 16 (1998).
    [CrossRef]
  7. F. L. Galeener, in The Structure of Non-Crystalline Materials 1982, P. H. Gaskell, J. M. Parker, and E. A. Davis, eds. (Taylor & Francis, London, 1982), pp. 337–359.
  8. R. A. B. Devine, R. Dupree, I. Farnan, and J. J. Capponi, Phys. Rev. B 35, 2560 (1987).
    [CrossRef]
  9. N. Kitamura, K. Fukumi, K. Kadono, H. Yamashita, and K. Suito, Phys. Rev. B 50, 132 (1994).
    [CrossRef]
  10. R. A. B. Devine, Phys. Rev. B 35, 9783 (1987).
    [CrossRef]
  11. T. M. Duncan, D. C. Douglass, R. Csencsits, and K. L. Walter, J. Appl. Phys. 60, 130 (1986).
    [CrossRef]
  12. M. Mizuguchi, L. Skuja, H. Hosono, and T. Ogawa, Opt. Lett. 24, 863 (1999).
    [CrossRef]
  13. K. Rau, A. Muhlich, and N. Treber, in Digest of Topical Meeting on Optical Fiber Transmission II (Optical Society of America, Washington, D.C., 1977), p. 10;E. M. Rabinovich, Phys. Chem. Glasses 24, 54 (1983).
  14. M. Kyoto, Y. Ohoga, S. Ishikawa, and Y. Ishiguro, J. Mater. Sci. 28, 2738 (1993).
    [CrossRef]

1999 (3)

1998 (1)

L. Skuja, J. Non-Cryst. Solids 239, 16 (1998).
[CrossRef]

1997 (1)

T. N. Bloomstein, M. W. Hormn, M. Rothschild, R. R. Kunz, S. T. Palmacc, and R. B. Goodman, J. Vac. Sci. Technol. B 15, 2112 (1997).
[CrossRef]

1994 (1)

N. Kitamura, K. Fukumi, K. Kadono, H. Yamashita, and K. Suito, Phys. Rev. B 50, 132 (1994).
[CrossRef]

1993 (1)

M. Kyoto, Y. Ohoga, S. Ishikawa, and Y. Ishiguro, J. Mater. Sci. 28, 2738 (1993).
[CrossRef]

1991 (1)

D. L. Griscom, J. Ceram. Soc. Jpn. 99, 923 (1991).
[CrossRef]

1987 (2)

R. A. B. Devine, Phys. Rev. B 35, 9783 (1987).
[CrossRef]

R. A. B. Devine, R. Dupree, I. Farnan, and J. J. Capponi, Phys. Rev. B 35, 2560 (1987).
[CrossRef]

1986 (1)

T. M. Duncan, D. C. Douglass, R. Csencsits, and K. L. Walter, J. Appl. Phys. 60, 130 (1986).
[CrossRef]

1978 (1)

I. P. Kaminow, B. G. Bagley, and C. G. Olsen, Appl. Phys. Lett. 32, 98 (1978).
[CrossRef]

Bagley, B. G.

I. P. Kaminow, B. G. Bagley, and C. G. Olsen, Appl. Phys. Lett. 32, 98 (1978).
[CrossRef]

Bloomstein, T. N.

T. N. Bloomstein, M. W. Hormn, M. Rothschild, R. R. Kunz, S. T. Palmacc, and R. B. Goodman, J. Vac. Sci. Technol. B 15, 2112 (1997).
[CrossRef]

Capponi, J. J.

R. A. B. Devine, R. Dupree, I. Farnan, and J. J. Capponi, Phys. Rev. B 35, 2560 (1987).
[CrossRef]

Csencsits, R.

T. M. Duncan, D. C. Douglass, R. Csencsits, and K. L. Walter, J. Appl. Phys. 60, 130 (1986).
[CrossRef]

Devine, R. A. B.

R. A. B. Devine, Phys. Rev. B 35, 9783 (1987).
[CrossRef]

R. A. B. Devine, R. Dupree, I. Farnan, and J. J. Capponi, Phys. Rev. B 35, 2560 (1987).
[CrossRef]

Douglass, D. C.

T. M. Duncan, D. C. Douglass, R. Csencsits, and K. L. Walter, J. Appl. Phys. 60, 130 (1986).
[CrossRef]

Duncan, T. M.

T. M. Duncan, D. C. Douglass, R. Csencsits, and K. L. Walter, J. Appl. Phys. 60, 130 (1986).
[CrossRef]

Dupree, R.

R. A. B. Devine, R. Dupree, I. Farnan, and J. J. Capponi, Phys. Rev. B 35, 2560 (1987).
[CrossRef]

Farnan, I.

R. A. B. Devine, R. Dupree, I. Farnan, and J. J. Capponi, Phys. Rev. B 35, 2560 (1987).
[CrossRef]

Fukumi, K.

N. Kitamura, K. Fukumi, K. Kadono, H. Yamashita, and K. Suito, Phys. Rev. B 50, 132 (1994).
[CrossRef]

Galeener, F. L.

F. L. Galeener, in The Structure of Non-Crystalline Materials 1982, P. H. Gaskell, J. M. Parker, and E. A. Davis, eds. (Taylor & Francis, London, 1982), pp. 337–359.

Goodman, R. B.

T. N. Bloomstein, M. W. Hormn, M. Rothschild, R. R. Kunz, S. T. Palmacc, and R. B. Goodman, J. Vac. Sci. Technol. B 15, 2112 (1997).
[CrossRef]

Griscom, D. L.

D. L. Griscom, J. Ceram. Soc. Jpn. 99, 923 (1991).
[CrossRef]

Hormn, M. W.

T. N. Bloomstein, M. W. Hormn, M. Rothschild, R. R. Kunz, S. T. Palmacc, and R. B. Goodman, J. Vac. Sci. Technol. B 15, 2112 (1997).
[CrossRef]

Hosono, H.

Ishiguro, Y.

M. Kyoto, Y. Ohoga, S. Ishikawa, and Y. Ishiguro, J. Mater. Sci. 28, 2738 (1993).
[CrossRef]

Ishikawa, S.

M. Kyoto, Y. Ohoga, S. Ishikawa, and Y. Ishiguro, J. Mater. Sci. 28, 2738 (1993).
[CrossRef]

Kadono, K.

N. Kitamura, K. Fukumi, K. Kadono, H. Yamashita, and K. Suito, Phys. Rev. B 50, 132 (1994).
[CrossRef]

Kaminow, I. P.

I. P. Kaminow, B. G. Bagley, and C. G. Olsen, Appl. Phys. Lett. 32, 98 (1978).
[CrossRef]

Kawazoe, H.

H. Hosono, M. Mizuguchi, H. Kawazoe, and T. Ogawa, Appl. Phys. Lett. 74, 2755 (1999).
[CrossRef]

M. Mizuguchi, H. Hosono, H. Kawazoe, and T. Ogawa, J. Opt. Soc. Am. B 16, 1153 (1999).
[CrossRef]

Kitamura, N.

N. Kitamura, K. Fukumi, K. Kadono, H. Yamashita, and K. Suito, Phys. Rev. B 50, 132 (1994).
[CrossRef]

Kunz, R. R.

T. N. Bloomstein, M. W. Hormn, M. Rothschild, R. R. Kunz, S. T. Palmacc, and R. B. Goodman, J. Vac. Sci. Technol. B 15, 2112 (1997).
[CrossRef]

Kyoto, M.

M. Kyoto, Y. Ohoga, S. Ishikawa, and Y. Ishiguro, J. Mater. Sci. 28, 2738 (1993).
[CrossRef]

Mizuguchi, M.

Muhlich, A.

K. Rau, A. Muhlich, and N. Treber, in Digest of Topical Meeting on Optical Fiber Transmission II (Optical Society of America, Washington, D.C., 1977), p. 10;E. M. Rabinovich, Phys. Chem. Glasses 24, 54 (1983).

Ogawa, T.

Ohoga, Y.

M. Kyoto, Y. Ohoga, S. Ishikawa, and Y. Ishiguro, J. Mater. Sci. 28, 2738 (1993).
[CrossRef]

Olsen, C. G.

I. P. Kaminow, B. G. Bagley, and C. G. Olsen, Appl. Phys. Lett. 32, 98 (1978).
[CrossRef]

Palmacc, S. T.

T. N. Bloomstein, M. W. Hormn, M. Rothschild, R. R. Kunz, S. T. Palmacc, and R. B. Goodman, J. Vac. Sci. Technol. B 15, 2112 (1997).
[CrossRef]

Rau, K.

K. Rau, A. Muhlich, and N. Treber, in Digest of Topical Meeting on Optical Fiber Transmission II (Optical Society of America, Washington, D.C., 1977), p. 10;E. M. Rabinovich, Phys. Chem. Glasses 24, 54 (1983).

Rothschild, M.

T. N. Bloomstein, M. W. Hormn, M. Rothschild, R. R. Kunz, S. T. Palmacc, and R. B. Goodman, J. Vac. Sci. Technol. B 15, 2112 (1997).
[CrossRef]

Skuja, L.

Suito, K.

N. Kitamura, K. Fukumi, K. Kadono, H. Yamashita, and K. Suito, Phys. Rev. B 50, 132 (1994).
[CrossRef]

Treber, N.

K. Rau, A. Muhlich, and N. Treber, in Digest of Topical Meeting on Optical Fiber Transmission II (Optical Society of America, Washington, D.C., 1977), p. 10;E. M. Rabinovich, Phys. Chem. Glasses 24, 54 (1983).

Walter, K. L.

T. M. Duncan, D. C. Douglass, R. Csencsits, and K. L. Walter, J. Appl. Phys. 60, 130 (1986).
[CrossRef]

Yamashita, H.

N. Kitamura, K. Fukumi, K. Kadono, H. Yamashita, and K. Suito, Phys. Rev. B 50, 132 (1994).
[CrossRef]

Appl. Phys. Lett. (2)

I. P. Kaminow, B. G. Bagley, and C. G. Olsen, Appl. Phys. Lett. 32, 98 (1978).
[CrossRef]

H. Hosono, M. Mizuguchi, H. Kawazoe, and T. Ogawa, Appl. Phys. Lett. 74, 2755 (1999).
[CrossRef]

J. Appl. Phys. (1)

T. M. Duncan, D. C. Douglass, R. Csencsits, and K. L. Walter, J. Appl. Phys. 60, 130 (1986).
[CrossRef]

J. Ceram. Soc. Jpn. (1)

D. L. Griscom, J. Ceram. Soc. Jpn. 99, 923 (1991).
[CrossRef]

J. Mater. Sci. (1)

M. Kyoto, Y. Ohoga, S. Ishikawa, and Y. Ishiguro, J. Mater. Sci. 28, 2738 (1993).
[CrossRef]

J. Non-Cryst. Solids (1)

L. Skuja, J. Non-Cryst. Solids 239, 16 (1998).
[CrossRef]

J. Opt. Soc. Am. B (1)

J. Vac. Sci. Technol. B (1)

T. N. Bloomstein, M. W. Hormn, M. Rothschild, R. R. Kunz, S. T. Palmacc, and R. B. Goodman, J. Vac. Sci. Technol. B 15, 2112 (1997).
[CrossRef]

Opt. Lett. (1)

Phys. Rev. B (3)

R. A. B. Devine, R. Dupree, I. Farnan, and J. J. Capponi, Phys. Rev. B 35, 2560 (1987).
[CrossRef]

N. Kitamura, K. Fukumi, K. Kadono, H. Yamashita, and K. Suito, Phys. Rev. B 50, 132 (1994).
[CrossRef]

R. A. B. Devine, Phys. Rev. B 35, 9783 (1987).
[CrossRef]

Other (2)

F. L. Galeener, in The Structure of Non-Crystalline Materials 1982, P. H. Gaskell, J. M. Parker, and E. A. Davis, eds. (Taylor & Francis, London, 1982), pp. 337–359.

K. Rau, A. Muhlich, and N. Treber, in Digest of Topical Meeting on Optical Fiber Transmission II (Optical Society of America, Washington, D.C., 1977), p. 10;E. M. Rabinovich, Phys. Chem. Glasses 24, 54 (1983).

Cited By

OSA participates in CrossRef's Cited-By Linking service. Citing articles from OSA journals and other participating publishers are listed here.

Alert me when this article is cited.


Figures (3)

Fig. 1
Fig. 1

(a) VUV absorption spectra of SiO2:F glasses (before irradiation). The F content (in mol. %) is shown. α is the absorption coefficient. (b) Optical absorption induced by F2-laser irradiation 7 mJ/cm2/pulse ×3.6×105 pulses. We obtained the spectrum by subtracting the spectrum of the specimen before irradiation from that after irradiation.

Fig. 2
Fig. 2

Changes in VUV absorption edge position and F2-laser-induced E concentration with F content in SiO2 glasses. The absorption edge was defined for convenience as the wavelength at which the absorption coefficient reaches 5 cm-1. The E concentration was evaluated from the intensity of the 5.8-eV band.

Fig. 3
Fig. 3

Raman spectra of F-free and F-doped (1 mol. %) SiO2 glasses. The spectral resolution of the measurement was 2 cm-1.

Metrics