Abstract

We have fabricated a novel device that acts as a quarter-wave plate at normal incidence and as a polarizing beam splitter at an angle of incidence of 40 deg. The device is made from a multilayer SiO2/Si3N4 surface-relief zeroth-order one-dimensional grating with a period of 0.3 µm. The device is designed for an operating wavelength of 632.8  nm. We designed the device by using rigorous coupled-wave analysis and fabricated it by direct-write electron-beam lithography and reactive ion etching. Measurements confirmed the performance of the device as a wave plate and as a polarizing beam splitter.

© 1998 Optical Society of America

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References

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    [CrossRef]
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    [CrossRef]
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    [CrossRef]
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    [CrossRef]
  7. Subroutine dbconf from International Mathematics and Statistics Library, Houston, Texas.

1997 (1)

1992 (1)

1986 (1)

1983 (1)

D. C. Flanders, Appl. Phys. Lett. 42, 492 (1983).
[CrossRef]

1982 (1)

Azzam, R. M. A.

R. M. A. Azzam and N. M. Bashara, Ellipsometry and Polarized Light (North-Holland, Amsterdam, 1987).

Bashara, N. M.

R. M. A. Azzam and N. M. Bashara, Ellipsometry and Polarized Light (North-Holland, Amsterdam, 1987).

Cheng, C.-C.

Chou, H.-P.

Fainman, Y.

Flanders, D. C.

D. C. Flanders, Appl. Phys. Lett. 42, 492 (1983).
[CrossRef]

Gaylord, T. K.

Ito, M.

Kaku, T.

Lee, M. C.

Moharan, M. G.

Ojima, M.

Saito, A.

Salvekar, A. A.

Scherer, A.

Song, Q. W.

Sugita, Y.

Sun, P.-C.

Takayama, S.

Talbot, P. J.

Tsunoda, Y.

Tyan, R.-C.

Xu, F.

Appl. Opt. (2)

Appl. Phys. Lett. (1)

D. C. Flanders, Appl. Phys. Lett. 42, 492 (1983).
[CrossRef]

J. Opt. Soc. Am. (1)

J. Opt. Soc. Am. A (1)

Other (2)

R. M. A. Azzam and N. M. Bashara, Ellipsometry and Polarized Light (North-Holland, Amsterdam, 1987).

Subroutine dbconf from International Mathematics and Statistics Library, Houston, Texas.

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Figures (5)

Fig. 1
Fig. 1

Cross-sectional schematic diagram of the wave-plate–PBS grating device.

Fig. 2
Fig. 2

(a) Calculated values of zero-order reflected and transmitted diffraction efficiencies for the TE polarization (solid curve) and TM polarization (dashed curve) as a function of angle of incidence (AOI). (b) Relative phase difference of the TE–TM components as a function of AOI.

Fig. 3
Fig. 3

Scanning-electron micrograph of the wave-plate–beam-splitter grating device.

Fig. 4
Fig. 4

Normalized transmitted intensity obtained from the wave-plate test setup as a function of the output polarizer angle.

Fig. 5
Fig. 5

(a) Calculated zero-order transmitted and reflected extinction ratio TE/TM as a function of AOI. (b) Measured zero-order transmitted and reflected extinction ratio as a function of AOI.

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