Abstract

Quadratic aberration is successfully corrected with a segmented microelectromechanical deformable mirror in conjunction with a refractive lenslet array. Use of the lenslet array greatly improves the effective fill factor of the correcting element. Experimental results show correction approaching the diffraction limit for an extreme spherical aberration.

© 1998 Optical Society of America

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References

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  1. M. C. Roggemann, V. M. Bright, B. M. Welsh, S. R. Hick, P. C. Roberts, W. D. Cowan, and J. H. Comtois, Opt. Eng. 36, 1316 (1997).
    [CrossRef]
  2. R. L. Clark, J. R. Karpinsky, J. A. Hammer, R. Anderson, and P. Merrit, Proc. SPIE 3008, 12 (1997).
    [CrossRef]

1997 (2)

M. C. Roggemann, V. M. Bright, B. M. Welsh, S. R. Hick, P. C. Roberts, W. D. Cowan, and J. H. Comtois, Opt. Eng. 36, 1316 (1997).
[CrossRef]

R. L. Clark, J. R. Karpinsky, J. A. Hammer, R. Anderson, and P. Merrit, Proc. SPIE 3008, 12 (1997).
[CrossRef]

Anderson, R.

R. L. Clark, J. R. Karpinsky, J. A. Hammer, R. Anderson, and P. Merrit, Proc. SPIE 3008, 12 (1997).
[CrossRef]

Bright, V. M.

M. C. Roggemann, V. M. Bright, B. M. Welsh, S. R. Hick, P. C. Roberts, W. D. Cowan, and J. H. Comtois, Opt. Eng. 36, 1316 (1997).
[CrossRef]

Clark, R. L.

R. L. Clark, J. R. Karpinsky, J. A. Hammer, R. Anderson, and P. Merrit, Proc. SPIE 3008, 12 (1997).
[CrossRef]

Comtois, J. H.

M. C. Roggemann, V. M. Bright, B. M. Welsh, S. R. Hick, P. C. Roberts, W. D. Cowan, and J. H. Comtois, Opt. Eng. 36, 1316 (1997).
[CrossRef]

Cowan, W. D.

M. C. Roggemann, V. M. Bright, B. M. Welsh, S. R. Hick, P. C. Roberts, W. D. Cowan, and J. H. Comtois, Opt. Eng. 36, 1316 (1997).
[CrossRef]

Hammer, J. A.

R. L. Clark, J. R. Karpinsky, J. A. Hammer, R. Anderson, and P. Merrit, Proc. SPIE 3008, 12 (1997).
[CrossRef]

Hick, S. R.

M. C. Roggemann, V. M. Bright, B. M. Welsh, S. R. Hick, P. C. Roberts, W. D. Cowan, and J. H. Comtois, Opt. Eng. 36, 1316 (1997).
[CrossRef]

Karpinsky, J. R.

R. L. Clark, J. R. Karpinsky, J. A. Hammer, R. Anderson, and P. Merrit, Proc. SPIE 3008, 12 (1997).
[CrossRef]

Merrit, P.

R. L. Clark, J. R. Karpinsky, J. A. Hammer, R. Anderson, and P. Merrit, Proc. SPIE 3008, 12 (1997).
[CrossRef]

Roberts, P. C.

M. C. Roggemann, V. M. Bright, B. M. Welsh, S. R. Hick, P. C. Roberts, W. D. Cowan, and J. H. Comtois, Opt. Eng. 36, 1316 (1997).
[CrossRef]

Roggemann, M. C.

M. C. Roggemann, V. M. Bright, B. M. Welsh, S. R. Hick, P. C. Roberts, W. D. Cowan, and J. H. Comtois, Opt. Eng. 36, 1316 (1997).
[CrossRef]

Welsh, B. M.

M. C. Roggemann, V. M. Bright, B. M. Welsh, S. R. Hick, P. C. Roberts, W. D. Cowan, and J. H. Comtois, Opt. Eng. 36, 1316 (1997).
[CrossRef]

Opt. Eng. (1)

M. C. Roggemann, V. M. Bright, B. M. Welsh, S. R. Hick, P. C. Roberts, W. D. Cowan, and J. H. Comtois, Opt. Eng. 36, 1316 (1997).
[CrossRef]

Proc. SPIE (1)

R. L. Clark, J. R. Karpinsky, J. A. Hammer, R. Anderson, and P. Merrit, Proc. SPIE 3008, 12 (1997).
[CrossRef]

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Figures (4)

Fig. 1
Fig. 1

Schematic of the optical setup used to demonstrate aberration correction with a MEM-DM and refractive lenslet array. The function of each lens is explained in the text. Note that the drawing is not to scale. Component details and locations are provided in Tables  1 and  2.

Fig. 2
Fig. 2

Annotated scanning-electron micrograph of a single micromirror element.

Fig. 3
Fig. 3

Far-field diffraction patterns recorded at the PSF camera: (a) plane wave on the undeflected MEM-DM, (b) aberrated wave on the undeflected MEM-DM, (c)–(h) aberrated wave on the deflected MEM-DM with radius of curvature increasing from 0.5 to 1 m in steps of 0.1 m.

Fig. 4
Fig. 4

Relative aberration correction in terms of FWHM, peak intensity, and the product of the two metrics as a function of the radius of curvature applied to the MEM-DM.

Tables (3)

Tables Icon

Table 1 Focal Lengths of Lenses Used in the Experimental Setup

Tables Icon

Table 2 Specification of Optical Component Locations in the Experimental Setup

Tables Icon

Table 3 Summary of Experiment Data

Equations (2)

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=FWHM unaberratedFWHM aberration corrected×100%,
=aberration corrected peak intensityunaberrated peak intensity×100%.

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