Abstract

Color-center formation in F-doped, OH-free synthetic SiO<sub>2</sub> glasses by irradiation with F<sub>2</sub> excimer lasers (157 nm) was examined as a function of the F content. The concentration of photoinduced E<sup>′</sup> centers was reduced to ~1/20 by 1 mol.% F <sub>2</sub> doping and remained almost constant on further doping to 7.3 mol. %. The absorption edge was considerably shifted to a lower wavelength (157.4 nm→153 nm for a 5-mm-thick sample) by 1-mol. % doping and decreased only slightly on further doping. The intensities of the Raman bands that are due to three- and four-membered ring structures were significantly reduced by 1-mol. % F doping. These results strongly suggest that elimination of strained Si—O—Si bonds by F doping plays a central role in the improvement of radiation resistance of SiO<sub>2</sub> glasses to F<sub>2</sub> laser light.

© 1999 Optical Society of America

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  1. T. N. Bloomstein, M. W. Hormn, M. Rothschild, R. R. Kunz, S. T. Palmacc, and R. B. Goodman, J. Vac. Sci. Technol. B 15, 2112 (1997).
  2. M. Mizuguchi, H. Hosono, H. Kawazoe, and T. Ogawa, J. Opt. Soc. Am. B 16, 1153 (1999).
  3. I. P. Kaminow, B. G. Bagley, and C. G. Olsen, Appl. Phys. Lett. 32, 98 (1978).
  4. H. Hosono, M. Mizuguchi, H. Kawazoe, and T. Ogawa, Appl. Phys. Lett. 74, 2755 (1999).
  5. D. L. Griscom, J. Ceram. Soc. Jpn. 99, 923 (1991).
  6. L. Skuja, J. Non-Cryst. Solids 239, 16 (1998).
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  8. R. A. B. Devine, R. Dupree, I. Farnan, and J. J. Capponi, Phys. Rev. B 35, 2560 (1987).
  9. N. Kitamura, K. Fukumi, K. Kadono, H. Yamashita, and K. Suito, Phys. Rev. B 50, 132 (1994).
  10. R. A. B. Devine, Phys. Rev. B 35, 9783 (1987).
  11. T. M. Duncan, D. C. Douglass, R. Csencsits, and K. L. Walter, J. Appl. Phys. 60, 130 (1986).
  12. M. Mizuguchi, L. Skuja, H. Hosono, and T. Ogawa, Opt. Lett. 24, 863 (1999).
  13. K. Rau, A. Muhlich, and N. Treber, in Digest of Topical Meeting on Optical Fiber Transmission II (Optical Society of America, Washington, D.C., 1977), p. 10; E. M. Rabinovich, Phys. Chem. Glasses 24, 54 (1983).
  14. M. Kyoto, Y. Ohoga, S. Ishikawa, and Y. Ishiguro, J. Mater. Sci. 28, 2738 (1993).

1999

1998

L. Skuja, J. Non-Cryst. Solids 239, 16 (1998).

1997

T. N. Bloomstein, M. W. Hormn, M. Rothschild, R. R. Kunz, S. T. Palmacc, and R. B. Goodman, J. Vac. Sci. Technol. B 15, 2112 (1997).

1994

N. Kitamura, K. Fukumi, K. Kadono, H. Yamashita, and K. Suito, Phys. Rev. B 50, 132 (1994).

1993

M. Kyoto, Y. Ohoga, S. Ishikawa, and Y. Ishiguro, J. Mater. Sci. 28, 2738 (1993).

1991

D. L. Griscom, J. Ceram. Soc. Jpn. 99, 923 (1991).

1987

R. A. B. Devine, Phys. Rev. B 35, 9783 (1987).

R. A. B. Devine, R. Dupree, I. Farnan, and J. J. Capponi, Phys. Rev. B 35, 2560 (1987).

1986

T. M. Duncan, D. C. Douglass, R. Csencsits, and K. L. Walter, J. Appl. Phys. 60, 130 (1986).

1982

F. L. Galeener, in The Structure of Non-Crystalline Materials 1982, P. H. Gaskell, J. M. Parker, and E. A. Davis, eds. (Taylor & Francis, London, 1982), pp. 337–359.

1978

I. P. Kaminow, B. G. Bagley, and C. G. Olsen, Appl. Phys. Lett. 32, 98 (1978).

1977

K. Rau, A. Muhlich, and N. Treber, in Digest of Topical Meeting on Optical Fiber Transmission II (Optical Society of America, Washington, D.C., 1977), p. 10; E. M. Rabinovich, Phys. Chem. Glasses 24, 54 (1983).

Bagley, B. G.

I. P. Kaminow, B. G. Bagley, and C. G. Olsen, Appl. Phys. Lett. 32, 98 (1978).

Bloomstein, T. N.

T. N. Bloomstein, M. W. Hormn, M. Rothschild, R. R. Kunz, S. T. Palmacc, and R. B. Goodman, J. Vac. Sci. Technol. B 15, 2112 (1997).

Capponi, J. J.

R. A. B. Devine, R. Dupree, I. Farnan, and J. J. Capponi, Phys. Rev. B 35, 2560 (1987).

Csencsits, R.

T. M. Duncan, D. C. Douglass, R. Csencsits, and K. L. Walter, J. Appl. Phys. 60, 130 (1986).

Devine, R. A. B.

R. A. B. Devine, Phys. Rev. B 35, 9783 (1987).

R. A. B. Devine, R. Dupree, I. Farnan, and J. J. Capponi, Phys. Rev. B 35, 2560 (1987).

Douglass, D. C.

T. M. Duncan, D. C. Douglass, R. Csencsits, and K. L. Walter, J. Appl. Phys. 60, 130 (1986).

Duncan, T. M.

T. M. Duncan, D. C. Douglass, R. Csencsits, and K. L. Walter, J. Appl. Phys. 60, 130 (1986).

Dupree, R.

R. A. B. Devine, R. Dupree, I. Farnan, and J. J. Capponi, Phys. Rev. B 35, 2560 (1987).

Farnan, I.

R. A. B. Devine, R. Dupree, I. Farnan, and J. J. Capponi, Phys. Rev. B 35, 2560 (1987).

Fukumi, K.

N. Kitamura, K. Fukumi, K. Kadono, H. Yamashita, and K. Suito, Phys. Rev. B 50, 132 (1994).

Galeener, F. L.

F. L. Galeener, in The Structure of Non-Crystalline Materials 1982, P. H. Gaskell, J. M. Parker, and E. A. Davis, eds. (Taylor & Francis, London, 1982), pp. 337–359.

Goodman, R. B.

T. N. Bloomstein, M. W. Hormn, M. Rothschild, R. R. Kunz, S. T. Palmacc, and R. B. Goodman, J. Vac. Sci. Technol. B 15, 2112 (1997).

Griscom, D. L.

D. L. Griscom, J. Ceram. Soc. Jpn. 99, 923 (1991).

Hormn, M. W.

T. N. Bloomstein, M. W. Hormn, M. Rothschild, R. R. Kunz, S. T. Palmacc, and R. B. Goodman, J. Vac. Sci. Technol. B 15, 2112 (1997).

Hosono, H.

Ishiguro, Y.

M. Kyoto, Y. Ohoga, S. Ishikawa, and Y. Ishiguro, J. Mater. Sci. 28, 2738 (1993).

Ishikawa, S.

M. Kyoto, Y. Ohoga, S. Ishikawa, and Y. Ishiguro, J. Mater. Sci. 28, 2738 (1993).

Kadono, K.

N. Kitamura, K. Fukumi, K. Kadono, H. Yamashita, and K. Suito, Phys. Rev. B 50, 132 (1994).

Kaminow, I. P.

I. P. Kaminow, B. G. Bagley, and C. G. Olsen, Appl. Phys. Lett. 32, 98 (1978).

Kawazoe, H.

H. Hosono, M. Mizuguchi, H. Kawazoe, and T. Ogawa, Appl. Phys. Lett. 74, 2755 (1999).

M. Mizuguchi, H. Hosono, H. Kawazoe, and T. Ogawa, J. Opt. Soc. Am. B 16, 1153 (1999).

Kitamura, N.

N. Kitamura, K. Fukumi, K. Kadono, H. Yamashita, and K. Suito, Phys. Rev. B 50, 132 (1994).

Kunz, R. R.

T. N. Bloomstein, M. W. Hormn, M. Rothschild, R. R. Kunz, S. T. Palmacc, and R. B. Goodman, J. Vac. Sci. Technol. B 15, 2112 (1997).

Kyoto, M.

M. Kyoto, Y. Ohoga, S. Ishikawa, and Y. Ishiguro, J. Mater. Sci. 28, 2738 (1993).

Mizuguchi, M.

Muhlich, A.

K. Rau, A. Muhlich, and N. Treber, in Digest of Topical Meeting on Optical Fiber Transmission II (Optical Society of America, Washington, D.C., 1977), p. 10; E. M. Rabinovich, Phys. Chem. Glasses 24, 54 (1983).

Ogawa, T.

Ohoga, Y.

M. Kyoto, Y. Ohoga, S. Ishikawa, and Y. Ishiguro, J. Mater. Sci. 28, 2738 (1993).

Olsen, C. G.

I. P. Kaminow, B. G. Bagley, and C. G. Olsen, Appl. Phys. Lett. 32, 98 (1978).

Palmacc, S. T.

T. N. Bloomstein, M. W. Hormn, M. Rothschild, R. R. Kunz, S. T. Palmacc, and R. B. Goodman, J. Vac. Sci. Technol. B 15, 2112 (1997).

Rau, K.

K. Rau, A. Muhlich, and N. Treber, in Digest of Topical Meeting on Optical Fiber Transmission II (Optical Society of America, Washington, D.C., 1977), p. 10; E. M. Rabinovich, Phys. Chem. Glasses 24, 54 (1983).

Rothschild, M.

T. N. Bloomstein, M. W. Hormn, M. Rothschild, R. R. Kunz, S. T. Palmacc, and R. B. Goodman, J. Vac. Sci. Technol. B 15, 2112 (1997).

Skuja, L.

Suito, K.

N. Kitamura, K. Fukumi, K. Kadono, H. Yamashita, and K. Suito, Phys. Rev. B 50, 132 (1994).

Treber, N.

K. Rau, A. Muhlich, and N. Treber, in Digest of Topical Meeting on Optical Fiber Transmission II (Optical Society of America, Washington, D.C., 1977), p. 10; E. M. Rabinovich, Phys. Chem. Glasses 24, 54 (1983).

Walter, K. L.

T. M. Duncan, D. C. Douglass, R. Csencsits, and K. L. Walter, J. Appl. Phys. 60, 130 (1986).

Yamashita, H.

N. Kitamura, K. Fukumi, K. Kadono, H. Yamashita, and K. Suito, Phys. Rev. B 50, 132 (1994).

Appl. Phys. Lett.

I. P. Kaminow, B. G. Bagley, and C. G. Olsen, Appl. Phys. Lett. 32, 98 (1978).

H. Hosono, M. Mizuguchi, H. Kawazoe, and T. Ogawa, Appl. Phys. Lett. 74, 2755 (1999).

J. Appl. Phys.

T. M. Duncan, D. C. Douglass, R. Csencsits, and K. L. Walter, J. Appl. Phys. 60, 130 (1986).

J. Ceram. Soc. Jpn.

D. L. Griscom, J. Ceram. Soc. Jpn. 99, 923 (1991).

J. Mater. Sci.

M. Kyoto, Y. Ohoga, S. Ishikawa, and Y. Ishiguro, J. Mater. Sci. 28, 2738 (1993).

J. Non-Cryst. Solids

L. Skuja, J. Non-Cryst. Solids 239, 16 (1998).

J. Opt. Soc. Am. B

J. Vac. Sci. Technol. B

T. N. Bloomstein, M. W. Hormn, M. Rothschild, R. R. Kunz, S. T. Palmacc, and R. B. Goodman, J. Vac. Sci. Technol. B 15, 2112 (1997).

Opt. Lett.

Phys. Rev. B

R. A. B. Devine, R. Dupree, I. Farnan, and J. J. Capponi, Phys. Rev. B 35, 2560 (1987).

N. Kitamura, K. Fukumi, K. Kadono, H. Yamashita, and K. Suito, Phys. Rev. B 50, 132 (1994).

R. A. B. Devine, Phys. Rev. B 35, 9783 (1987).

Other

K. Rau, A. Muhlich, and N. Treber, in Digest of Topical Meeting on Optical Fiber Transmission II (Optical Society of America, Washington, D.C., 1977), p. 10; E. M. Rabinovich, Phys. Chem. Glasses 24, 54 (1983).

F. L. Galeener, in The Structure of Non-Crystalline Materials 1982, P. H. Gaskell, J. M. Parker, and E. A. Davis, eds. (Taylor & Francis, London, 1982), pp. 337–359.

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