Abstract

A technique for incorporating a groove into a LiNbO<sub>3</sub> substrate is described. Both V grooves for fiber alignment and vertical grooves for waveguide end-face formation can be fabricated with this technique. The proposed fabrication method is based on an excimer-laser ablation and a high-speed rotation saw cut for LiNbO<sub>3</sub> . The former process provides a variety of cross-sectional groove shapes by changing the ablation mask shape of LiNbO<sub>3</sub> , and the latter provides an optical-quality cutting face. The proposed fabrication method is simple and provides low-cost optical platforms not only for LiNbO<sub>3</sub> but also for glasses, polymers, and semiconductors.

© 1998 Optical Society of America

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  1. R. R. A. Syms, in Advances in Integrated Optics, S. Martellucci, A. N. Chester, and M. Berolotti, eds. (Plenum, New York, 1994), p. 138.
  2. K. E. Bean, IEEE Trans. Electron Devices ED-25, 1185 (1978).
  3. M. Guendouz, N. Pedrono, J. Charrier, P. Joubert, and J. Le Rouzic, Electron. Lett. 33, 1695 (1997).
  4. F. K. Christensen and M. Müllenborn, Appl. Phys. Lett. 66, 2772 (1995).
  5. H. Kragl, R. Hohmann, C. Marheine, W. Pott, and G. Pompe, Electron. Lett. 33, 2036 (1997).
  6. R. Srinivason, in Laser Ablation, J. C. Miller, ed. (Springer-Verlag, Berlin, 1994), p. 107.
  7. Th. Beuermann, H. J. Brinkmann, T. Damm, and M. Stuke, in Laser Ablation for Materials Synthesis, Mater. Res. Soc. Symp. Proc. 191, 37 (1990).
  8. N. Mekada, M. Seino, Y. Kubota, and H. Nakajima, Appl. Opt. 29, 5096 (1990).
  9. P. Klein and A. Neyer, Electron. Lett. 30, 1672 (1994).

1995

F. K. Christensen and M. Müllenborn, Appl. Phys. Lett. 66, 2772 (1995).

1994

R. Srinivason, in Laser Ablation, J. C. Miller, ed. (Springer-Verlag, Berlin, 1994), p. 107.

R. R. A. Syms, in Advances in Integrated Optics, S. Martellucci, A. N. Chester, and M. Berolotti, eds. (Plenum, New York, 1994), p. 138.

1990

Th. Beuermann, H. J. Brinkmann, T. Damm, and M. Stuke, in Laser Ablation for Materials Synthesis, Mater. Res. Soc. Symp. Proc. 191, 37 (1990).

N. Mekada, M. Seino, Y. Kubota, and H. Nakajima, Appl. Opt. 29, 5096 (1990).

Bean, K. E.

K. E. Bean, IEEE Trans. Electron Devices ED-25, 1185 (1978).

Beuermann, Th.

Th. Beuermann, H. J. Brinkmann, T. Damm, and M. Stuke, in Laser Ablation for Materials Synthesis, Mater. Res. Soc. Symp. Proc. 191, 37 (1990).

Brinkmann, H. J.

Th. Beuermann, H. J. Brinkmann, T. Damm, and M. Stuke, in Laser Ablation for Materials Synthesis, Mater. Res. Soc. Symp. Proc. 191, 37 (1990).

Charrier, J.

M. Guendouz, N. Pedrono, J. Charrier, P. Joubert, and J. Le Rouzic, Electron. Lett. 33, 1695 (1997).

Christensen, F. K.

F. K. Christensen and M. Müllenborn, Appl. Phys. Lett. 66, 2772 (1995).

Damm, T.

Th. Beuermann, H. J. Brinkmann, T. Damm, and M. Stuke, in Laser Ablation for Materials Synthesis, Mater. Res. Soc. Symp. Proc. 191, 37 (1990).

Guendouz, M.

M. Guendouz, N. Pedrono, J. Charrier, P. Joubert, and J. Le Rouzic, Electron. Lett. 33, 1695 (1997).

Hohmann, R.

H. Kragl, R. Hohmann, C. Marheine, W. Pott, and G. Pompe, Electron. Lett. 33, 2036 (1997).

Joubert, P.

M. Guendouz, N. Pedrono, J. Charrier, P. Joubert, and J. Le Rouzic, Electron. Lett. 33, 1695 (1997).

Klein, P.

P. Klein and A. Neyer, Electron. Lett. 30, 1672 (1994).

Kragl, H.

H. Kragl, R. Hohmann, C. Marheine, W. Pott, and G. Pompe, Electron. Lett. 33, 2036 (1997).

Kubota, Y.

Le Rouzic, J.

M. Guendouz, N. Pedrono, J. Charrier, P. Joubert, and J. Le Rouzic, Electron. Lett. 33, 1695 (1997).

Marheine, C.

H. Kragl, R. Hohmann, C. Marheine, W. Pott, and G. Pompe, Electron. Lett. 33, 2036 (1997).

Mekada, N.

Müllenborn, M.

F. K. Christensen and M. Müllenborn, Appl. Phys. Lett. 66, 2772 (1995).

Nakajima, H.

Neyer, A.

P. Klein and A. Neyer, Electron. Lett. 30, 1672 (1994).

Pedrono, N.

M. Guendouz, N. Pedrono, J. Charrier, P. Joubert, and J. Le Rouzic, Electron. Lett. 33, 1695 (1997).

Pompe, G.

H. Kragl, R. Hohmann, C. Marheine, W. Pott, and G. Pompe, Electron. Lett. 33, 2036 (1997).

Pott, W.

H. Kragl, R. Hohmann, C. Marheine, W. Pott, and G. Pompe, Electron. Lett. 33, 2036 (1997).

Seino, M.

Srinivason, R.

R. Srinivason, in Laser Ablation, J. C. Miller, ed. (Springer-Verlag, Berlin, 1994), p. 107.

Stuke, M.

Th. Beuermann, H. J. Brinkmann, T. Damm, and M. Stuke, in Laser Ablation for Materials Synthesis, Mater. Res. Soc. Symp. Proc. 191, 37 (1990).

Syms, R. R. A.

R. R. A. Syms, in Advances in Integrated Optics, S. Martellucci, A. N. Chester, and M. Berolotti, eds. (Plenum, New York, 1994), p. 138.

Appl. Opt.

Appl. Phys. Lett.

F. K. Christensen and M. Müllenborn, Appl. Phys. Lett. 66, 2772 (1995).

Electron. Lett.

H. Kragl, R. Hohmann, C. Marheine, W. Pott, and G. Pompe, Electron. Lett. 33, 2036 (1997).

P. Klein and A. Neyer, Electron. Lett. 30, 1672 (1994).

M. Guendouz, N. Pedrono, J. Charrier, P. Joubert, and J. Le Rouzic, Electron. Lett. 33, 1695 (1997).

IEEE Trans. Electron Devices

K. E. Bean, IEEE Trans. Electron Devices ED-25, 1185 (1978).

Mater. Res. Soc. Symp. Proc.

Th. Beuermann, H. J. Brinkmann, T. Damm, and M. Stuke, in Laser Ablation for Materials Synthesis, Mater. Res. Soc. Symp. Proc. 191, 37 (1990).

Other

R. R. A. Syms, in Advances in Integrated Optics, S. Martellucci, A. N. Chester, and M. Berolotti, eds. (Plenum, New York, 1994), p. 138.

R. Srinivason, in Laser Ablation, J. C. Miller, ed. (Springer-Verlag, Berlin, 1994), p. 107.

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