Abstract

A combination of advanced silicon-processing techniques was used to create three-dimensional (3D) photonic crystals with a 180-nm minimum feature size. The resulting 3D crystal displayed a strong stop band at optical wavelengths from λ=1.35μm to λ=1.95μm. This is believed to be the smallest 3D crystal with a complete 3D photonic bandgap ever created.

© 1999 Optical Society of America

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