Abstract

Sc–Si multilayers are suggested as high-reflectivity coatings for a VUV interval of 35–50  nm. Fabricated mirrors show normal-incidence reflectivity of 30–54%, which is high enough for effective manipulation of the beams of compact-discharge, laser-driven x-ray lasers. The values obtained are not, however, limits for Sc–Si coatings. Theoretical estimations as well as electron microscopy studies of Sc–Si interfaces indicate a large potential for a further increase in their reflectivity.

© 1998 Optical Society of America

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