Abstract

Spatially localized femtosecond pulses have been produced by a combination of scanning near-field optical microscopy with ultrashort pulse lasers. With these pulses direct ablative writing on metal surfaces is demonstrated. Possible applications of this technique for nanostructuring, repair, and production of lithographic masks are discussed.

© 1999 Optical Society of America

Sub-diffraction limited structuring of solid targets with femtosecond laser pulses

F. Korte, S. Adams, A. Egbert, C. Fallnich, A. Ostendorf, S. Nolte, M. Will, J.-P. Ruske, B. N. Chichkov, and A. Tünnermann
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Femtosecond laser nanostructuring of metals

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Fabrication of long-period fiber gratings by focused irradiation of infrared femtosecond laser pulses

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Opt. Lett. 24(10) 646-648 (1999)

Infrared photosensitivity in silica glasses exposed to femtosecond laser pulses

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Opt. Lett. 24(18) 1311-1313 (1999)

The role of light-induced nanostructures in femtosecond laser micromachining with vector and scalar pulses

Cyril Hnatovsky, Vladlen G. Shvedov, and Wieslaw Krolikowski
Opt. Express 21(10) 12651-12656 (2013)