Abstract

A comparison of absolute sphericity measurements with a ShackHartmann sensor and a TwymanGreen interferometer is presented. The absolute deviations of a test sphere from its ideal shape were calculated in both cases from the measured wave aberrations of three different positions. Very good qualitative and quantitative agreement of the results was achieved. The difference of the root-mean-square values of the two methods was 1/1000 of a wavelength.

© 1998 Optical Society of America

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References

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  1. A. E. Jensen, J. Opt. Soc. Am. 63, 1313(A) (1973).
  2. G. Schulz and J. Schwider, in Progress in Optics XIII, E. Wolf, ed. (North-Holland, Amsterdam, 1976), pp. 92167.
  3. I. Ghozeil, in Optical Shop Testing, D. Malacara, ed. (Wiley, New York, 1978), pp. 323349.
  4. K.-E. Elssner, R. Burow, J. Grzanna, and R. Spolaczyk, Appl. Opt. 28, 4649 (1989).
  5. G. Schulz, Feingerätetechnik 26, 488 (1977).

1989

1978

I. Ghozeil, in Optical Shop Testing, D. Malacara, ed. (Wiley, New York, 1978), pp. 323349.

1976

G. Schulz and J. Schwider, in Progress in Optics XIII, E. Wolf, ed. (North-Holland, Amsterdam, 1976), pp. 92167.

Burow, R.

Elssner, K.-E.

Ghozeil, I.

I. Ghozeil, in Optical Shop Testing, D. Malacara, ed. (Wiley, New York, 1978), pp. 323349.

Grzanna, J.

Jensen, A. E.

A. E. Jensen, J. Opt. Soc. Am. 63, 1313(A) (1973).

Schulz, G.

G. Schulz and J. Schwider, in Progress in Optics XIII, E. Wolf, ed. (North-Holland, Amsterdam, 1976), pp. 92167.

G. Schulz, Feingerätetechnik 26, 488 (1977).

Schwider, J.

G. Schulz and J. Schwider, in Progress in Optics XIII, E. Wolf, ed. (North-Holland, Amsterdam, 1976), pp. 92167.

Spolaczyk, R.

Appl. Opt.

Feingerätetechnik

G. Schulz, Feingerätetechnik 26, 488 (1977).

J. Opt. Soc. Am.

A. E. Jensen, J. Opt. Soc. Am. 63, 1313(A) (1973).

Other

G. Schulz and J. Schwider, in Progress in Optics XIII, E. Wolf, ed. (North-Holland, Amsterdam, 1976), pp. 92167.

I. Ghozeil, in Optical Shop Testing, D. Malacara, ed. (Wiley, New York, 1978), pp. 323349.

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