Abstract

A comparison of absolute sphericity measurements with a Shack–Hartmann sensor and a Twyman–Green interferometer is presented. The absolute deviations of a test sphere from its ideal shape were calculated in both cases from the measured wave aberrations of three different positions. Very good qualitative and quantitative agreement of the results was achieved. The difference of the root-mean-square values of the two methods was 1/1000 of a wavelength.

© 1998 Optical Society of America

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References

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  1. A. E. Jensen, J. Opt. Soc. Am. 63, 1313(A) (1973).
  2. G. Schulz and J. Schwider, in Progress in Optics XIII, E. Wolf, ed. (North-Holland, Amsterdam, 1976), pp. 92–167.
  3. I. Ghozeil, in Optical Shop Testing, D. Malacara, ed. (Wiley, New York, 1978), pp. 323–349.
  4. K.-E. Elssner, R. Burow, J. Grzanna, and R. Spolaczyk, Appl. Opt. 28, 4649 (1989).
    [CrossRef] [PubMed]
  5. G. Schulz, Feingerätetechnik 26, 488 (1977).

1989 (1)

1977 (1)

G. Schulz, Feingerätetechnik 26, 488 (1977).

1973 (1)

A. E. Jensen, J. Opt. Soc. Am. 63, 1313(A) (1973).

Burow, R.

Elssner, K.-E.

Ghozeil, I.

I. Ghozeil, in Optical Shop Testing, D. Malacara, ed. (Wiley, New York, 1978), pp. 323–349.

Grzanna, J.

Jensen, A. E.

A. E. Jensen, J. Opt. Soc. Am. 63, 1313(A) (1973).

Schulz, G.

G. Schulz, Feingerätetechnik 26, 488 (1977).

G. Schulz and J. Schwider, in Progress in Optics XIII, E. Wolf, ed. (North-Holland, Amsterdam, 1976), pp. 92–167.

Schwider, J.

G. Schulz and J. Schwider, in Progress in Optics XIII, E. Wolf, ed. (North-Holland, Amsterdam, 1976), pp. 92–167.

Spolaczyk, R.

Appl. Opt. (1)

Feingerätetechnik (1)

G. Schulz, Feingerätetechnik 26, 488 (1977).

J. Opt. Soc. Am. (1)

A. E. Jensen, J. Opt. Soc. Am. 63, 1313(A) (1973).

Other (2)

G. Schulz and J. Schwider, in Progress in Optics XIII, E. Wolf, ed. (North-Holland, Amsterdam, 1976), pp. 92–167.

I. Ghozeil, in Optical Shop Testing, D. Malacara, ed. (Wiley, New York, 1978), pp. 323–349.

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Figures (4)

Fig. 1
Fig. 1

TWG setup for sphericity testing.

Fig. 2
Fig. 2

Absolute sphericity test schema relying on three relative measurements with a TWG.

Fig. 3
Fig. 3

Setup for sphericity tests using a SHS.

Fig. 4
Fig. 4

(a) Contour line plot of the absolute deviations of a spherical surface measured with a TWG: PVTWG=0.530λ; RMSTWG=0.086λ; distance between two contours, 1/20λ. (b) Contour line plot of the absolute deviations of the same spherical surface as in (a) but measured with a SHS: PVSHS=0.556λ; RMSSHS=0.087λ; distance between two contours, 1/20λ.

Equations (4)

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W1x, y=Wrx, y+Wcx, y+Sx, y, W2x, y=Wrx, y+Wcx, y+S-x, -y, W3x, y=Wrx, y+12Wcx, y+Wc-x, -y,
4Σx, y=2Sx, y=W1x, y+W2-x, -y-W3x, y+W3-x, -y.
W1x, y=Wex, y+Wsx, y+Wtx, y+Wcx, y+Sx, y, W2x, y=Wex, y+Wsx, y+Wtx, y+Wcx, y+S-x, -y, W3x, y=Wex, y+Wt-x, -y+12Wcx, y+Wc-x, -y+Wsx, y+Ws-x, -y.
4Σx, y=2Sx, y=W1x, y+W2-x, -y-W3x, y+W3-x, -y.

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