Abstract

The stable setup of a confocal arrangement consisting of a combination of a refractive microlens and a pinhole array is presented. The focal plane of the microlenses lies at the rear surface of the substrate in the pinhole plane. By using a microscope objective one can image the stop array onto the object at a reduced size. Surface profiles of refractive and diffractive optical elements were measured with the help of this confocal microscope.

© 1998 Optical Society of America

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References

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  1. M. Minsky, “Microscopy apparatus,” U.S. patent3,013,467 (July11, 1957).
  2. M. Petran and M. Hadravsky, J. Opt. Soc. Am. 58, 661 (1968).
    [CrossRef]
  3. H. J. Tiziani and H.-M. Uhde, Appl. Opt. 33, 567 (1993).
    [CrossRef]
  4. Firma Carl Zeiss, “Optische Abtast vorrichtung mit konfokalen Strahlengang, in der Lichtquellen-und Detektormatrix verwendet werden,” European patentEP 0485803 A1 (October30, 1991).
  5. J. Schwider, “Konfokales Mikroskop unter Verwendung von refraktiven Mikrolinsen-teldern,” German patent19,632,594.3 pending (August13, 1996).
  6. Z. D. Popovic, R. A. Sprague, and G. A. Neville Connell, Appl. Opt. 27, 1281 (1988).
    [CrossRef] [PubMed]

1993 (1)

1988 (1)

1968 (1)

Hadravsky, M.

Minsky, M.

M. Minsky, “Microscopy apparatus,” U.S. patent3,013,467 (July11, 1957).

Neville Connell, G. A.

Petran, M.

Popovic, Z. D.

Schwider, J.

J. Schwider, “Konfokales Mikroskop unter Verwendung von refraktiven Mikrolinsen-teldern,” German patent19,632,594.3 pending (August13, 1996).

Sprague, R. A.

Tiziani, H. J.

Uhde, H.-M.

Zeiss, Firma Carl

Firma Carl Zeiss, “Optische Abtast vorrichtung mit konfokalen Strahlengang, in der Lichtquellen-und Detektormatrix verwendet werden,” European patentEP 0485803 A1 (October30, 1991).

Appl. Opt. (2)

J. Opt. Soc. Am. (1)

Other (3)

M. Minsky, “Microscopy apparatus,” U.S. patent3,013,467 (July11, 1957).

Firma Carl Zeiss, “Optische Abtast vorrichtung mit konfokalen Strahlengang, in der Lichtquellen-und Detektormatrix verwendet werden,” European patentEP 0485803 A1 (October30, 1991).

J. Schwider, “Konfokales Mikroskop unter Verwendung von refraktiven Mikrolinsen-teldern,” German patent19,632,594.3 pending (August13, 1996).

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Figures (3)

Fig. 1
Fig. 1

Schematic of the confocal microscope setup.

Fig. 2
Fig. 2

3D plot of a measured refractive silicon microlens.

Fig. 3
Fig. 3

3D plot of the inner area of a measured Fresnel zone lens in quartz glass.

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